Tshawb nrhiav keeb kwm yav dhau
Daim ntawv thov tseem ceeb ntawm silicon carbide (SiC): Raws li qhov dav bandgap semiconductor khoom, silicon carbide tau nyiam ntau yam vim nws cov khoom siv hluav taws xob zoo heev (xws li bandgap loj, ntau dua electron saturation tshaj tawm thiab thermal conductivity). Cov khoom no ua rau nws siv dav hauv high-frequency, high-temperature thiab high-power device manufacturing, tshwj xeeb tshaj yog nyob rau hauv lub teb ntawm lub hwj chim electronics.
Kev cuam tshuam ntawm crystal defects: Txawm hais tias cov txiaj ntsig zoo ntawm SiC, qhov tsis xws ntawm cov khoom siv lead ua tseem yog ib qho teeb meem loj uas cuam tshuam kev txhim kho cov khoom siv ua haujlwm siab. Cov teeb meem no tuaj yeem ua rau cov cuab yeej ua haujlwm tsis zoo thiab cuam tshuam rau kev ntseeg tau ntawm lub cuab yeej.
X-ray topological imaging thev naus laus zis: Txhawm rau txhim kho cov siv lead ua kom zoo thiab nkag siab txog qhov cuam tshuam ntawm kev ua haujlwm tsis zoo ntawm cov cuab yeej siv, nws yog ib qho tsim nyog los ua tus yam ntxwv thiab txheeb xyuas qhov teeb meem tsis zoo hauv SiC crystals. X-ray topological imaging (tshwj xeeb tshaj yog siv cov kab hluav taws xob synchrotron) tau dhau los ua cov txheej txheem tseem ceeb uas tuaj yeem tsim cov duab daws teeb meem ntawm cov qauv sab hauv ntawm cov siv lead ua.
Tshawb nrhiav tswv yim
Raws li ray tracing simulation thev naus laus zis: Tsab ntawv tshaj tawm qhia txog kev siv hluav taws xob tracing simulation thev naus laus zis raws li kev taw qhia qhov sib txawv ntawm qhov sib txawv los simulate qhov tsis xws luag pom hauv cov duab X-ray topological. Txoj kev no tau raug pov thawj los ua ib txoj hauv kev zoo los kawm txog cov khoom siv lead ua tsis zoo hauv ntau yam semiconductors.
Kev txhim kho ntawm cov tshuab simulation: Txhawm rau kom zoo dua simulate qhov sib txawv dislocations pom nyob rau hauv 4H-SiC thiab 6H-SiC crystals, cov kws tshawb fawb tau txhim kho cov hluav taws xob tracing simulation thev naus laus zis thiab suav nrog qhov cuam tshuam ntawm qhov chaw so thiab photoelectric absorption.
Cov ntsiab lus tshawb fawb
Dislocation hom kev tsom xam: Cov kab lus tau tshuaj xyuas cov yam ntxwv ntawm ntau hom dislocations (xws li ntsia hlau dislocations, ntug dislocations, sib xyaw dislocations, basal dav hlau dislocations thiab Frank-type dislocations) nyob rau hauv ntau polytypes ntawm SiC (xws li 4H thiab 6H) siv ray tracing tshuab simulation.
Kev siv thev naus laus zis simulation: Daim ntawv thov kev siv hluav taws xob tracing simulation thev naus laus zis nyob rau hauv cov kab teeb sib txawv xws li cov kab hluav taws xob tsis muaj zog thiab lub dav hlau nthwv dej topology, nrog rau yuav ua li cas los txiav txim siab qhov tob tob ntawm kev cuam tshuam los ntawm kev simulation thev naus laus zis.
Kev sib xyaw ua ke ntawm kev sim thiab simulations: Los ntawm kev sib piv cov kev sim tau txais X-ray topological dluab nrog cov duab simulated, qhov tseeb ntawm cov tshuab simulation hauv kev txiav txim siab hom dislocation, Burgers vector thiab spatial faib ntawm dislocations nyob rau hauv lub siv lead ua muaj tseeb.
Kev tshawb fawb xaus
Kev ua tau zoo ntawm kev siv tshuab simulation: Txoj kev tshawb no qhia tau hais tias ray tracing simulation thev naus laus zis yog ib txoj hauv kev yooj yim, tsis muaj kev puas tsuaj thiab tsis paub meej los qhia cov khoom ntawm ntau hom kev sib txawv hauv SiC thiab tuaj yeem kwv yees qhov kev nkag mus tob ntawm qhov sib txawv.
3D dislocation configuration tsom xam: Los ntawm kev simulation thev naus laus zis, 3D dislocation configuration tsom xam thiab ntsuas qhov ceev tuaj yeem ua tau, uas yog qhov tseem ceeb rau kev nkag siab tus cwj pwm thiab kev hloov pauv ntawm kev hloov pauv thaum lub sij hawm siv lead ua loj hlob.
Cov ntawv thov yav tom ntej: Ray tracing simulation thev naus laus zis yuav tsum tau siv ntxiv rau kev siv hluav taws xob high-zog topology nrog rau kev kuaj X-ray topology. Tsis tas li ntawd, cov cuab yeej no tseem tuaj yeem txuas ntxiv mus rau qhov simulation ntawm cov yam ntxwv tsis xws luag ntawm lwm cov polytypes (xws li 15R-SiC) lossis lwm yam khoom siv semiconductor.
Daim duab Overview
Daim duab 1: Schematic daim duab ntawm synchrotron hluav taws xob X-ray topological imaging teeb, nrog rau kis tau tus mob (Laue) geometry, rov qab xav txog (Bragg) geometry, thiab grazing xwm txheej geometry. Cov geometries no tsuas yog siv los sau cov duab X-ray topological.
Fig. 2: Schematic daim duab ntawm X-ray diffraction ntawm lub distorted cheeb tsam nyob ib ncig ntawm lub ntsia hlau dislocation. Daim duab no piav qhia txog kev sib raug zoo ntawm qhov teeb meem beam (s0) thiab lub diffraction beam (sg) nrog lub zos diffraction dav hlau ib txwm (n) thiab lub zos Bragg lub kaum sab xis (θB).
Fig. 3: Back-reflection X-ray topography dluab ntawm micropipes (MPs) ntawm 6H–SiC wafer thiab qhov sib piv ntawm cov ntsia hlau simulated dislocation (b = 6c) nyob rau hauv tib lub diffraction.
Fig. 4: Micropipe khub nyob rau hauv daim duab back-reflection topography ntawm 6H–SiC wafer. Cov duab ntawm tib MPs nrog sib txawv qhov sib txawv thiab MPs nyob rau hauv cov lus qhia rov qab yog qhia los ntawm txoj kab hluav taws xob tracing simulations.
Daim duab 5: Grazing xwm txheej X-ray topography cov duab ntawm kaw-core ntsia hlau dislocations (TSDs) ntawm 4H-SiC wafer tau qhia. Cov duab qhia txog qhov sib txawv ntawm ntug.
Daim duab 6: Ray tracing simulations ntawm grazing tshwm sim X-ray topography dluab ntawm sab laug-tes thiab sab tes xis 1c TSDs ntawm 4H-SiC wafer tau qhia.
Daim duab 7: Ray tracing simulations ntawm TSDs nyob rau hauv 4H–SiC thiab 6H–SiC yog qhia, qhia dislocations nrog txawv Burgers vectors thiab polytypes.
Fig. 8: Qhia txog qhov xwm txheej ntawm grazing xwm txheej X-ray topological dluab ntawm ntau hom threading ntug dislocations (TEDs) ntawm 4H-SiC wafers, thiab TED topological dluab simulated siv txoj kev ray tracing.
Fig. 9: Qhia X-ray rov qab-reflection topological dluab ntawm ntau yam TED hom ntawm 4H-SiC wafers, thiab simulated TED sib piv.
Daim duab 10: Qhia cov duab hluav taws xob tracing simulation cov duab sib xyaw threading dislocations (TMDs) nrog rau cov Burgers vectors tshwj xeeb, thiab cov duab topological kev sim.
Daim duab 11: Qhia cov duab rov qab-reflection topological ntawm basal dav hlau dislocations (BPDs) ntawm 4H-SiC wafers, thiab daim duab schematic ntawm lub simulated ntug dislocation contrast tsim.
Fig. 12: Qhia cov duab hluav taws xob tracing simulation ntawm txoj cai-tes helical BPDs ntawm qhov sib txawv ntawm qhov xav txog qhov chaw so thiab cov teebmeem photoelectric absorption.
Daim duab 13: Qhia cov duab hluav taws xob tracing simulation ntawm sab tes xis helical BPDs ntawm qhov tob sib txawv, thiab cov grazing xwm txheej X-ray topological dluab.
Daim duab 14: Qhia cov duab kos duab ntawm lub dav hlau basal dislocations nyob rau hauv ib qho kev taw qhia ntawm 4H-SiC wafers, thiab yuav ua li cas los txiav txim qhov tob tob los ntawm kev ntsuas qhov ntev projection.
Fig. 15: Qhov sib piv ntawm BPDs nrog txawv Burgers vectors thiab kab lus qhia nyob rau hauv grazing tshwm sim X-ray topological dluab, thiab cov ray tracing simulation tshwm sim.
Daim duab 16: Cov duab hluav taws xob tracing simulation ntawm txoj cai-tes deflected TSD ntawm 4H-SiC wafer, thiab cov duab grazing tshwm sim X-ray topological duab.
Daim duab 17: Cov duab hluav taws xob tracing simulation thiab kev sim duab ntawm deflected TSD ntawm 8 ° offset 4H-SiC wafer tau qhia.
Daim duab 18: Cov duab ray tracing simulation ntawm deflected TSD thiab TMDs nrog txawv Burgers vectors tab sis tib kab kev taw qhia tau qhia.
Fig. 19: Cov duab hluav taws xob tracing simulation ntawm Frank-hom dislocations, thiab cov grazing tshwm sim X-ray topological duab tau qhia.
Daim duab 20: Cov duab xaim dawb xaim X-ray topological ntawm lub micropipe ntawm 6H-SiC wafer, thiab cov duab hluav taws xob tracing simulation tau pom.
Daim duab 21: Cov kab mob tshwm sim monochromatic X-ray topological duab ntawm cov qauv txiav axially ntawm 6H-SiC, thiab cov duab hluav taws xob tracing simulation ntawm BPDs tau pom.
Daim duab 22: qhia cov duab hluav taws xob tracing simulation ntawm BPDs hauv 6H-SiC axially txiav cov qauv ntawm cov xwm txheej sib txawv.
Daim duab 23: qhia cov duab hluav taws xob tracing simulation ntawm TED, TSD thiab TMDs hauv 6H-SiC axially txiav cov qauv hauv qab grazing xwm txheej geometry.
Daim duab 24: qhia cov duab X-ray topological ntawm deflected TSDs ntawm ntau sab ntawm cov kab isoclinic ntawm 4H-SiC wafer, thiab cov duab sib thooj tracing simulation dluab.
Kab lus no tsuas yog rau kev sib qhia kev kawm xwb. Yog tias muaj kev ua txhaum cai, thov hu rau peb kom tshem tawm.
Post lub sij hawm: Jun-18-2024