Daim ntawv thov ntawm Silicon Carbide Ceramics hauv Semiconductor Field

Semiconductors:

Kev lag luam semiconductor ua raws li kev cai lij choj ntawm "ib tiam ntawm thev naus laus zis, ib tiam ntawm cov txheej txheem, thiab ib tiam ntawm cov cuab yeej", thiab kev txhim kho thiab rov ua dua ntawm cov khoom siv semiconductor feem ntau yog nyob ntawm kev siv thev naus laus zis ntawm qhov tseeb. Ntawm lawv, precision ceramic qhov chaw yog cov feem ntau sawv cev semiconductor precision qhov chaw cov ntaub ntawv, uas muaj cov ntaub ntawv tseem ceeb nyob rau hauv ib tug series ntawm loj semiconductor manufacturing txuas xws li tshuaj vapor deposition, lub cev vapor deposition, ion implantation, thiab etching. Xws li cov bearings, kev taw qhia rails, hauv ob sab phlu, electrostatic chucks, mechanical tuav caj npab, thiab lwm yam. tshwj xeeb tshaj yog nyob rau hauv cov khoom kab noj hniav, nws plays lub luag hauj lwm ntawm kev txhawb nqa, kev tiv thaiv, thiab kev sib txawv.

Txij li xyoo 2023, Netherlands thiab Nyij Pooj kuj tau ua tiav cov kev cai tshiab lossis cov cai tswjfwm kev lag luam txawv teb chaws rau kev tswj hwm, ntxiv cov kev cai lij choj xa tawm rau cov khoom siv semiconductor suav nrog cov tshuab lithography, thiab cov qauv ntawm semiconductor los tiv thaiv thoob ntiaj teb tau maj mam tshwm sim. Qhov tseem ceeb ntawm kev tswj hwm ywj pheej ntawm cov saw hlau tau dhau los ua qhov tseem ceeb. Tau ntsib nrog qhov kev thov rau thaj chaw ntawm cov khoom siv semiconductor, cov tuam txhab hauv tsev tau nquag txhawb kev tsim kho kev lag luam. Zhongci Electronics tau paub qhov chaw ntawm high-tech precision qhov chaw xws li cua sov daim hlau thiab electrostatic chucks, daws qhov teeb meem "bottleneck" ntawm lub domestic semiconductor khoom kev lag luam; Dezhi Cov Khoom Tshiab, tus thawj coj hauv tsev xa khoom ntawm SiC coated graphite hauv paus thiab SiC etching rings, tau ua tiav kev nqis peev ntawm 100 lab yuan, thiab lwm yam ....
High-conductivity silicon nitride ceramic substrates:

Silicon nitride ceramic substrates yog tsuas yog siv nyob rau hauv lub hwj chim units, semiconductor li thiab inverters ntawm ntshiab hluav taws xob tsheb (EVs) thiab hybrid hluav taws xob tsheb (HEVs), thiab muaj loj ua lag luam muaj peev xwm thiab daim ntawv thov prospects.

Tam sim no, lub siab thermal conductivity silicon nitride ceramic substrate cov ntaub ntawv rau kev lag luam daim ntaub ntawv yuav tsum thermal conductivity ≥85 W / (m·K), dabtsi yog khoov zog ≥650MPa, thiab puas toughness 5 ~ 7MPam 1/2. Cov tuam txhab uas muag tiag tiag muaj peev xwm los tsim cov thermal conductivity silicon nitride ceramic substrates feem ntau yog Toshiba Group, Hitachi Metals, Nyiv Hluav Taws Xob Tshuaj, Nyiv Maruwa thiab Nyiv Fine Ceramics.

Kev tshawb fawb hauv tsev ntawm silicon nitride ceramic substrate cov ntaub ntawv kuj tau ua qee yam kev vam meej. Lub thermal conductivity ntawm silicon nitride ceramic substrate npaj los ntawm daim kab xev-casting txheej txheem ntawm Beijing ceg ntawm Sinoma High-Tech Nitride Ceramics Co., Ltd. yog 100 W / (m·K); Beijing Sinoma Artificial Crystal Research Institute Co., Ltd. tau ua tiav cov khoom siv silicon nitride ceramic substrate nrog lub zog khoov ntawm 700-800MPa, tawg toughness ≥8MPa·m1/2, thiab thermal conductivity ≥80W / (m·K) los ntawm optimizing txoj kev sintering thiab txheej txheem.