CVD TaC Txheej

Kev Taw Qhia Txog CVD TaC Txheej:

CVD TaC Txheej yog ib txoj kev siv tshuab uas siv cov pa tshuaj lom neeg los tso cov txheej tantalum carbide (TaC) rau ntawm qhov chaw ntawm lub substrate. Tantalum carbide yog cov khoom siv ceramic ua tau zoo nrog cov khoom siv kho tshuab thiab tshuaj lom neeg zoo heev. Cov txheej txheem CVD tsim cov zaj duab xis TaC sib xws rau ntawm qhov chaw ntawm lub substrate los ntawm kev ua pa roj.

Cov yam ntxwv tseem ceeb:

Kev ua kom zoo thiab hnav tsis kam: Tantalum carbide muaj qhov nyuaj heev, thiab CVD TaC Txheej tuaj yeem txhim kho qhov kev tiv thaiv kev hnav ntawm lub substrate. Qhov no ua rau cov txheej txheem zoo tagnrho rau kev siv hauv cov chaw hnav siab, xws li cov cuab yeej txiav thiab pwm.

Kev Ruaj Ntseg Kub Siab: Cov txheej txheej TaC tiv thaiv cov khoom tseem ceeb ntawm lub cub tawg thiab cov khoom siv reactor ntawm qhov kub txog li 2200 ° C, qhia tau tias muaj kev ruaj khov zoo. Nws tswj kev ruaj khov tshuaj lom neeg thiab kev kho tshuab hauv qab qhov kub thiab txias heev, ua rau nws tsim nyog rau kev ua haujlwm kub thiab kev siv hauv qhov chaw kub thiab txias.

Kev ruaj khov tshuaj zoo heev: Tantalum carbide muaj zog tiv taus corrosion rau feem ntau cov kua qaub thiab alkalis, thiab CVD TaC Txheej tuaj yeem tiv thaiv kev puas tsuaj rau lub substrate hauv cov chaw corrosive.

Lub ntsiab lus yaj siabTantalum carbide muaj qhov kub siab heev (kwv yees li 3880 ° C), uas tso cai rau CVD TaC Coating siv rau hauv qhov kub thiab txias heev yam tsis muaj yaj lossis lwj.

Kev ua tau zoo heev ntawm thermal: Txheej TaC muaj cov thermal conductivity siab, uas pab kom cov cua sov ploj mus zoo hauv cov txheej txheem kub siab thiab tiv thaiv kom tsis txhob kub dhau hauv zos.

Cov ntawv thov uas muaj peev xwm ua tau:

• Cov khoom siv Gallium Nitride (GaN) thiab Silicon Carbide epitaxial CVD reactor suav nrog cov wafer carriers, satellite dishes, showerheads, ceilings, thiab susceptors

• Silicon carbide, gallium nitride thiab aluminium nitride (AlN) cov khoom siv lead ua rau kev loj hlob suav nrog crucibles, cov noob tuav, cov nplhaib qhia thiab cov lim dej

• Cov khoom siv hauv kev lag luam suav nrog cov khoom siv cua sov tiv taus, cov taub hau txhaj tshuaj, cov nplhaib npog thiab cov jigs brazing

Cov yam ntxwv ntawm daim ntawv thov:

• Kub ruaj khov tshaj 2000°C, ua haujlwm tau thaum kub heev
• Tiv taus hydrogen (Hz), ammonia (NH3), monosilane (SiH4) thiab silicon (Si), muab kev tiv thaiv hauv cov chaw muaj tshuaj lom neeg hnyav
• Nws txoj kev tiv taus cua sov ua rau lub voj voog ua haujlwm sai dua
• Graphite muaj zog nplaum, ua kom lub neej ua haujlwm ntev thiab tsis muaj kev tawg ntawm txheej.
• Kev huv siab heev kom tshem tawm cov khoom tsis huv lossis cov pa phem tsis tsim nyog
• Kev npog txheej txheem conformal kom nruj me ntsis rau qhov ntev

Cov lus qhia txog kev siv tshuab:

Kev npaj cov txheej txheem tantalum carbide ntom ntom los ntawm CVD：

TAC txheej nrog crystallinity siab thiab zoo heev uniformity:

CVD TAC COATING Cov Kev Ntsuas Kev Siv Tshuab_Semicera:

Cov saum toj no yog cov nqi ib txwm muaj.