Kev Taw Qhia Txog Cov Neeg Nqa Khoom Wafer
PAWG KHOOM
▶Wafer Carrier System rau PECVD & TALOX Txheej Txheem
• PECVD & TALOX Graphite Nkoj (M4 ~ M12)
• Nkoj SM ntsug (M4, M6)
• Qhov Chaw Cog Qoob Loo & Da Dej Graphite (M4 ~ M6)
• C/C Tais thiab Txheej Ceramic
• Hlau RIE-Tray & Ceramic Txheej
• Kev Siv Lub Tshuab Nqus Tsev: O-Ring & SQ-Ring
▶Cov Txheej Txheem Hloov Chaw Texturing & Wet Etching
• LSC H-Carrier los yog cassette (M4~M12)
• LSC V-Carrier los yog cassette (M4~M12)
• ASC Carrier los yog cassette (M4, M6)
• W/F Lub Thawv Nqa Khoom & Lub Thawv Cia Khoom (M4 ~ M12)
• Log Thauj Khoom (Roller) Series
▶Lub Tsheb Nqa Khoom Siv Hnub Ci thiab Lub Tsheb Nqa Khoom Hlau
• TRC Lub thawv nqa khoom lossis lub cassette (M4 ~ M12)
• Phau Ntawv Xov Xwm (nrog Siv)
NKOJ GRAPHITE (H-Hom)
19P6-216CT (WF M4~M12)
NKOJ GRAPHITE (H-Hom)
21P6-240CT WF M4~M12)
NKOJ GRAPHITE (H-Hom)
23P7-308CT (W/F M4~M12)
NKOJ GRAPHITE (H-Hom)
22P/7-294TP (W/F M4~M12)
NKOJ GRAPHITE (H-Hom)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
Lub thawv ntim khoom WF & Lub thawv cia khoom (~M12)
C/C THAWV LOS YOG TUS NQA (M4~M10)
C/C THAWV LOS YOG TUS NQA (M4~M10)
Nkoj Ntsug (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC TUS NEEG THEM KHOOM (~M12)
TRC TUS NEEG THEM KHOOM (~M12)
GRAPHITE-NKAUJ (M12)
Wafer Carrier System rau PECVD Txheej Txheem
▶ NKOJ GRAPHITE (CT-Tsim) M10/M12 Txheej Txheem
• LUB TSWV YIM TSIM TSHWJ XEEB
▶ NKOJ GRAPHITE (CT-Tsim) M4/M6 Txheej Txheem
▶ Cov Khoom Siv Nkoj
▶ Nkoj Ntsug-161.7mm WAFER
▶ Nkoj Ntsug-166mm WAFER
▶ Nkoj Ntsug-161.7mm, 166mm WAFER
Lub Tsheb Nqa Khoom Siv Hnub Ci thiab Lub Tsheb Nqa Khoom Siv Hlau TRC
HOM: Kev Tswj Xyuas Tsis Siv Neeg
Qhov Loj ntawm lub ncuav mog qab zib: ① 156 × 156MM ② 156.75 × 156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180 × 180 hli ⑥ 210 × 210 hli
SIV: Nqa (Cassette)
PEEV XWM: 100 daim ntawv
Qhov Siab: 4.76MM / 5.953mm / 6.35mm
Qhov Loj: Kwv yees li 559 × 220 × 220MM
Kwv yees li 712 × 260 × 260MM
ZOO: Huab cua
KHOOM SIV: FLAM, SAB BAR-Aluminium (anodizing)
PHAJ SAB-POM (Tiv Thaiv Hluav Taws Xob)
Npog ntawm qab bar-EPDM/PU/VITON (ASE)
TRC-HLAU CARRIER (U'SER LINE)
TRC-HLAU CARRIER (U'SER LINE)
TRC-HLAU CARRIER (U'SER LINE)
PHAJ DA DEJ & LUB TXHUAM, LUB CARRIER
