Ua ntej, muab polycrystalline silicon thiab dopants rau hauv lub quartz crucible nyob rau hauv ib lub siv lead ua rauv, tsa qhov kub thiab txias mus rau ntau tshaj 1000 degrees, thiab tau txais polycrystalline silicon nyob rau hauv lub molten lub xeev.
Silicon ingot kev loj hlob yog txheej txheem ntawm kev ua polycrystalline silicon rau hauv ib qho siv lead ua silicon. Tom qab cov polycrystalline silicon yog rhuab mus rau hauv cov kua, lub thermal ib puag ncig yog precisely tswj kom loj hlob mus rau hauv high-zoo crystals.
Cov ntsiab lus hais txog:
Ib leeg siv lead ua loj hlob:Tom qab qhov kub ntawm cov tshuaj polycrystalline silicon yog qhov ruaj khov, cov noob siv lead ua tau maj mam txo qis rau hauv silicon yaj (cov noob siv lead ua kuj tseem yuav yaj hauv silicon yaj), thiab tom qab ntawd cov noob siv lead ua tau nce ntawm qee qhov ceev rau cov noob. txheej txheem. Tom qab ntawd, cov dislocations generated thaum lub sij hawm seeding txheej txheem yog tshem tawm los ntawm lub necking lag luam. Thaum lub caj dab yog shrunk mus rau ib tug txaus ntev, txoj kab uas hla ntawm ib tug siv lead ua silicon yog loj mus rau lub hom phiaj tus nqi los ntawm kev kho cov rub ceev thiab kub, thiab ces qhov sib npaug txoj kab uas hla yog khaws cia kom loj hlob mus rau lub hom phiaj ntev. Thaum kawg, txhawm rau tiv thaiv kom tsis txhob cuam tshuam los ntawm kev ncua rov qab, ib qho siv lead ua ingot tiav kom tau txais cov khoom siv lead ua tiav tiav, thiab tom qab ntawd nws raug tshem tawm tom qab qhov kub thiab txias.
Cov txheej txheem rau kev npaj ib leeg siv lead ua silicon:Txoj kev CZ thiab FZ txoj kev. Txoj kev CZ yog luv luv li CZ txoj kev. Tus yam ntxwv ntawm CZ txoj kev yog hais tias nws yog summed nyob rau hauv ib tug ncaj-lub tog raj kheej thermal system, siv graphite kuj cua sov kom yaj lub polycrystalline silicon nyob rau hauv ib tug high-purity quartz crucible, thiab ces ntxig cov noob siv lead ua rau hauv lub melt nto rau vuam, thaum. tig lub noob siv lead ua, thiab tom qab ntawd thim rov qab lub crucible. Cov noob siv lead ua maj mam nce mus, thiab tom qab cov txheej txheem ntawm cov noob, qhov loj, lub xub pwg tig, sib npaug ntawm txoj kab uas hla, thiab tailing, ib leeg siv lead ua silicon tau txais.
Txoj kev melting cheeb tsam yog ib txoj kev siv polycrystalline ingots kom yaj thiab crystallize semiconductor crystals nyob rau hauv ntau qhov chaw. Thermal zog yog siv los tsim ib qho chaw melting ntawm ib kawg ntawm lub semiconductor pas nrig, thiab tom qab ntawd ib zaug siv lead ua noob siv lead ua yog welded. Qhov ntsuas kub tau hloov kho kom ua rau thaj tsam melting maj mam txav mus rau lwm qhov kawg ntawm tus pas nrig, thiab dhau los ntawm tag nrho tus pas nrig, ib qho siv lead ua loj hlob tuaj, thiab siv lead ua orientation yog tib yam li cov noob siv lead ua. Txoj kev zone melting yog muab faib ua ob hom: kab rov tav zone melting txoj kev thiab ntsug suspension zone melting txoj kev. Cov qub no tsuas yog siv rau kev ua kom huv thiab ib qho siv lead ua loj hlob ntawm cov ntaub ntawv xws li germanium thiab GaAs. Qhov tom kawg yog siv lub tshuab hluav taws xob ntau zaus hauv qhov cua lossis lub tshuab nqus tsev kom tsim tau ib qho chaw molten ntawm kev sib cuag ntawm ib leeg siv lead ua siv lead ua thiab cov polycrystalline silicon pas nrig raug tshem tawm saum toj no, thiab tom qab ntawd txav thaj chaw molten nce mus rau qhov loj hlob ib zaug. siv lead ua.
Txog 85% ntawm silicon wafers yog tsim los ntawm Czochralski txoj kev, thiab 15% ntawm silicon wafers yog tsim los ntawm cheeb tsam melting txoj kev. Raws li daim ntawv thov, ib qho siv lead ua silicon loj hlob los ntawm Czochralski txoj kev yog siv los tsim cov khoom siv hluav taws xob sib xyaw, thaum tib lub siv lead ua silicon loj hlob los ntawm cheeb tsam melting txoj kev yog siv rau lub zog semiconductors. Cov txheej txheem Czochralski muaj cov txheej txheem paub tab thiab yooj yim rau kev loj hlob loj-inch ib leeg siv lead ua silicon; qhov chaw melting txoj kev melting tsis hu rau lub thawv, tsis yooj yim rau cov kab mob, muaj ntau dua purity, thiab yog tsim rau zus tau tej cov high-power hluav taws xob cov khoom, tab sis nws yog ib qho nyuaj rau loj hlob loj-inch ib leeg siv lead ua silicon, thiab feem ntau tsuas yog siv rau 8 nti lossis tsawg dua hauv txoj kab uas hla. Cov yeeb yaj kiab qhia txog Czochralski txoj kev.
Vim qhov nyuaj ntawm kev tswj cov kab uas hla ntawm ib leeg siv lead ua silicon pas nrig hauv cov txheej txheem ntawm rub cov siv lead ua ib leeg, thiaj li yuav tau txais cov khoom siv silicon ntawm cov qauv diameters, xws li 6 ntiv tes, 8 ntiv tes, 12 ntiv tes, thiab lwm yam. Tom qab rub cov ib leeg. siv lead ua, txoj kab uas hla ntawm silicon ingot yuav dov thiab hauv av. Qhov saum npoo ntawm silicon pas nrig tom qab dov yog du thiab qhov yuam kev loj me me.
Siv cov cuab yeej siv hluav taws xob siab tshaj plaws, ib leeg siv lead ua ingot raug txiav rau hauv silicon wafers ntawm cov tuab tuab los ntawm cov khoom siv slicing.
Vim lub thickness me me ntawm silicon wafer, ntug ntawm silicon wafer tom qab txiav yog ntse heev. Lub hom phiaj ntawm ntug kev sib tsoo yog tsim cov ntug du thiab nws tsis yooj yim rau kev tawg rau yav tom ntej chip manufacturing.
LAPPING yog ntxiv cov wafer ntawm cov phaj xaiv hnyav thiab qis siv lead ua phaj, thiab siv lub siab thiab tig nrog cov abrasive kom lub wafer tiaj tus.
Etching yog txheej txheem los tshem tawm qhov kev puas tsuaj ntawm lub wafer, thiab txheej txheej txheej puas los ntawm kev ua lub cev yog yaj los ntawm cov tshuaj tov.
Kev sib tsoo ob tog yog txheej txheem los ua kom lub wafer flatter thiab tshem tawm me me protrusions ntawm qhov chaw.
RTP yog txheej txheem ntawm cua sov lub wafer nyob rau hauv ob peb feeb, thiaj li hais tias lub sab hauv tsis xws luag ntawm lub wafer yog uniform, hlau impurities yog suppressed, thiab txawv txav ntawm lub semiconductor yog tiv thaiv.
Polishing yog txheej txheem uas ua kom lub ntsej muag smoothness los ntawm qhov chaw precision machining. Kev siv polishing slurry thiab polishing daim ntaub, ua ke nrog qhov tsim nyog kub, siab thiab kev sib hloov ceev, tuaj yeem tshem tawm cov txheej txheem kev puas tsuaj sab laug los ntawm cov txheej txheem dhau los thiab tau txais silicon wafers nrog zoo heev nto flatness.
Lub hom phiaj ntawm kev ntxuav yog tshem tawm cov organic teeb meem, hais, hlau, thiab lwm yam nyob rau saum npoo ntawm silicon wafer tom qab polishing, thiaj li ua kom huv si ntawm silicon wafer nto thiab ua tau raws li qhov yuav tsum tau ua ntawm cov txheej txheem tom ntej.
Lub flatness & resistivity tester pom cov silicon wafer tom qab polishing thiab tu kom ntseeg tau tias cov tuab, flatness, lub zos flatness, curvature, warpage, resistivity, thiab lwm yam.
PARTICLE COUNTING yog cov txheej txheem rau kev tshuaj xyuas qhov chaw ntawm lub wafer, thiab qhov tsis xws luag thiab qhov ntau yog txiav txim los ntawm laser tawg.
EPI GROWING yog txheej txheem rau kev loj hlob zoo silicon ib leeg siv lead ua zaj duab xis ntawm polished silicon wafers los ntawm vapor theem tshuaj deposition.
Cov ntsiab lus hais txog:Epitaxial kev loj hlob: yog hais txog kev loj hlob ntawm ib qho siv lead ua ib txheej nrog qee qhov kev xav tau thiab tib lub ntsej muag siv lead ua raws li cov substrate ntawm ib qho siv lead ua substrate (substrate), ib yam li cov siv lead ua qub uas nthuav tawm sab nraud rau ib ntu. Epitaxial kev loj hlob technology tau tsim nyob rau hauv lig 1950s thiab thaum ntxov 1960s. Nyob rau lub sijhawm ntawd, txhawm rau tsim cov khoom siv hluav taws xob ntau thiab lub zog siab, nws yog ib qho tsim nyog yuav tsum tau txo qhov kev sib sau ua ke, thiab cov khoom yuav tsum tau ua kom muaj hluav taws xob siab thiab siab tam sim no, yog li nws yuav tsum tau loj hlob nyias nyias. tiv thaiv epitaxial txheej ntawm ib tug tsawg-resistance substrate. Ib txheej tshiab siv lead ua loj hlob epitaxially tuaj yeem sib txawv ntawm cov substrate nyob rau hauv cov nqe lus ntawm conductivity yam, resistivity, thiab lwm yam., thiab ntau txheej ib tug crystals ntawm txawv thicknesses thiab yuav tsum tau kuj yuav loj hlob, yog li zoo heev txhim kho qhov yooj ntawm cov cuab yeej tsim thiab cov kev ua tau zoo ntawm cov cuab yeej.
Ntim yog lub ntim ntawm cov khoom tsim nyog kawg.
Post lub sij hawm: Nov-05-2024