Tantalum carbide (TaC)yog binary compound ntawm tantalum thiab carbon nrog cov tshuaj formula TaC x, qhov x feem ntau txawv ntawm 0.4 thiab 1. Lawv yog cov tsis tshua muaj zog, nkig, refractory ceramic cov ntaub ntawv nrog hlau conductivity. Lawv yog cov hmoov xim av-grey thiab feem ntau ua tiav los ntawm sintering.
Tantalum carbideyog ib qho tseem ceeb ntawm cov khoom siv hlau ceramic. Ib qho tseem ceeb heev ntawm kev siv tantalum carbide yog tantalum carbide txheej.
Khoom yam ntxwv ntawm tantalum carbide txheej
Siab melting point: Lub melting point ntawmtantalum carbideyog siab npaum li3880 ° C, uas ua rau nws ruaj khov nyob rau hauv ib puag ncig kub thiab tsis yooj yim rau yaj los yog degrade.
Kev ua haujlwm:Feem ntau, qhov kev ua haujlwm ntawm Tantalum carbide (TaC) yog 2200 ° C. Xav txog nws qhov chaw melting siab heev, TaC yog tsim los tiv taus qhov kub thiab txias yam tsis tau poob nws cov qauv kev ntseeg siab.
Hardness thiab hnav tsis kam: Nws muaj qhov nyuaj siab heev (Mohs hardness yog li 9-10) thiab tuaj yeem tiv taus hnav thiab khawb.
Tshuaj stability: Nws muaj kev ruaj ntseg zoo rau feem ntau cov kua qaub thiab alkalis thiab tuaj yeem tiv taus corrosion thiab tshuaj lom neeg.
Thermal conductivity: Zoo thermal conductivity ua rau nws muaj txiaj ntsig zoo disperse thiab ua cov cua sov, txo qhov cuam tshuam ntawm cov cua sov hauv cov khoom siv.
Daim ntawv thov scenarios thiab qhov zoo hauv kev lag luam semiconductor
Cov khoom siv MOCVD: Hauv MOCVD (chemical vapor deposition) khoom siv,tantalum carbide txheejyog siv los tiv thaiv cov tshuaj tiv thaiv chamber thiab lwm yam kub-kub Cheebtsam, txo qhov yaig ntawm cov cuab yeej los ntawm deposits, thiab ncua lub neej kev pab cuam ntawm cov khoom.
Qhov zoo: Txhim kho qhov kub-kub tsis kam ntawm cov cuab yeej siv, txo cov nqi txij nkawm thiab cov nqi, thiab txhim kho kev tsim khoom.
Kev ua wafer: Siv nyob rau hauv wafer ua thiab kis systems, tantalum carbide coatings yuav txhim khu cov hnav tsis kam thiab corrosion kuj ntawm cov khoom.
Qhov zoo: Txo cov khoom lag luam teeb meem tshwm sim los ntawm kev hnav lossis corrosion, thiab xyuas kom muaj kev ruaj ntseg thiab sib xws ntawm kev ua wafer.
Cov txheej txheem semiconductor: Hauv cov txheej txheem semiconductor, xws li ion implanters thiab etchers, tantalum carbide txheej tuaj yeem txhim kho cov cuab yeej siv tau ntev.
Qhov zoo: Txhim kho lub neej kev pab cuam ntawm cov cuab yeej, txo qis qis thiab hloov cov nqi, thiab txhim kho kev tsim khoom.
Cov cheeb tsam kub kub: Hauv cov khoom siv hluav taws xob thiab cov khoom siv hauv qhov kub thiab txias, tantalum carbide coatings yog siv los tiv thaiv cov ntaub ntawv los ntawm qhov kub thiab txias.
Qhov zoo: Ua kom muaj kev ruaj ntseg thiab kev ntseeg siab ntawm cov khoom siv hluav taws xob nyob rau hauv qhov kub thiab txias.
Kev Txhim Kho Yav Tom Ntej
Kev txhim kho khoom siv: Nrog rau kev loj hlob ntawm cov ntaub ntawv science, formulation thiab deposition technology ntawmtantalum carbide txheejyuav txuas ntxiv txhim kho kom txhim kho nws cov kev ua tau zoo thiab txo cov nqi. Piv txwv li, cov ntaub ntawv uas siv tau yooj yim dua thiab cov nqi qis dua tuaj yeem tsim.
Kev Siv Technology: Nws yuav muaj peev xwm ua kom muaj txiaj ntsig zoo dua thiab cov thev naus laus zis zoo, xws li kev txhim kho PVD thiab CVD thev naus laus zis, txhawm rau txhim kho qhov zoo thiab ua haujlwm ntawm tantalum carbide txheej.
Cov cheeb tsam thov tshiab: Daim ntawv thov thaj chaw ntawmtantalum carbide txheejyuav nthuav dav mus rau ntau qhov kev siv thev naus laus zis thiab kev lag luam, xws li aerospace, lub zog thiab kev lag luam tsheb, kom tau raws li qhov xav tau ntawm cov khoom siv ua haujlwm siab.
Post lub sij hawm: Aug-08-2024