Kev lag luam semiconductor tab tom pom kev loj hlob tsis tau pom dua, tshwj xeeb tshaj yog nyob rau thaj tsam ntawmsilicon carbide (SiC)hluav taws xob hluav taws xob.Nrog ntau yam lojwaferfabs tab tom tsim kho lossis nthuav dav kom tau raws li qhov kev thov nce siab rau SiC cov khoom siv hauv tsheb hluav taws xob, qhov kev nthuav dav no nthuav tawm cov sijhawm zoo rau kev loj hlob.Txawm li cas los xij, nws tseem coj cov kev sib tw tshwj xeeb uas xav tau cov kev daws teeb meem tshiab.
Hauv plawv ntawm kev nce thoob ntiaj teb SiC nti ntau lawm yog kev tsim cov khoom zoo SiC muaju, wafers, thiab epitaxial txheej.Ntawm no,semiconductor-qib graphiteCov ntaub ntawv ua lub luag haujlwm tseem ceeb, pab txhawb SiC siv lead ua kev loj hlob thiab tso tawm ntawm SiC epitaxial txheej.Graphite lub thermal rwb thaiv tsev thiab inertness ua rau nws nyiam cov khoom, feem ntau siv nyob rau hauv crucibles, pedestals, planetary disks, thiab satellites nyob rau hauv crystal kev loj hlob thiab epitaxy systems.Txawm li cas los xij, cov txheej txheem hnyav ua rau muaj kev sib tw tseem ceeb, ua rau muaj kev puas tsuaj sai ntawm cov khoom siv graphite thiab tom qab ntawd cuam tshuam kev tsim cov khoom zoo ntawm SiC crystals thiab epitaxial txheej.
Kev tsim cov silicon carbide crystals entails cov txheej txheem hnyav heev, nrog rau qhov kub thiab txias tshaj 2000 ° C thiab cov roj corrosive heev.Qhov no feem ntau ua rau ua tiav corrosion ntawm graphite crucibles tom qab ob peb txheej txheem, yog li nce nqi ntau lawm.Tsis tas li ntawd, cov xwm txheej hnyav hloov cov khoom nto ntawm graphite Cheebtsam, cuam tshuam qhov rov ua dua thiab ruaj khov ntawm cov txheej txheem ntau lawm.
Txhawm rau tiv thaiv cov kev cov nyom no kom zoo, cov txheej txheem tiv thaiv txheej txheem tau tshwm sim los ua qhov hloov pauv kev ua si.Kev tiv thaiv txheej raws liTantalum carbide (TaC)tau raug qhia los daws cov teeb meem ntawm graphite tivthaiv degradation thiab graphite mov tsis txaus.Cov ntaub ntawv TaC nthuav tawm qhov kub ntawm qhov kub siab tshaj 3800 ° C thiab tshwj xeeb tshuaj tiv thaiv.Leveraging chemical vapor deposition (CVD) tshuab,TAC coatingsnrog lub thickness txog li 35 millimeters yuav seamlessly tso rau ntawm graphite Cheebtsam.Cov txheej tiv thaiv no tsis tsuas yog txhim kho cov khoom ruaj khov tab sis kuj tseem txuas ntxiv lub neej ntawm cov khoom siv graphite, yog li txo cov nqi tsim khoom thiab txhim kho kev ua haujlwm.
Semicera, uas yog tus muab kev pabcuamTAC coatings, tau ua qhov tseem ceeb hauv kev hloov pauv ntawm kev lag luam semiconductor.Nrog nws cov thev naus laus zis thev naus laus zis thiab kev cog lus tsis txaus ntseeg rau qhov zoo, Semicera tau ua rau cov tuam txhab semiconductor kov yeej cov teeb meem tseem ceeb thiab ua tiav qhov siab tshiab ntawm kev vam meej.Los ntawm muab TaC txheej nrog kev ua tau zoo thiab kev ntseeg siab tsis sib xws, Semicera tau txhim kho nws txoj haujlwm ua tus khub ntseeg siab rau cov tuam txhab semiconductor thoob ntiaj teb.
Nyob rau hauv xaus, tiv thaiv txheej technology, powered los ntawm innovation zoo liTAC coatingslos ntawm Semicera, tab tom hloov kho cov toj roob hauv pes semiconductor thiab paving txoj hauv kev kom muaj txiaj ntsig zoo thiab muaj txiaj ntsig yav tom ntej.
Post lub sij hawm: May-16-2024