Xov xwm - Wafer deg paug thiab nws txoj kev tshawb nrhiav

Kev huv huv ntawm lubwafer ntoyuav cuam tshuam rau kev tsim nyog tus nqi ntawm cov txheej txheem semiconductor tom ntej thiab cov khoom lag luam. Txog li 50% ntawm tag nrho cov yield poob yog tshwm sim los ntawmwafer ntokev kis kab mob.

Cov khoom uas tuaj yeem ua rau tsis muaj kev hloov pauv hauv kev ua haujlwm hluav taws xob ntawm lub cuab yeej lossis cov txheej txheem tsim khoom siv tau raug hu ua cov khoom tsis huv. Cov kab mob kis tau los ntawm wafer nws tus kheej, chav huv, cov cuab yeej txheej txheem, cov txheej txheem chemical lossis dej.WaferKev kis kab mob feem ntau tuaj yeem kuaj pom los ntawm kev soj ntsuam pom, kev tshuaj xyuas cov txheej txheem, lossis kev siv cov cuab yeej tshuaj ntsuam xyuas nyuaj hauv qhov kev sim ntsuas zaum kawg.

▲ Cov kab mob nyob rau saum npoo ntawm silicon wafers | Duab qhov chaw network

Cov txiaj ntsig ntawm kev txheeb xyuas kev sib kis tuaj yeem siv los cuam tshuam txog qib thiab hom kev sib kis tau ntsib los ntawm covwafernyob rau hauv ib qho txheej txheem txheej txheem, ib lub tshuab tshwj xeeb lossis cov txheej txheem tag nrho. Raws li kev faib tawm ntawm txoj kev tshawb nrhiav,wafer ntoKev sib kis tuaj yeem muab faib ua hom hauv qab no.

Hlau paug

Kev kis kab mob tshwm sim los ntawm cov hlau tuaj yeem ua rau cov khoom siv semiconductor defects ntawm qhov sib txawv.
Alkali hlau los yog alkaline ntiaj teb hlau (Li, Na, K, Ca, Mg, Ba, thiab lwm yam) tuaj yeem ua rau cov xau tam sim no hauv cov qauv pn, uas ua rau lub zog tawg ntawm cov oxide; Kev hloov pauv hlau thiab cov hlau hnyav (Fe, Cr, Ni, Cu, Au, Mn, Pb, thiab lwm yam) muaj kuab paug tuaj yeem txo cov neeg nqa khoom lub neej voj voog, txo cov kev pabcuam lub neej ntawm cov khoom siv lossis nce qhov tsaus ntuj tam sim no thaum cov khoom siv ua haujlwm.

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▲ Wafer nto kab mob | ResearchGate

Cov hlau tsis huv tuaj yeem yog los ntawm cov tshuaj reagents siv los ntxuav, etching, lithography, deposition, thiab lwm yam, los yog los ntawm cov cav tov siv nyob rau hauv cov txheej txheem, xws li ncu, reactors, ion implantation, thiab lwm yam, los yog tej zaum yuav tshwm sim los ntawm careless wafer tuav.

Particle paug

Cov khoom siv tiag tiag feem ntau pom los ntawm kev kuaj pom lub teeb tawg los ntawm qhov tsis xws luag. Yog li ntawd, lub npe scientific ntau dua rau cov kab mob sib kis yog qhov teeb meem tsis zoo. Cov kab mob sib kis tuaj yeem ua rau muaj kev cuam tshuam los yog npog ntsej muag hauv cov txheej txheem etching thiab lithography.

Thaum cov yeeb yaj kiab loj hlob lossis tso tawm, cov pinholes thiab microvoids raug tsim, thiab yog tias cov khoom loj thiab cov khoom siv hluav taws xob, lawv tuaj yeem ua rau luv luv.

▲ Tsim kom muaj cov kab mob sib kis | Duab qhov chaw network

Cov kab mob me me tuaj yeem ua rau cov duab ntxoov ntxoo ntawm qhov chaw, xws li thaum photolithography. Yog tias cov khoom loj nyob nruab nrab ntawm lub photomask thiab txheej txheej photoresist, lawv tuaj yeem txo qhov kev daws teeb meem ntawm kev sib cuag.

Tsis tas li ntawd, lawv tuaj yeem thaiv cov ions nrawm thaum lub sij hawm ion implantation lossis qhuav etching. Cov khoom siv kuj tseem yuav raug kaw los ntawm cov yeeb yaj kiab, kom muaj pob thiab pob. Cov khaubncaws sab nraud povtseg hauv qab no tuaj yeem tawg lossis tiv thaiv kev sib sau ntawm cov chaw no, ua rau muaj teeb meem thaum raug.

Organic paug

Cov kab mob uas muaj cov pa roj carbon monoxide, nrog rau cov qauv sib txuas nrog C, yog hu ua organic contamination. Organic contaminants tuaj yeem ua rau cov khoom tsis txaus siab hydrophobic ntawm lubwafer nto, ua kom lub ntsej muag roughness, ua rau lub ntsej muag hazy, cuam tshuam cov txheej txheem epitaxial kev loj hlob, thiab cuam tshuam rau kev ntxuav ntawm cov hlau tsis huv yog tias cov khoom tsis huv tsis raug tshem tawm ua ntej.

Cov kab mob no feem ntau kuaj pom los ntawm cov cuab yeej xws li thermal desorption MS, X-ray photoelectron spectroscopy, thiab Auger electron spectroscopy.

▲ Duab qhov chaw network

Gaseous contamination thiab dej paug

Atmospheric molecules thiab dej paug nrog qhov loj me me feem ntau tsis raug tshem tawm los ntawm cov huab cua zoo ib yam (HEPA) lossis ultra-low penetration air filters (ULPA). Cov kab mob no feem ntau yog saib xyuas los ntawm ion mass spectrometry thiab capillary electrophoresis.

Qee cov khoom paug tuaj yeem ua rau ntau pawg, piv txwv li, cov khoom tuaj yeem tsim los ntawm cov khoom siv organic lossis hlau, los yog ob qho tib si, yog li hom kab mob no kuj raug cais ua lwm hom.

▲ Gaseous molecular contaminants | IONICON

Tsis tas li ntawd, wafer paug tuaj yeem raug cais raws li cov kab mob molecular, cov kab mob sib kis, thiab cov txheej txheem los ntawm cov khib nyiab pov tseg raws li qhov loj ntawm qhov chaw paug. Qhov me me ntawm cov kab mob sib kis, qhov nyuaj dua nws yog tshem tawm. Hauv kev tsim hluav taws xob niaj hnub no, wafer tu cov txheej txheem suav nrog 30% - 40% ntawm tag nrho cov txheej txheem tsim khoom.