Xov Xwm - Pem Hauv Ntej Kawg ntawm Kab (FEOL): Tso Lub Hauv Paus

Lub hauv ntej kawg ntawm cov kab ntau lawm zoo li tso lub hauv paus thiab tsim cov phab ntsa ntawm lub tsev. Hauv kev tsim khoom semiconductor, theem no suav nrog kev tsim cov qauv tsim thiab transistors ntawm silicon wafer.

Cov kauj ruam tseem ceeb ntawm FEOL:

1. Ntxuav:Pib nrog nyias silicon wafer thiab ntxuav nws kom tshem tawm cov impurities.
2. Oxidation:Loj hlob ib txheej ntawm silicon dioxide ntawm lub wafer kom cais qhov sib txawv ntawm cov nti.
3. Photolithography:Siv photolithography los kos cov qauv rau ntawm lub wafer, zoo li kos duab blueprints nrog lub teeb.
4. Etching:Tshem tawm qhov tsis xav tau silicon dioxide kom pom cov qauv xav tau.
5. Doping:Qhia impurities rau hauv silicon los hloov nws cov khoom hluav taws xob, tsim cov transistors, lub hauv paus tsev blocks ntawm tej nti.

Mid End of Line (MEOL): Txuas cov Dots

Qhov nruab nrab ntawm cov kab ntau lawm yog zoo li txhim kho cov xaim thiab cov kav dej hauv tsev. Cov theem no tsom rau kev tsim kev sib txuas ntawm cov transistors tsim nyob rau hauv FEOL theem.

Cov kauj ruam tseem ceeb ntawm MEOL:

1. Dielectric Deposition:Deposit insulating txheej (hu ua dielectrics) los tiv thaiv cov transistors.
2. Hu rau Tsim:Tsim kev sib cuag los txuas cov transistors rau ib leeg thiab lub ntiaj teb sab nraud.
3. Kev sib txuas:Ntxiv cov txheej hlau los tsim txoj hauv kev rau cov teeb liab hluav taws xob, zoo ib yam li thaiv lub tsev kom muaj zog seamless thiab cov ntaub ntawv ntws.

Rov qab kawg ntawm kab (BEOL): Ua tiav kov

Lub nraub qaum kawg ntawm cov kab ntau lawm zoo li ntxiv qhov kawg kov rau lub tsev - txhim kho cov khoom siv, pleev xim, thiab ua kom txhua yam ua haujlwm. Hauv kev tsim khoom semiconductor, theem no suav nrog ntxiv cov txheej txheem kawg thiab npaj cov nti rau ntim.

Cov kauj ruam tseem ceeb ntawm BEOL:

1. Cov txheej txheem hlau ntxiv:Ntxiv ntau txheej txheej hlau los txhim kho kev sib tshuam, ua kom cov nti tuaj yeem ua haujlwm nyuaj thiab nrawm nrawm.

2. Passivation:Siv cov txheej tiv thaiv los tiv thaiv cov nti los ntawm ib puag ncig kev puas tsuaj.

3. Kev sim:Kawm cov nti rau kev sim nruj kom ntseeg tau tias nws ua tau raws li txhua qhov tshwj xeeb.

4. Cov lus qhia:Txiav cov wafer rau hauv ib tus neeg daim ntawv, txhua qhov npaj rau ntim thiab siv hauv cov khoom siv hluav taws xob.