Txoj kev loj hlob ntawm ib leeg siv lead ua silicon yog ua tiav nyob rau hauv thermal teb. Lub tshav kub zoo yog qhov tsim nyog rau kev txhim kho cov khoom siv lead ua zoo thiab muaj kev ua haujlwm siab crystallization. Tus tsim ntawm lub tshav kub thermal feem ntau txiav txim siab qhov kev hloov pauv thiab kev hloov pauv ntawm qhov kub thiab txias gradients nyob rau hauv lub dynamic thermal teb. Qhov ntws ntawm cov roj hauv lub cub tawg chamber thiab qhov sib txawv ntawm cov khoom siv hauv thermal teb ncaj qha txiav txim siab txog kev pab cuam lub neej ntawm thermal teb. Ib qho tsis tsim nyog tsim thermal teb tsis tsuas yog ua rau nws nyuaj rau kev loj hlob muaju uas ua tau raws li qhov yuav tsum tau ua, tab sis kuj tsis tuaj yeem loj hlob tiav ib leeg muaju raws li qee cov txheej txheem. Qhov no yog vim li cas Czochralski monocrystalline silicon kev lag luam suav nrog thermal teb tsim raws li cov thev naus laus zis thev naus laus zis thiab nqis peev ntau cov neeg ua haujlwm thiab cov khoom siv hauv thermal teb tshawb fawb thiab kev tsim kho.
Lub thermal system yog tsim los ntawm ntau yam khoom siv thermal teb. Peb tsuas yog qhia luv luv cov ntaub ntawv siv hauv thermal teb. Raws li rau qhov kub thiab txias faib nyob rau hauv thermal teb thiab nws cov kev cuam tshuam rau siv lead ua rub, peb yuav tsis soj ntsuam nws ntawm no. Cov khoom siv thermal teb hais txog kev loj hlob siv lead ua lub tshuab nqus tsev vacuum. Cov qauv thiab thermally insulated feem ntawm lub chamber, uas yog ib qho tseem ceeb los tsim cov ntaub ntawv kub zoo nyob ib ncig ntawm lub semiconductor yaj thiab muaju.
ib. thermal field structural cov ntaub ntawv
Cov khoom txhawb nqa yooj yim rau kev loj hlob ib leeg siv lead ua silicon los ntawm Czochralski txoj kev yog high-purity graphite. Cov ntaub ntawv graphite ua lub luag haujlwm tseem ceeb hauv kev lag luam niaj hnub no. Hauv kev npaj ntawm ib leeg siv lead ua silicon los ntawm Czochralski txoj kev, lawv tuaj yeem siv los ua cov khoom siv hluav taws xob thermal xws li cov cua sov, cov raj qhia, Crucibles, cov raj rwb thaiv tsev, thiab cov tais crucible.
Cov khoom siv graphite raug xaiv vim nws qhov yooj yim ntawm kev npaj hauv cov ntim loj, kev ua tau zoo thiab cov khoom kub tsis kam. Carbon nyob rau hauv daim ntawv ntawm pob zeb diamond los yog graphite muaj ib tug siab melting point tshaj tej yam los yog compound. Cov khoom siv graphite muaj zog heev, tshwj xeeb tshaj yog thaum kub kub, thiab nws cov hluav taws xob thiab thermal conductivity kuj zoo heev. Nws cov hluav taws xob conductivity ua rau nws tsim nyog raws li cov khoom siv cua sov, thiab nws muaj cov thermal conductivity txaus uas tuaj yeem faib cov cua sov uas tsim los ntawm lub rhaub rau lub crucible thiab lwm qhov chaw ntawm thermal teb. Txawm li cas los xij, ntawm qhov kub thiab txias, tshwj xeeb tshaj yog nyob rau qhov ntev, lub ntsiab hom ntawm kev hloov hluav taws xob yog hluav taws xob.
Graphite qhov chaw yog pib los ntawm extrusion los yog isostatic nias ntawm nplua carbonaceous hais tov nrog ib tug binder. High-zoo graphite qhov chaw feem ntau yog isostatically nias. Tag nrho cov khoom yog thawj carbonized thiab ces graphitized ntawm kub heev, ze rau 3000 ° C. Cov khoom siv los ntawm cov monoliths no feem ntau yog purified nyob rau hauv ib qho chaw uas muaj chlorine ntawm qhov kub thiab txias kom tshem tawm cov hlau paug kom ua raws li kev lag luam semiconductor. Txawm li cas los xij, txawm tias muaj kev ua kom huv huv, cov hlau tsis huv yog qhov kev txiav txim siab ntau dua li kev tso cai los ntawm cov ntaub ntawv siv lead ua silicon. Yog li ntawd, kev saib xyuas yuav tsum tau ua nyob rau hauv thermal teb tsim los tiv thaiv kev kis kab mob ntawm cov khoom no los ntawm kev nkag mus rau hauv lub yaj los yog siv lead ua nto.
Cov khoom siv graphite yog me ntsis permeable, uas tso cai rau cov hlau seem sab hauv kom yooj yim mus txog qhov chaw. Tsis tas li ntawd, cov silicon monoxide tam sim no nyob rau hauv cov pa pururge nyob ib ncig ntawm lub graphite nto tuaj yeem nkag mus tob rau hauv cov ntaub ntawv feem ntau thiab hnov mob.
Thaum ntxov ib leeg siv lead ua silicon rauv cua sov tau ua los ntawm cov hlau refractory xws li tungsten thiab molybdenum. Raws li graphite ua technology matures, cov khoom hluav taws xob ntawm kev sib txuas ntawm graphite Cheebtsam tau ruaj khov, thiab ib leeg siv lead ua silicon rauv cua sov tau hloov tag nrho tungsten thiab molybdenum thiab lwm yam khoom siv cua sov. Cov khoom siv graphite feem ntau siv tam sim no yog isostatic graphite. semicera tuaj yeem muab cov khoom zoo isostatically nias graphite.
Hauv Czochralski ib leeg siv lead ua silicon rauv, C / C cov ntaub ntawv sib xyaw yog qee zaum siv, thiab tam sim no tau siv los tsim bolts, ceev, crucibles, load-bearing daim hlau thiab lwm yam khoom. Carbon / carbon (c / c) cov ntaub ntawv sib xyaw yog cov khoom siv carbon fiber reinforced carbon-based composite cov ntaub ntawv. Lawv muaj lub zog tshwj xeeb, siab tshwj xeeb modulus, tsis tshua muaj thermal expansion coefficient, zoo hluav taws xob conductivity, loj tawg toughness, tsis tshua muaj lub ntiajteb txawj nqus, thermal shock kuj, corrosion kuj, Nws muaj ib tug series ntawm zoo heev zog xws li kub tsis kam thiab tam sim no dav. siv nyob rau hauv aerospace, kev sib tw, biomaterials thiab lwm yam teb raws li ib tug tshiab hom ntawm high kub resistant yam ntxwv khoom. Tam sim no, lub ntsiab bottleneck ntsib los ntawm domestic C / C composite cov ntaub ntawv yog nqi thiab industrialization teeb meem.
Muaj ntau lwm cov ntaub ntawv siv los tsim thermal teb. Carbon fiber reinforced graphite muaj cov khoom siv zoo dua qub; Txawm li cas los xij, nws kim dua thiab ua rau lwm yam kev tsim qauv. Silicon carbide (SiC) yog cov khoom siv zoo dua li graphite hauv ntau txoj hauv kev, tab sis nws kim dua thiab nyuaj rau kev tsim cov khoom loj. Txawm li cas los xij, SiC feem ntau yog siv los ua CVD txheej los ua kom lub neej ntawm graphite qhov chaw raug cov pa roj silicon monoxide thiab txo cov kab mob ntawm graphite. Qhov ntom ntom CVD silicon carbide txheej zoo tiv thaiv cov kab mob hauv cov khoom siv graphite microporous los ntawm qhov chaw.
Lwm qhov yog CVD cov pa roj carbon, uas tuaj yeem tsim cov txheej ntom ntom rau saum cov graphite qhov chaw. Lwm cov ntaub ntawv kub-resistant, xws li molybdenum los yog ceramic cov ntaub ntawv uas sib haum nrog ib puag ncig, yuav siv tau qhov twg tsis muaj kev pheej hmoo ntawm kev kis kab mob ntawm cov yaj. Txawm li cas los xij, oxide ceramics tsis muaj qhov tsim nyog rau kev sib cuag ncaj qha nrog cov ntaub ntawv graphite ntawm qhov kub thiab txias, feem ntau tawm ob peb txoj hauv kev yog tias yuav tsum tau rwb thaiv tsev. Ib qho yog hexagonal boron nitride (qee zaum hu ua dawb graphite vim muaj cov khoom zoo sib xws), tab sis nws muaj cov khoom siv tsis zoo. Molybdenum feem ntau tsim nyog rau cov ntawv thov kub vim nws cov nqi nruab nrab, tsis tshua muaj diffusivity hauv silicon crystals, thiab qis sib cais coefficient, txog 5 × 108, uas tso cai rau qee qhov molybdenum paug ua ntej rhuav tshem cov qauv siv lead ua.
ob. Cov khoom siv thermal field insulation
Cov khoom siv rwb thaiv tsev feem ntau yog cov pa roj carbon muaj nyob hauv ntau hom. Cov pa roj carbon zoo yog ua los ntawm cov fibers nyias uas ua raws li thermal rwb thaiv tsev vim tias lawv thaiv cov hluav taws xob thermal ntau zaus hauv qhov luv luv. Cov pa roj carbon monoxide yog woven rau hauv cov ntaub ntawv nyias nyias, uas tom qab ntawd txiav mus rau hauv cov duab uas xav tau thiab nruj nreem khoov rau lub voj voog tsim nyog. Kho qhov xav tau yog tsim los ntawm cov khoom siv fiber ntau zoo sib xws, siv cov ntaub ntawv uas muaj cov pa roj carbon monoxide los txuas cov fibers dispersed mus rau hauv ib qho khoom zoo thiab stylish. Siv cov tshuaj vapor deposition ntawm cov pa roj carbon monoxide binders tuaj yeem txhim kho lub zog ntawm cov khoom.
Feem ntau, sab nrauv ntawm insulating cured xav yog coated nrog ib tug nruam graphite txheej los yog ntawv ci kom txo tau erosion thiab hnav raws li ib tug particulate contamination. Lwm hom kev rwb thaiv tsev cov ntaub ntawv carbon-based kuj muaj, xws li cov pa roj carbon monoxide. Feem ntau, cov ntaub ntawv graphitized tau pom meej meej dua vim tias graphitization zoo heev txo qhov chaw ntawm cov fiber ntau. Cov ntaub ntawv saum npoo av siab no tso cai rau kev tawm ntau dua thiab siv sij hawm tsawg dua los kos lub qhov cub rau lub tshuab nqus tsev. Lwm hom yog C / C cov khoom siv sib xyaw, uas muaj cov yam ntxwv zoo xws li lub teeb yuag, kev ua siab ntev ntev, thiab lub zog siab. Siv nyob rau hauv thermal teb los hloov graphite qhov chaw, uas txo qhov kev hloov zaus ntawm graphite qhov chaw thiab txhim kho ib qho siv lead ua zoo thiab ntau lawm stability.
Raws li kev faib tawm ntawm cov khoom siv raw, cov pa roj carbon zoo tuaj yeem muab faib ua polyacrylonitrile-raws li carbon xav, viscose-raws li carbon xav, thiab asphalt-based carbon xav.
Polyacrylonitrile-based carbon xav tau muaj cov hmoov tshauv loj, thiab cov monofilaments ua nkig tom qab kev kho kub kub. Thaum lub sijhawm ua haujlwm, cov plua plav tau yooj yim tsim kom muaj kuab paug rau qhov chaw sov. Nyob rau tib lub sijhawm, cov fibers yooj yim nkag mus rau tib neeg lub qhov hws thiab ua pa, ua rau muaj kev phom sij rau tib neeg kev noj qab haus huv; viscose-raws li carbon zoo Nws muaj cov thermal rwb thaiv tsev zoo, yog qhov muag muag tom qab kev kho cua sov, thiab tsis tshua muaj plua plav. Txawm li cas los xij, ntu ntu ntawm cov viscose-raws li strands muaj qhov tsis sib xws thiab muaj ntau cov kwj deg ntawm cov fiber ntau, uas yog ib qho yooj yim tsim nyob rau hauv lub xub ntiag ntawm oxidizing cua nyob rau hauv ib tug Czochralski ib leeg siv lead ua silicon cub. Cov pa roj xws li CO2 ua rau nag lossis daus ntawm cov pa oxygen thiab cov ntsiab lus ntawm cov khoom siv lead ua silicon. Cov tuam txhab tseem ceeb suav nrog German SGL thiab lwm lub tuam txhab. Tam sim no, pitch-raws li cov pa roj carbon monoxide yog qhov siv dav tshaj plaws hauv kev lag luam semiconductor ib leeg siv lead ua, thiab nws cov thermal rwb thaiv tsev kev ua tau zoo dua li cov nplaum nplaum. Cov pos hniav raws li cov pa roj carbon monoxide tsis zoo, tab sis asphalt-raws li cov pa roj carbon monoxide muaj kev purity ntau dua thiab qis dua cov plua plav tawm. Cov neeg tsim khoom suav nrog Nyiv Kureha Tshuaj, Osaka Gas, thiab lwm yam.
Txij li cov duab ntawm cov pa roj carbon zoo tsis yog tsau, nws tsis yooj yim rau kev khiav lag luam. Tam sim no ntau lub tuam txhab tau tsim cov khoom siv thermal rwb thaiv tsev tshiab raws li cov pa roj carbon zoo - kho cov pa roj carbon zoo. Kho cov pa roj carbon monoxide kuj hu ua tawv tawv. Nws yog cov pa roj carbon monoxide uas muaj qee yam zoo thiab kev ruaj ntseg ntawm tus kheej tom qab impregnated nrog cob, laminated, solidified thiab carbonized.
Kev loj hlob zoo ntawm ib leeg siv lead ua silicon yog cuam tshuam ncaj qha los ntawm qhov chaw thermal, thiab cov ntaub ntawv carbon fiber rwb thaiv tsev ua lub luag haujlwm tseem ceeb hauv qhov chaw no. Cov pa roj carbon fiber ntau thermal rwb thaiv tsev muag muag tseem muaj qhov txiaj ntsig tseem ceeb hauv kev lag luam photovoltaic semiconductor vim nws cov nqi zoo, zoo thermal rwb thaiv tsev nyhuv, saj zawg zog tsim thiab customizable duab. Tsis tas li ntawd, carbon fiber nruj rwb thaiv tsev xav tau yuav muaj ntau chav rau kev loj hlob nyob rau hauv lub thermal teb khoom lag luam vim hais tias ntawm nws tej lub zog thiab ntau dua operability. Peb tau cog lus rau kev tshawb fawb thiab kev loj hlob nyob rau hauv lub tshav pob ntawm thermal rwb thaiv tsev ntaub ntawv thiab tsis tu ncua optimize cov khoom ua tau zoo los txhawb txoj kev vam meej thiab kev loj hlob ntawm photovoltaic semiconductor kev lag luam.
Post lub sij hawm: May-15-2024