Kev Taw Qhia Txog Silicon Carbide Txheej
Peb cov txheej txheej Chemical Vapor Deposition (CVD) Silicon Carbide (SiC) yog ib txheej uas ruaj khov thiab tiv taus kev hnav, zoo tagnrho rau cov chaw uas xav tau kev tiv taus corrosion thiab thermal.Silicon Carbide txheejyog siv rau hauv cov txheej nyias nyias ntawm ntau yam substrates los ntawm CVD txheej txheem, muab cov yam ntxwv ua tau zoo tshaj plaws.
Cov Nta Tseem Ceeb
● -Kev Ntshiab Zoo Kawg Nkaus: Muaj cov khoom xyaw uas huv heev ntawm99.99995%, pebSiC txheejtxo cov kev pheej hmoo ntawm kev ua qias tuaj hauv kev ua haujlwm semiconductor rhiab heev.
● -Kev Tiv Thaiv Zoo Tshaj Plaws: Qhia tau zoo heev rau kev tiv thaiv kev hnav thiab xeb, ua rau nws zoo meej rau cov tshuaj lom neeg thiab plasma teeb tsa.
● -Kev Ua Kub Siab: Xyuas kom muaj kev ua tau zoo nyob rau hauv qhov kub thiab txias heev vim nws cov khoom siv thermal zoo heev.
● -Kev Ruaj Ntseg ntawm Qhov Ntev: Tswj tau qhov ruaj khov ntawm cov qauv thoob plaws ntau qhov kub thiab txias, ua tsaug rau nws cov coefficient thermal expansion qis.
● -Kev Nyuaj Siab Zoo Dua: Nrog rau qhov ntsuas hardness ntawm40 GPa, peb cov txheej SiC tiv taus qhov cuam tshuam thiab kev puas tsuaj loj heev.
● -Qhov chaw du: Muab qhov tiav zoo li daim iav, txo cov khoom me me thiab txhim kho kev ua haujlwm zoo.
Cov ntawv thov
Semicera Cov txheej txheem SiCCov no yog siv rau ntau theem ntawm kev tsim khoom semiconductor, suav nrog:
● -Kev Tsim Khoom Siv LED Chip
● -Kev Tsim Khoom Polysilicon
● -Kev Loj Hlob ntawm Semiconductor Crystal
● -Silicon thiab SiC Epitaxy
● -Kev Oxidation thiab Diffusion ntawm Thermal (TO&D)
Peb muab cov khoom SiC-coated uas ua los ntawm cov graphite isostatic muaj zog heev, carbon fiber-reinforced carbon thiab 4N recrystallized silicon carbide, tsim rau cov reactors fluidized-bed,Cov khoom siv hloov pauv STC-TCS, cov khoom siv CZ unit reflectors, SiC wafer boat, SiCwafer paddle, SiC wafer tube, thiab wafer carriers siv hauv PECVD, silicon epitaxy, MOCVD cov txheej txheem.
Cov txiaj ntsig
● -Lub Neej Ntev Duatxo cov nqi kho thiab lub sijhawm siv khoom siv tsawg heev, ua kom muaj txiaj ntsig zoo dua qub.
● -Zoo dua qub: Ua tiav cov nplaim siab purity uas tsim nyog rau kev ua cov semiconductor, yog li ua kom cov khoom zoo dua.
● -Kev Ua Haujlwm Zoo Dua: Ua kom cov txheej txheem thermal thiab CVD zoo dua, ua rau lub sijhawm voj voog luv dua thiab cov txiaj ntsig zoo dua.
Cov Lus Qhia Txog Kev Siv
● -Cov qauvFCC β theem polycrystaline, feem ntau yog (111) taw qhia
● -Qhov Ceev: 3.21 g/cm³
● -Qhov nyuajQhov nyuaj: 2500 Vickes (500g thauj khoom)
● -Kev Ruaj Khob: 3.0 MPa·m1/2
● -Tus Nqi Sib Npaug Kub (100–600 °C): 4.3 x 10-6k-1
● -Elastic Modulus(1300 ℃):435 GPa
● -Tej Zaj Duab Xis Thickness:100 µm
● -Qhov Roughness ntawm qhov chaw:2-10 µm
Cov Ntaub Ntawv Kev Huv (Ntsuas los ntawm Glow Discharge Mass Spectroscopy)
| Khoom | ppm | Khoom | ppm |
| Li | < 0.001 | Cu | < 0.01 |
| Be | < 0.001 | Zn | < 0.05 |
| Al | < 0.04 | Ga | < 0.01 |
| P | < 0.01 | Ge | < 0.05 |
| S | < 0.04 | As | < 0.005 |
| K | < 0.05 | In | < 0.01 |
| Ca | < 0.05 | Sn | < 0.01 |
| Ti | < 0.005 | Sb | < 0.01 |
| V | < 0.001 | W | < 0.05 |
| Cr | < 0.05 | Te | < 0.01 |
| Mn | < 0.005 | Pb | < 0.01 |
| Fe | < 0.05 | Bi | < 0.05 |
| Ni | < 0.01 |
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