Raws li ib qho ntawm cov khoom tseem ceeb ntawmCov khoom siv MOCVD, graphite puag yog cov cab kuj thiab cua sov lub cev ntawm lub substrate, uas ncaj qha txiav txim siab lub uniformity thiab purity ntawm cov ntaub ntawv zaj duab xis, yog li nws zoo ncaj qha cuam tshuam rau kev npaj ntawm daim ntawv epitaxial, thiab nyob rau tib lub sij hawm, nrog rau kev nce ntawm tus naj npawb ntawm cov ntaub ntawv. kev siv thiab kev hloov pauv ntawm kev ua haujlwm, nws yooj yim heev rau hnav, koom nrog cov khoom siv.
Txawm hais tias graphite muaj cov thermal conductivity zoo thiab ruaj khov, nws muaj qhov zoo kom zoo dua li lub hauv paus tivthaivCov khoom siv MOCVD, tab sis nyob rau hauv cov txheej txheem ntau lawm, graphite yuav corrode cov hmoov vim cov residue ntawm corrosive gases thiab metallic organics, thiab cov kev pab cuam lub neej ntawm graphite puag yuav txo tau zoo heev. Nyob rau tib lub sijhawm, cov hmoov poob graphite yuav ua rau muaj kuab paug rau cov nti.
Qhov tshwm sim ntawm txheej txheej txheej txheem tuaj yeem muab cov hmoov av fixation, txhim khu thermal conductivity, thiab sib npaug ntawm cov cua sov, uas tau dhau los ua cov thev naus laus zis tseem ceeb los daws qhov teeb meem no. Graphite puag hauvCov khoom siv MOCVDsiv ib puag ncig, graphite puag saum npoo txheej yuav tsum ua tau raws li cov yam ntxwv hauv qab no:
(1) Lub hauv paus graphite tuaj yeem qhwv tag nrho, thiab qhov ceev yog qhov zoo, txwv tsis pub lub graphite puag yog yooj yim rau corroded hauv cov roj corrosive.
(2) Lub zog sib xyaw ua ke nrog lub hauv paus graphite siab kom ntseeg tau tias cov txheej txheem tsis yooj yim poob tawm tom qab ob peb qhov kub thiab txias tsis tshua muaj.
(3) Nws muaj cov tshuaj lom neeg ruaj khov zoo kom tsis txhob muaj txheej txheej tsis ua haujlwm hauv qhov kub thiab txias.
SiC muaj qhov zoo ntawm kev tiv thaiv corrosion, siab thermal conductivity, thermal shock resistance thiab siab tshuaj stability, thiab tuaj yeem ua haujlwm zoo hauv GaN epitaxial cua. Tsis tas li ntawd, cov thermal expansion coefficient ntawm SiC txawv me ntsis ntawm cov graphite, yog li SiC yog cov khoom nyiam rau cov txheej txheej ntawm graphite puag.
Tam sim no, SiC feem ntau yog 3C, 4H thiab 6H hom, thiab SiC siv ntau hom siv lead ua sib txawv. Piv txwv li, 4H-SiC tuaj yeem tsim cov khoom siv hluav taws xob siab; 6H-SiC yog qhov ruaj khov tshaj plaws thiab tuaj yeem tsim cov khoom siv hluav taws xob photoelectric; Vim tias nws cov qauv zoo sib xws rau GaN, 3C-SiC tuaj yeem siv los tsim GaN epitaxial txheej thiab tsim cov khoom siv SiC-GaN RF. 3C-SiC kuj tseem hu uaβ-SiC, thiab kev siv tseem ceeb ntawmβ-SiC yog raws li cov khoom siv zaj duab xis thiab txheej, yog liβ-SiC yog tam sim no cov khoom tseem ceeb rau txheej.
Post lub sij hawm: Nov-06-2023