Kev lag luam semiconductor tso siab rau cov cuab yeej tshwj xeeb los tsim cov khoom siv hluav taws xob zoo. Ib qho tseem ceeb ntawm cov txheej txheem kev loj hlob ntawm epitaxial yog tus kab mob epitaxial. Cov khoom siv no ua lub luag haujlwm tseem ceeb hauv kev tso cov txheej txheem epitaxial ntawm cov khoom siv hluav taws xob semiconductor, kom ntseeg tau tias qhov sib xws thiab qhov zoo ntawm cov khoom kawg.
Ib tus neeg nqa khoom epitaxy, tseem hu ua epitaxy pan carrier, yog ib lub tais tshwj xeeb uas siv rau hauv cov txheej txheem kev loj hlob ntawm epitaxy. Nws tuav thiab txhawb nqa semiconductor wafers thaum lub sij hawm deposition ntawm epitaxial txheej. Cov neeg nqa khoom no tau tsim kho kom tiv taus qhov kub thiab txias ib puag ncig zoo ib yam ntawm cov txheej txheem epitaxial, muab lub platform ruaj khov rau kev loj hlob ntawm ib leeg-crystal txheej.
Khoom siv thiab kev tsim kho:
Epi pan cov khoom siv feem ntau yog tsim los ntawm cov ntaub ntawv uas tuaj yeem tiv taus qhov kub thiab txias thiab tiv taus tshuaj lom neeg. Cov ntaub ntawv uas muaj xws li:
•Silicon Carbide (SiC): Paub txog nws cov thermal conductivity thiab tsis kam hnav thiab oxidation, SiC yog qhov kev xaiv nrov rau cov neeg nqa khoom epi pan.
• Graphite: Feem ntau siv vim nws cov khoom siv thermal zoo heev thiab muaj peev xwm ua kom muaj kev ncaj ncees ntawm qhov kub thiab txias. Graphite carriers feem ntau coated nrog SiC los txhim kho lawv cov kav ntev thiab tsis kam tiv thaiv corrosion.
Lub luag haujlwm hauv Txoj Kev Loj Hlob Epitaxial:
Cov txheej txheem kev loj hlob ntawm epitaxial cuam tshuam nrog kev tso tawm ntawm ib txheej nyias ntawm cov khoom siv crystalline rau ntawm lub substrate lossis wafer. Cov txheej txheem no yog qhov tseem ceeb hauv kev tsim cov khoom siv semiconductor nrog cov khoom siv hluav taws xob zoo. Lub epi pan cab kuj txhawb lub wafer nyob rau hauv cov tshuaj tiv thaiv chamber thiab xyuas kom meej tias nws nyob ruaj khov thaum lub sij hawm deposition txheej txheem.
Lub luag haujlwm tseem ceeb ntawm epi pan cab kuj muaj xws li:
• Uniform Thaum tshav kub kub Distribution: Tus cab kuj xyuas kom meej txawm tias tshav kub faib thoob plaws lub wafer, uas yog ib qho tseem ceeb rau kev ua tau raws li epitaxial txheej thickness thiab zoo.
• Chemical Isolation: Los ntawm muab qhov chaw ruaj khov thiab tsis muaj zog, tus neeg nqa khoom tiv thaiv cov tshuaj tsis haum tshuaj uas tuaj yeem ua rau cov txheej txheem epitaxial tsis zoo.
Cov txiaj ntsig ntawm High-QualityEpi Pan Carriers:
• Txhim Kho Ntaus Kev Ua Haujlwm: Cov khaubncaws sab nraud povtseg epitaxial pab txhawb kev ua haujlwm zoo ntawm cov khoom siv semiconductor, ua rau muaj kev ua haujlwm zoo dua qub thiab kev ntseeg siab.
• Ua kom muaj txiaj ntsig ntau ntxiv: Los ntawm kev txo qhov tsis xws luag thiab ua kom cov txheej txheem zoo ib yam, cov khoom siv zoo txhim kho cov txiaj ntsig ntawm cov khoom siv semiconductor wafers.
• Txo Cov Nqi Kho Mob: Cov khoom siv ruaj khov thiab cov khoom siv hluav taws xob zoo txo qis kev xav tau kev hloov kho thiab tu, txo cov nqi tsim khoom tag nrho.
Lub tshuab nqa epitaxial yog ib qho tseem ceeb hauv cov txheej txheem kev loj hlob ntawm epitaxial, ncaj qha cuam tshuam qhov zoo thiab sib xws ntawm cov khoom siv semiconductor. Los ntawm kev xaiv cov ntaub ntawv tsim nyog thiab tsim qauv, cov tuam txhab tuaj yeem txhim kho cov txheej txheem epitaxial, ua rau kev txhim kho cov cuab yeej ua haujlwm thiab txo cov nqi tsim khoom. Raws li qhov kev thov rau cov khoom siv hluav taws xob siab heev loj tuaj, qhov tseem ceeb ntawm kev ua haujlwm siabepi pan cab kujhauv kev lag luam semiconductor tseem nce ntxiv.
Post lub sij hawm: Aug-13-2024