MOCVD Susceptor yog dab tsi?

Hlau-Organic Chemical Vapor Deposition (MOCVD) yog cov txheej txheem tseem ceeb hauv kev lag luam semiconductor, qhov zoo tshaj plaws nyias zaj duab xis tso rau hauv substrates. Ib qho tseem ceeb ntawm cov txheej txheem MOCVD yog tus neeg sawv cev, lub ntsiab lus tseem ceeb uas ua lub luag haujlwm tseem ceeb hauv kev ua kom muaj kev sib luag thiab zoo ntawm cov yeeb yaj kiab tsim.

Tus Susceptor yog dab tsi? Lub susceptor yog ib qho tshwj xeeb uas siv rau hauv cov txheej txheem MOCVD los txhawb thiab ua kom sov lub substrate mus rau cov yeeb yaj kiab nyias. Nws ua haujlwm ntau yam, suav nrog kev nqus hluav taws xob hluav taws xob, hloov nws mus rau cua sov, thiab faib cov cua sov no thoob plaws lub substrate. Cov cua sov no yog qhov tseem ceeb rau kev loj hlob ntawm homogeneous films nrog cov tuab tuab thiab muaj pes tsawg leeg.

Hom Susceptors:
1. Graphite Susceptors: Feem ntau coated nrog ib txheej tiv thaiv, xws lisilicon carbide (SiC), graphite susceptors paub txog lawv cov thermal conductivity thiab stability. CovSiC txheejmuab ib qho nyuaj, tiv thaiv nto uas tiv thaiv corrosion thiab degradation ntawm qhov kub thiab txias.

2. Silicon Carbide (SiC) Susceptors: Cov no yog tsim los ntawm SiC, muab cov thermal stability zoo thiab tsis kam hnav thiab tsim kua muag.SiC susceptorsyog tshwj xeeb tshaj yog haum rau cov txheej txheem kub thiab corrosive ib puag ncig.
Yuav ua li casCov neeg raug tximUa haujlwm hauv MOCVD:

Nyob rau hauv cov txheej txheem MOCVD, precursors tau nkag mus rau hauv lub reactor chamber, qhov uas lawv decompose thiab react los ua ib tug nyias zaj duab xis ntawm lub substrate. Lub susceptor plays lub luag haujlwm tseem ceeb los ntawm kev ua kom lub substrate yog rhuab uniformly, uas yog ib qho tseem ceeb rau kev ua tiav cov yeeb yaj kiab zoo ib yam thoob plaws tag nrho cov substrate nto. Lub susceptor cov khoom siv thiab tsim tau ua tib zoo xaiv kom haum rau cov kev cai tshwj xeeb ntawm cov txheej txheem tso nyiaj, xws li qhov kub thiab txias thiab tshuaj lom neeg sib raug zoo.
Cov txiaj ntsig ntawm kev sivHigh-Quality Susceptors:
• Txhim kho zaj duab xis zoo: Los ntawm kev muab cov hluav taws kub sib txawv, cov susceptors pab ua kom tiav cov yeeb yaj kiab nrog cov tuab tuab thiab muaj pes tsawg leeg, uas yog qhov tseem ceeb rau kev ua haujlwm ntawm cov khoom siv semiconductor.
• Txhim kho cov txheej txheem Efficiency: High-quality susceptors txhim kho tag nrho cov kev ua tau zoo ntawm cov txheej txheem MOCVD los ntawm kev txo qhov kev pheej hmoo ntawm qhov tsis xws luag thiab nce cov txiaj ntsig ntawm cov yeeb yaj kiab siv tau.
• Lub neej ntev thiab kev ntseeg tau: Cov khoom siv hluav taws xob ua los ntawm cov khoom siv ruaj khov zoo li SiC ua kom muaj kev ntseeg tau ntev thiab txo cov nqi tu.

Xaus: Lub susceptor yog ib qho tseem ceeb ntawm cov txheej txheem MOCVD, cuam tshuam ncaj qha rau qhov zoo thiab kev ua haujlwm ntawm nyias zaj duab xis deposition. Los ntawm kev xaiv cov khoom siv hluav taws xob zoo thiab tsim qauv, cov tuam txhab semiconductor tuaj yeem ua kom zoo dua lawv cov txheej txheem, ua rau cov cuab yeej ua tau zoo dua thiab txo cov nqi tsim khoom. Raws li qhov kev thov rau cov khoom siv hluav taws xob ua tau zoo txuas ntxiv mus ntxiv, qhov tseem ceeb ntawm kev ua tau zoo MOCVD susc