Kev Ua Haujlwm MEMS - Kev Sib Txuas: Daim Ntawv Thov thiab Kev Ua Tau Zoo hauv Kev Lag Luam Semiconductor, Kev Pabcuam Tshwj Xeeb Semicera
Hauv kev lag luam microelectronics thiab semiconductor, MEMS (micro-electromechanical systems) thev naus laus zis tau dhau los ua ib qho ntawm cov thev naus laus zis tseem ceeb uas tsav kev tsim kho tshiab thiab cov khoom siv ua haujlwm siab. Nrog rau kev nce qib ntawm kev tshawb fawb thiab thev naus laus zis, MEMS thev naus laus zis tau siv dav hauv cov sensors, actuators, cov khoom siv kho qhov muag, cov khoom siv kho mob, cov khoom siv hluav taws xob hauv tsheb thiab lwm yam teb, thiab maj mam dhau los ua ib feem tseem ceeb ntawm cov thev naus laus zis niaj hnub no. Hauv cov teb no, cov txheej txheem sib txuas (Bonding), ua ib kauj ruam tseem ceeb hauv kev ua MEMS, ua lub luag haujlwm tseem ceeb hauv kev ua haujlwm thiab kev ntseeg siab ntawm lub cuab yeej.
Kev sib txuas yog ib txoj kev siv tshuab uas sib txuas ob lossis ntau yam khoom siv los ntawm kev siv lub cev lossis tshuaj. Feem ntau, cov txheej txheem sib txawv ntawm cov khoom siv yuav tsum tau txuas los ntawm kev sib txuas hauv MEMS cov khoom siv kom ua tiav kev ua haujlwm zoo thiab kev ua haujlwm. Hauv cov txheej txheem tsim khoom ntawm MEMS cov khoom siv, kev sib txuas tsis yog tsuas yog kev sib txuas xwb, tab sis kuj cuam tshuam ncaj qha rau kev ruaj khov thermal, lub zog kho tshuab, kev ua haujlwm hluav taws xob thiab lwm yam ntawm cov khoom siv.
Hauv kev ua cov txheej txheem MEMS siab, cov thev naus laus zis sib txuas yuav tsum ua kom muaj kev sib txuas ze ntawm cov khoom siv thaum zam txhua qhov tsis zoo uas cuam tshuam rau kev ua haujlwm ntawm lub cuab yeej. Yog li ntawd, kev tswj hwm qhov tseeb ntawm cov txheej txheem sib txuas thiab cov ntaub ntawv sib txuas zoo yog cov yam tseem ceeb kom ntseeg tau tias cov khoom kawg ua tau raws li cov qauv kev lag luam.
Cov ntawv thov MEMS bonding hauv kev lag luam semiconductor
Hauv kev lag luam semiconductor, MEMS thev naus laus zis siv dav hauv kev tsim cov khoom siv me me xws li sensors, accelerometers, pressure sensors, thiab gyroscopes. Nrog rau qhov kev thov nce ntxiv rau cov khoom me me, kev sib xyaw ua ke, thiab cov khoom ntse, qhov tseeb thiab kev ua tau zoo ntawm MEMS cov khoom siv kuj nce ntxiv. Hauv cov ntawv thov no, kev siv tshuab sib txuas yog siv los txuas cov ntaub ntawv sib txawv xws li silicon wafers, iav, hlau, thiab polymers kom ua tiav cov haujlwm zoo thiab ruaj khov.
1. Cov ntsuas siab thiab cov ntsuas nrawm
Hauv cov teb ntawm tsheb, aerospace, khoom siv hluav taws xob rau cov neeg siv khoom, thiab lwm yam, MEMS lub zog ntsuas thiab lub zog ntsuas tau siv dav hauv kev ntsuas thiab tswj cov txheej txheem. Cov txheej txheem sib txuas yog siv los txuas cov silicon chips thiab cov khoom sensor kom ntseeg tau tias muaj kev nkag siab siab thiab raug. Cov sensors no yuav tsum muaj peev xwm tiv taus cov xwm txheej ib puag ncig hnyav, thiab cov txheej txheem sib txuas zoo tuaj yeem tiv thaiv cov khoom kom tsis txhob sib cais lossis ua haujlwm tsis zoo vim muaj kev hloov pauv kub.
2. Cov khoom siv micro-optical thiab MEMS optical switches
Hauv kev sib txuas lus kho qhov muag thiab cov khoom siv laser, MEMS cov khoom siv kho qhov muag thiab cov hloov kho qhov muag ua lub luag haujlwm tseem ceeb. Kev siv tshuab bonding yog siv los ua kom tiav kev sib txuas ntawm cov khoom siv MEMS silicon thiab cov ntaub ntawv xws li cov fibers kho qhov muag thiab daim iav kom ntseeg tau tias muaj kev ua haujlwm zoo thiab ruaj khov ntawm kev xa cov teeb liab kho qhov muag. Tshwj xeeb tshaj yog nyob rau hauv cov ntawv thov nrog zaus siab, dav bandwidth thiab kev xa mus ntev, kev siv tshuab bonding ua tau zoo yog qhov tseem ceeb.
3. MEMS gyroscopes thiab inertial sensors
MEMS gyroscopes thiab inertial sensors yog siv dav rau kev taw qhia thiab kev tso chaw hauv kev lag luam siab xws li kev tsav tsheb tsis siv neeg, robotics, thiab aerospace. Cov txheej txheem sib txuas lus siab tuaj yeem ua kom ntseeg tau tias cov khoom siv ntseeg tau thiab zam kev puas tsuaj lossis kev ua tsis tiav thaum lub sijhawm ua haujlwm ntev lossis kev ua haujlwm siab.
Cov kev cai tseem ceeb ntawm kev siv tshuab bonding hauv MEMS processing
Hauv kev ua MEMS, qhov zoo ntawm cov txheej txheem sib txuas ncaj qha txiav txim siab qhov kev ua tau zoo, lub neej thiab kev ruaj khov ntawm lub cuab yeej. Yuav kom ntseeg tau tias MEMS cov khoom siv tuaj yeem ua haujlwm tau ntev hauv ntau qhov xwm txheej ntawm daim ntawv thov, kev siv tshuab sib txuas yuav tsum muaj cov kev ua tau zoo tseem ceeb hauv qab no:
1. Kev ruaj khov siab thermal
Ntau qhov chaw siv hauv kev lag luam semiconductor muaj qhov kub thiab txias siab, tshwj xeeb tshaj yog nyob rau hauv cov teb ntawm tsheb, aerospace, thiab lwm yam. Qhov ruaj khov thermal ntawm cov khoom sib txuas yog qhov tseem ceeb thiab tuaj yeem tiv taus qhov kub hloov pauv yam tsis muaj kev puas tsuaj lossis kev ua tsis tiav.
2. Kev hnav tsis kam siab
Cov khoom siv MEMS feem ntau muaj cov qauv me me, thiab kev sib txhuam thiab kev txav mus los ntev yuav ua rau cov khoom sib txuas hnav. Cov khoom siv sib txuas yuav tsum muaj kev tiv thaiv kev hnav zoo heev kom ntseeg tau tias lub cuab yeej ruaj khov thiab ua haujlwm tau zoo hauv kev siv mus sij hawm ntev.
3. Kev huv siab
Kev lag luam semiconductor muaj cov kev cai nruj heev rau kev huv ntawm cov khoom siv. Txhua yam khoom me me uas muaj kuab paug yuav ua rau lub cuab yeej tsis ua haujlwm lossis ua haujlwm tsis zoo. Yog li ntawd, cov ntaub ntawv siv rau hauv cov txheej txheem sib txuas yuav tsum muaj kev huv siab heev kom ntseeg tau tias lub cuab yeej tsis raug cuam tshuam los ntawm kev ua qias tuaj sab nraud thaum lub sijhawm ua haujlwm.
4. Kev sib txuas lus tseeb
Cov khoom siv MEMS feem ntau xav tau qhov ua tiav ntawm qib micron lossis txawm tias qib nanometer. Cov txheej txheem sib txuas yuav tsum xyuas kom meej tias txhua txheej ntawm cov khoom siv sib dhos kom raug kom ntseeg tau tias kev ua haujlwm thiab kev ua tau zoo ntawm lub cuab yeej tsis raug cuam tshuam.
Kev sib txuas anodized
Kev sib txuas anodized:
● Siv tau rau kev sib txuas ntawm silicon wafers thiab iav, hlau thiab iav, semiconductor thiab alloy, thiab semiconductor thiab iav
Kev sib txuas ntawm Eutectoid:
● Siv tau rau cov ntaub ntawv xws li PbSn, AuSn, CuSn, thiab AuSi
Kev nplaum nplaum:
● Siv cov kua nplaum tshwj xeeb, tsim nyog rau cov kua nplaum tshwj xeeb xws li AZ4620 thiab SU8
● Siv tau rau 4-nti thiab 6-nti
Kev Pabcuam Txuas Lus Semicera
Ua ib lub tuam txhab ua lag luam hauv kev muab cov kev daws teeb meem MEMS, Semicera cog lus tias yuav muab cov kev pabcuam sib txuas ua ke uas muaj qhov tseeb thiab ruaj khov rau cov neeg siv khoom. Peb cov thev naus laus zis sib txuas tuaj yeem siv dav hauv kev sib txuas ntawm ntau yam khoom siv, suav nrog silicon, iav, hlau, ceramics, thiab lwm yam, muab cov kev daws teeb meem tshiab rau cov ntawv thov siab hauv semiconductor thiab MEMS teb.
Semicera muaj cov khoom siv tsim khoom thiab cov pab pawg tshaj lij, thiab tuaj yeem muab cov kev daws teeb meem sib txuas raws li qhov xav tau tshwj xeeb ntawm cov neeg siv khoom. Txawm hais tias nws yog kev sib txuas txhim khu kev qha hauv qhov kub thiab txias siab, lossis kev sib txuas ntawm cov khoom siv me me, Semicera tuaj yeem ua tau raws li ntau yam kev cai ntawm cov txheej txheem nyuaj kom ntseeg tau tias txhua yam khoom tuaj yeem ua tau raws li cov qauv zoo tshaj plaws.
Peb cov kev pabcuam sib txuas lus tsis yog tsuas yog siv rau cov txheej txheem sib txuas lus ib txwm muaj xwb, tab sis kuj suav nrog kev sib txuas hlau, kev sib txuas thermal compression, kev sib txuas nplaum thiab lwm yam txheej txheem, uas tuaj yeem muab kev txhawb nqa kev tshaj lij rau ntau yam khoom siv, cov qauv thiab cov kev xav tau ntawm daim ntawv thov. Tsis tas li ntawd, Semicera kuj tseem tuaj yeem muab kev pabcuam puv ntoob rau cov neeg siv khoom los ntawm kev tsim qauv mus rau kev tsim khoom loj kom ntseeg tau tias txhua yam kev xav tau ntawm cov neeg siv khoom tuaj yeem ua tiav raws li qhov tseeb.
