Epi Carrier yog dab tsi?

Tshawb nrhiav nws lub luag haujlwm tseem ceeb hauv Epitaxial Wafer Processing

Nkag siab qhov tseem ceeb ntawm Epi Carriers hauv Advanced Semiconductor Manufacturing

Hauv kev lag luam semiconductor, kev tsim cov khoom zoo siab epitaxial (epi)wafersyog ib kauj ruam tseem ceeb hauv kev tsim khoom xws li transistors, diodes, thiab lwm yam khoom siv hluav taws xob. Central rau txoj kev no yog lubtus kab mob epi, ib qho cuab yeej tshwj xeeb tsim los tuav wafers ruaj ntseg thaum lub sij hawm epitaxial deposition. Tab sis dab tsi raws nraim yog tus cab cab, thiab vim li cas nws thiaj li tseem ceeb heev rau kev tsim khoom semiconductor?

Kev Loj Hlob Epitaxial: Ib Txheej Txheem Tseem Ceeb hauv Semiconductor Fabrication

Epitaxial kev loj hlob, los yog epitaxy, hais txog cov txheej txheem ntawm tso ib txheej nyias ntawm cov khoom siv crystalline mus rau ib qho semiconductor wafer. Cov txheej no, hu ua epitaxial txheej, muaj tib lub ntsej muag siv lead ua raws li lub hauv paus substrate thiab yog siv los txhim kho cov khoom hluav taws xob ntawm lub wafer. Epitaxy yog qhov tseem ceeb hauv kev tsim cov cuab yeej ua haujlwm siab uas yuav tsum muaj kev tswj xyuas meej ntawm cov khoom siv thiab cov qauv.

Txhawm rau ua tiav qhov xav tau zoo thiab sib xws hauv cov txheej txheem epitaxial, wafers yuav tsum tau tuav hauv qhov chaw nrog precision thiab ruaj khov thaum lub sij hawm tso nyiaj. Qhov no yog qhov twgtus kab mob epilos ua si.

Lub luag hauj lwm ntawm ibEpi Carrier Cov

An tus kab mob epiyog ib qho tshwj xeeb tsim fixture uas tuav wafers thaum lub sij hawm epitaxial deposition txheej txheem. Nws feem ntau yog tsim los ntawm cov khoom siv purity siab uas tuaj yeem tiv taus qhov kub thiab txias ib puag ncig cuam tshuam nrog epitaxy. Tus tsim ntawm cov cab kuj xyuas kom meej tias cov wafers ruaj ntseg thiab sib npaug ntawm cov ntaub ntawv deposition, uas ua rau ib tug uniform epitaxial txheej thoob plaws tag nrho wafer nto.

Ib qho ntawm lub luag haujlwm tseem ceeb ntawm tus neeg nqa khoom epi yog los tswj covwafer covstability thiab kev sib raug zoo thoob plaws hauv cov txheej txheem deposition. Ib qho kev txav los yog qhov tsis zoo tuaj yeem ua rau muaj qhov tsis xws luag hauv cov txheej txheem epitaxial, uas tuaj yeem cuam tshuam qhov kev ua tau zoo ntawm cov khoom siv semiconductor kawg. Cov cab kuj tseem yuav tsum tiv thaiv kom tsis txhob muaj kab mob thiab xyuas kom meej tias cov wafers nyob twj ywm tsis muaj cov khoom los yog impurities thaum ua.

Vim li casEpi CovYog qhov tseem ceeb hauv Semiconductor Manufacturing

Qhov zoo ntawm txheej epitaxial ncaj qha cuam tshuam rau kev ua haujlwm ntawm cov khoom siv semiconductor. Yog li ntawd, lub luag haujlwm ntawm tus neeg nqa khoom epi yog qhov tseem ceeb hauv kev ua tiav cov qauv siab uas xav tau hauv kev lag luam. Los ntawm kev muab qhov chaw ruaj khov thiab tswj tau rau kev ua haujlwm wafer, tus neeg nqa khoom epi xyuas kom meej tias cov txheej txheem epitaxial tau muab tso rau hauv qhov sib npaug thiab tsis muaj qhov tsis xws luag.

Epi cov cab kuj tseem yog qhov tseem ceeb hauv kev txhawb nqa qhov kev loj hlob ntawm kev tsim khoom semiconductor. Raws li cov cuab yeej geometries txuas ntxiv zuj zus thiab qhov kev thov rau kev ua tau zoo dua zuj zus, qhov xav tau rau cov txheej txheem epitaxial meej thiab txhim khu kev qha ua qhov tseem ceeb dua. Cov neeg nqa khoom zoo tshaj plaws pab cov tuam txhab ua kom tau raws li cov kev xav tau no los ntawm kev ua kom muaj txiaj ntsig zoo ib yam thiab rov tsim dua tshiab, txawm tias cov khoom lag luam nce ntxiv.

Xaus

Hauv cov ntsiab lus, tus neeg nqa khoom epi yog ib qho cuab yeej tseem ceeb hauv cov txheej txheem tsim khoom semiconductor, tshwj xeeb tshaj yog nyob rau hauv kev tsim cov epitaxial wafers. Nws lub luag haujlwm hauv kev ua kom ruaj khov wafer, kev sib dhos, thiab kev tswj kev sib kis yog qhov tseem ceeb rau kev ua tiav cov txheej txheem zoo epitaxial xav tau rau cov khoom siv semiconductor siab heev. Raws li kev lag luam txuas ntxiv thawb cov ciam teb ntawm thev naus laus zis, qhov tseem ceeb ntawm kev txhim khu kev qha thiab kev ua haujlwm tau zoo yuav tsuas yog nce ntxiv, ua rau lawv yog ib qho tseem ceeb hauv kev nrhiav kev ua tau zoo hauv semiconductor fabrication.

Rau cov neeg nyob hauv kev lag luam semiconductor tab tom nrhiav kev txhim kho lawv cov txheej txheem epitaxial, kev nkag siab thiab kev nqis peev hauv cov neeg nqa khoom zoo tshaj plaws yog ib kauj ruam tseem ceeb rau kev ua tiav cov txiaj ntsig zoo dua thiab tswj kev sib tw hauv kev lag luam.