High purity semiconductor hnav resistant silicon carbide ceramic mechanical caj npab

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WeiTai ZogTechnology Co., Ltd.yog lub chaw tsim khoom tshwj xeeb hauv wafer thiab qib siab semiconductor consumables.Peb mob siab rau muab cov khoom zoo, txhim khu kev qha, thiab cov khoom tshiab rau kev tsim khoom semiconductor,photovoltaic kev lag luamthiab lwm yam kev lag luam.

Peb cov khoom lag luam suav nrog SiC / TaC coated graphite cov khoom thiab cov khoom siv ceramic, suav nrog ntau yam ntaub ntawv xws li silicon carbide, silicon nitride, thiab txhuas oxide thiab lwm yam.

Raws li ib tug neeg muab kev ntseeg siab, peb nkag siab txog qhov tseem ceeb ntawm cov khoom siv hauv kev tsim khoom, thiab peb tau cog lus rau kev xa cov khoom uas ua tau raws li cov qauv zoo tshaj plaws kom ua tiav peb cov neeg siv khoom xav tau.

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Cov yam ntxwv thiab qhov zoo

1.Precise qhov ntev thiab thermal stability

2.High tshwj xeeb nruj thiab zoo heev thermal uniformity, ntev siv tsis yooj yim rau khoov deformation;

3.It muaj ib tug du nto thiab zoo hnav tsis kam, yog li kev nyab xeeb tuav lub nti yam tsis muaj kab mob.

4.Silicon carbide resistivity nyob rau hauv 106-108Ω, tsis-sib nqus, nyob rau hauv txoj kab nrog anti-ESD specification yuav tsum tau;Nws tuaj yeem tiv thaiv qhov sib txuam ntawm cov hluav taws xob zoo li qub ntawm cov nti

5.Good thermal conductivity, tsawg expansion coefficient.