Silicon carbide Keeb kwm thiab Silicon Carbide Txheej Daim Ntawv Thov

Kev txhim kho thiab kev siv ntawm Silicon Carbide (SiC)

1. Ib puas xyoo ntawm Innovation hauv SiC
Txoj kev taug kev ntawm silicon carbide (SiC) pib xyoo 1893, thaum Edward Goodrich Acheson tsim lub tshuab hluav taws xob Acheson, siv cov khoom siv carbon los ua kom tiav cov khoom lag luam ntawm SiC los ntawm hluav taws xob cua sov ntawm quartz thiab carbon. Qhov kev tsim kho no tau cim qhov pib ntawm SiC kev lag luam thiab tau txais Acheson patent.

Nyob rau hauv lub xyoo pua 20th, SiC feem ntau yog siv los ua cov abrasive vim nws qhov tawv tawv thiab hnav tsis kam. Los ntawm nruab nrab xyoo pua 20th, kev nce qib hauv tshuaj vapor deposition (CVD) thev naus laus zis tau qhib qhov muaj peev xwm tshiab. Cov kws tshawb fawb ntawm Tswb Labs, coj los ntawm Rustum Roy, tau tso lub hauv paus rau CVD SiC, ua tiav thawj SiC txheej ntawm graphite nto.

Xyoo 1970s pom muaj kev cuam tshuam loj heev thaum Union Carbide Corporation siv SiC-coated graphite hauv epitaxial kev loj hlob ntawm gallium nitride (GaN) semiconductor cov ntaub ntawv. Qhov kev nce qib no tau ua lub luag haujlwm tseem ceeb hauv kev ua haujlwm siab GaN-raws li LEDs thiab lasers. Tau ntau xyoo lawm, SiC coatings tau nthuav dav dhau ntawm cov khoom siv hluav taws xob rau cov ntawv thov hauv aerospace, tsheb, thiab hluav taws xob hluav taws xob, ua tsaug rau kev txhim kho hauv kev tsim khoom.

Niaj hnub no, kev tsim kho tshiab xws li thermal spraying, PVD, thiab nanotechnology tau ntxiv dag zog rau kev ua tau zoo thiab kev siv SiC coatings, qhia txog nws lub peev xwm hauv kev txiav.

2. Nkag siab SiC's Crystal Structures thiab siv
SiC boasts ntau tshaj 200 polytypes, categorized los ntawm lawv cov atomic kev npaj rau hauv cubic (3C), hexagonal (H), thiab rhombohedral (R). Ntawm cov no, 4H-SiC thiab 6H-SiC yog dav siv nyob rau hauv high-power thiab optoelectronic li, raws li, thaum β-SiC muaj nuj nqis rau nws superior thermal conductivity, hnav tsis kam, thiab corrosion kuj.

β-SiCcov khoom tshwj xeeb, xws li thermal conductivity ntawm120-200 W/m·Kthiab thermal expansion coefficient zoo sib xws graphite, ua rau nws nyiam cov khoom siv rau txheej txheej hauv wafer epitaxy khoom.

3. SiC Coatings: Cov cuab yeej thiab cov txheej txheem kev npaj
SiC coatings, feem ntau β-SiC, yog dav siv los txhim kho cov khoom nto zoo li hardness, hnav tsis kam, thiab thermal stability. Cov txheej txheem ntawm kev npaj muaj xws li:

• Chemical Vapor Deposition (CVD):Muab cov coatings zoo nrog zoo adhesion thiab uniformity, zoo tagnrho rau loj thiab complex substrates.
• Lub cev Vapor Deposition (PVD):Muaj kev tswj xyuas meej ntawm txheej txheej, haum rau cov ntawv thov siab.
• Kev Txhaj Tshuaj, Electrochemical Deposition, thiab Slurry Txheej: Ua hauj lwm raws li tus nqi-zoo lwm txoj kev rau cov kev siv tshwj xeeb, txawm hais tias muaj kev txwv sib txawv hauv adhesion thiab uniformity.

Txhua txoj kev yog xaiv raws li cov yam ntxwv ntawm substrate thiab cov kev xav tau ntawm daim ntawv thov.

4. SiC-Coated Graphite Susceptors hauv MOCVD
SiC-coated graphite susceptors yog qhov tseem ceeb hauv Hlau Organic Chemical Vapor Deposition (MOCVD), cov txheej txheem tseem ceeb hauv semiconductor thiab optoelectronic khoom tsim.

Cov susceptors no muab kev txhawb zog rau kev loj hlob ntawm epitaxial zaj duab xis, ua kom cov thermal stability thiab txo cov impurity paug. SiC txheej kuj txhim kho oxidation tsis kam, cov khoom nto, thiab kev sib txuas zoo, ua kom muaj kev tswj xyuas meej thaum lub sijhawm ua yeeb yaj kiab.

5. Kev nce qib mus rau yav tom ntej
Nyob rau hauv xyoo tas los no, kev siv zog tseem ceeb tau qhia txog kev txhim kho cov txheej txheem tsim khoom ntawm SiC-coated graphite substrates. Cov kws tshawb fawb tau tsom mus rau kev txhim kho txheej purity, uniformity, thiab lifespan thaum txo nqi. Tsis tas li ntawd, kev tshawb nrhiav cov ntaub ntawv tshiab xws litantalum carbide (TaC) txheejmuaj peev xwm txhim kho nyob rau hauv thermal conductivity thiab corrosion kuj, paving txoj kev rau lwm tiam kev daws teeb meem.

Raws li qhov kev thov rau SiC-coated graphite susceptors tseem loj hlob tuaj, kev nce qib hauv kev tsim khoom ntse thiab kev tsim khoom lag luam yuav txhawb nqa kev tsim cov khoom lag luam zoo kom tau raws li cov kev xav tau ntawm cov khoom lag luam semiconductor thiab optoelectronics.