Silicon carbide wafer txheej txheem

Silicon carbide waferyog ua los ntawm purity silicon hmoov thiab siab purity carbon hmoov raws li raw cov ntaub ntawv, thiab silicon carbide siv lead ua yog zus los ntawm lub cev vapor hloov txoj kev (PVT), thiab ua tiav rau hauvsilicon carbide wafer.

① Raw khoom synthesis. High purity silicon hmoov thiab siab purity carbon hmoov tau tov raws li ib qho piv txwv, thiab silicon carbide hais tau synthesized ntawm kub siab tshaj 2,000 ℃. Tom qab crushing, tu thiab lwm yam txheej txheem, lub siab purity silicon carbide hmoov raw cov ntaub ntawv uas ua tau raws li qhov yuav tsum tau ntawm siv lead ua kev loj hlob yog npaj.

② Crystal loj hlob. Siv cov purity SIC hmoov ua raw khoom, cov siv lead ua tau loj hlob los ntawm lub cev vapor hloov (PVT) txoj kev siv tus kheej tsim siv lead ua kev loj hlob rauv.

③ ingot ua. Cov tau txais silicon carbide siv lead ua ingot tau taw qhia los ntawm X-ray ib leeg siv lead ua orientator, tom qab ntawd hauv av thiab dov, thiab ua tiav rau hauv cov qauv kab uas hla silicon carbide siv lead ua.

④ Crystal txiav. Siv cov cuab yeej siv ntau kab, silicon carbide crystals raug txiav rau hauv cov ntawv nyias nyias nrog lub thickness tsis pub tshaj 1 hli.

⑤ Chip sib tsoo. Lub wafer yog hauv av rau qhov xav tau flatness thiab roughness los ntawm pob zeb diamond sib tsoo kua ntawm ntau qhov sib txawv.

⑥ Chip polishing. Cov polished silicon carbide tsis muaj kev puas tsuaj saum npoo tau txais los ntawm kev siv tshuab polishing thiab tshuaj kho tshuab polishing.

⑦ Chip nrhiav pom. Siv optical microscope, X-ray diffractometer, atomic force microscope, non-contact resistivity tester, deg flatness tester, defect defect comprehensive tester thiab lwm yam cuab yeej thiab cov cuab yeej siv los txheeb xyuas cov microtubule ntom ntom, siv lead ua zoo, nto roughness, resistivity, warpage, curvature, thickness hloov, nto khawb thiab lwm yam tsis muaj silicon carbide wafer. Raws li qhov no, qib zoo ntawm cov nti yog txiav txim siab.

⑧ Chip tu. Daim ntawv silicon carbide polishing yog ntxuav nrog tu tus neeg saib xyuas thiab cov dej ntshiab kom tshem tawm cov seem polishing kua thiab lwm yam av av ntawm daim ntawv polishing, thiab tom qab ntawd lub wafer tau tshuab thiab shaken qhuav los ntawm ultra-high purity nitrogen thiab tshuab ziab khaub ncaws; Lub wafer yog encapsulated nyob rau hauv ib daim ntawv huv si nyob rau hauv ib tug super-huv chamber los tsim ib tug downstream npaj-rau-siv silicon carbide wafer.

Qhov loj ntawm cov nti loj, qhov nyuaj dua qhov sib txuam siv lead ua kev loj hlob thiab kev siv thev naus laus zis, thiab ntau dua qhov kev tsim khoom ntawm cov khoom siv downstream, qhov nqi qis dua.