CovMOCVDtxoj kev yog ib qho ntawm cov txheej txheem ruaj khov tshaj plaws tam sim no siv hauv kev lag luam kom loj hlob zoo ib leeg crystalline nyias zaj duab xis, xws li ib theem InGaN epilayers, III-N cov ntaub ntawv, thiab semiconductor films nrog ntau quantum zoo qauv, thiab tseem ceeb heev nyob rau hauv lub tsim cov khoom siv semiconductor thiab optoelectronic.
CovSiC txheej MOCVD susceptoryog ib tug tshwj xeeb wafer tuav coated nrog silicon carbide (SiC) rauepitaxial Kev loj hlob hauv cov txheej txheem hlau organic chemical vapor deposition (MOCVD).
SiC txheej muaj cov tshuaj tiv thaiv zoo heev thiab thermal stability, ua rau nws yog ib qho kev xaiv zoo tshaj plaws rau MOCVD susceptors siv hauv kev xav tau cov txheej txheem kev loj hlob ntawm epitaxial.
Ib qho tseem ceeb ntawm cov txheej txheem MOCVD yog cov susceptor, uas yog lub hauv paus tseem ceeb los xyuas kom meej qhov sib xws thiab zoo ntawm cov yeeb yaj kiab uas tsim tawm.
Tus susceptor yog dab tsi? Lub susceptor yog cov khoom tshwj xeeb uas siv rau hauv cov txheej txheem MOCVD los txhawb thiab ua kom sov lub substrate uas nyias zaj duab xis tso. Nws muaj ntau yam haujlwm, suav nrog kev nqus hluav taws xob hluav taws xob, hloov mus rau hauv tshav kub, thiab sib npaug faib cov cua sov ntawm cov substrate. Cov cua sov no yog qhov tseem ceeb rau kev loj hlob ntawm cov yeeb yaj kiab nyias nyias nrog cov tuab tuab thiab muaj pes tsawg leeg.
Hom susceptors:
1. Graphite susceptors: Graphite susceptors feem ntau coated nrog txheej tiv thaiv xws lisilicon carbide (SiC), uas yog lub npe hu rau nws cov thermal conductivity thiab stability. CovSiC txheejmuab ib qho nyuaj, tiv thaiv nto uas tiv thaiv corrosion thiab degradation ntawm qhov kub thiab txias.
2. Silicon carbide (SiC) susceptors: Cov susceptors no yog tsim los ntawm SiC thiab muaj thermal stability zoo heev thiab hnav tsis kam. SiC susceptors yog tshwj xeeb tshaj yog haum rau cov txheej txheem kub thiab corrosive ib puag ncig.
Yuav ua li cas susceptors ua haujlwm hauv MOCVD:
Nyob rau hauv cov txheej txheem MOCVD, precursors tau nkag mus rau hauv cov tshuaj tiv thaiv chamber uas lawv decompose thiab react los ua ib tug nyias zaj duab xis ntawm lub substrate. Lub susceptor plays lub luag haujlwm tseem ceeb los ntawm kev ua kom lub substrate yog rhuab sib npaug, uas yog qhov tseem ceeb rau kev ua tiav cov yeeb yaj kiab zoo ib yam thoob plaws tag nrho cov substrate nto. Cov khoom siv thiab tsim qauv ntawm cov susceptor tau ua tib zoo xaiv kom ua tau raws li cov kev cai tshwj xeeb ntawm cov txheej txheem tso tawm, xws li qhov kub thiab txias thiab tshuaj lom neeg sib haum.
Cov txiaj ntsig ntawm kev siv cov susceptors zoo:
• Txhim kho cov yeeb yaj kiab zoo: Los ntawm kev muab cov khoom siv hluav taws xob zoo sib xws, cov susceptor pab ua kom tiav cov yeeb yaj kiab nrog cov tuab tuab thiab muaj pes tsawg leeg, uas yog qhov tseem ceeb rau kev ua haujlwm ntawm cov khoom siv semiconductor.
• Txhim kho cov txheej txheem kev ua tau zoo: Cov susceptors muaj txiaj ntsig zoo nce qhov kev ua tau zoo tag nrho ntawm cov txheej txheem MOCVD los ntawm kev txo qis qhov tshwm sim ntawm qhov tsis xws luag thiab nce cov txiaj ntsig ntawm cov yeeb yaj kiab siv tau.
• Lifespan thiab kev ntseeg tau: Cov khoom siv hluav taws xob ua los ntawm cov khoom siv ruaj khov xws li SiC ua kom muaj kev ntseeg tau ntev thiab txo cov nqi tu.
Lub susceptor yog ib qho tseem ceeb ntawm cov txheej txheem MOCVD thiab cuam tshuam ncaj qha rau qhov zoo thiab kev ua haujlwm ntawm nyias zaj duab xis deposition. Yog xav paub ntxiv txog qhov ntau thiab tsawg, MOCVD susceptors thiab nqi, thov tsis txhob yig tiv tauj peb. Peb cov engineers yuav zoo siab los qhia koj txog cov ntaub ntawv tsim nyog thiab teb tag nrho koj cov lus nug.
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Post lub sij hawm: Aug-12-2024