Hauv cov txheej txheem kev npaj wafer, muaj ob qhov txuas txuas: ib qho yog kev npaj ntawm cov substrate, thiab lwm qhov yog kev siv cov txheej txheem epitaxial. Lub substrate, ib tug wafer ua tib zoo crafted los ntawm ib tug semiconductor ib tug siv lead ua khoom, tuaj yeem ncaj qha mus rau hauv cov txheej txheem wafer tsim los ua lub hauv paus los tsim cov khoom siv semiconductor, lossis nws tuaj yeem txhim kho ntxiv los ntawm cov txheej txheem epitaxial.
Yog li, dab tsi yog denotation? Nyob rau hauv luv luv, epitaxy yog kev loj hlob ntawm ib tug tshiab txheej ntawm ib tug siv lead ua ntawm ib tug siv lead ua substrate uas tau finely txheej txheem (txiav, sib tsoo, polishing, thiab lwm yam). Cov txheej txheem siv lead ua tshiab no thiab cov substrate tuaj yeem ua los ntawm cov khoom qub lossis cov khoom sib txawv, kom homogeneous lossis heteroepitaxial kev loj hlob tuaj yeem ua tiav raws li qhov xav tau. Vim hais tias cov tshiab siv lead ua txheej yuav nthuav dav raws li cov theem siv lead ua ntawm cov substrate, nws yog hu ua epitaxial txheej. Nws thickness feem ntau tsuas yog ob peb microns. Noj silicon ua piv txwv, silicon epitaxial kev loj hlob yog kom loj hlob ib txheej ntawm silicon nrog tib lub siv lead ua orientation raws li lub substrate, controllable resistivity thiab thickness, ntawm ib tug silicon ib tug crystal substrate nrog ib tug tshwj xeeb siv lead ua orientation. Ib qho silicon ib txheej siv lead ua nrog cov qauv lattice zoo meej. Thaum cov txheej txheem epitaxial loj hlob ntawm lub substrate, tag nrho yog hu ua epitaxial wafer.
Rau cov tsoos silicon semiconductor kev lag luam, tsim high-frequency thiab high-power devices ncaj qha rau silicon wafers yuav ntsib ib co kev nyuaj. Piv txwv li, qhov yuav tsum tau muaj qhov siab tawg voltage, me me tsis kam thiab me me saturation voltage poob hauv cheeb tsam collector yog qhov nyuaj rau kev ua tiav. Kev taw qhia txog kev siv tshuab epitaxy ntse daws cov teeb meem no. Cov tshuaj yog kom loj hlob ib tug high-resistivity epitaxial txheej ntawm ib tug tsawg-resistivity silicon substrate, thiab ces fabricate li ntawm high-resistivity epitaxial txheej. Nyob rau hauv txoj kev no, high-resistivity epitaxial txheej muab lub siab tawg voltage rau lub cuab yeej, thaum lub low-resistivity substrate txo qhov tsis kam ntawm lub substrate, yog li txo qhov saturation voltage poob, yog li ua tiav high breakdown voltage thiab me me Qhov sib npaug ntawm qhov tsis kam thiab me me voltage poob.
Tsis tas li ntawd, epitaxy thev naus laus zis xws li vapor theem epitaxy thiab kua theem epitaxy ntawm GaAs thiab lwm yam III-V, II-VI thiab lwm yam khoom siv molecular compound semiconductor kuj tau tsim zoo heev thiab tau dhau los ua lub hauv paus rau feem ntau cov khoom siv microwave, optoelectronic li thiab lub zog. khoom siv. Indispensable txheej txheem technologies rau ntau lawm, tshwj xeeb tshaj yog kev vam meej daim ntawv thov ntawm molecular beam thiab hlau-organic vapor theem epitaxy tshuab nyob rau hauv nyias txheej, superlattices, quantum wells, strained superlattices, thiab atomic-theem nyias-txheej epitaxy tau dhau los ua ib qho tshiab ntawm kev tshawb fawb semiconductor. Txoj kev loj hlob ntawm "Energy Belt Project" tau tsim lub hauv paus ruaj khov.
Raws li qhov thib peb-tiam semiconductor li muaj kev txhawj xeeb, yuav luag tag nrho cov khoom siv semiconductor yog tsim los ntawm cov txheej txheem epitaxial, thiab silicon carbide wafer nws tus kheej tsuas yog ua lub substrate. Lub thickness ntawm SiC epitaxial cov ntaub ntawv, keeb kwm yav dhau cov cab kuj concentration thiab lwm yam tsis ncaj qha txiav txim lub ntau yam hluav taws xob khoom ntawm SiC li. Silicon carbide cov cuab yeej siv rau cov ntawv siv hluav taws xob siab tau muab tso rau cov kev xav tau tshiab rau cov tsis xws li cov ntaub ntawv tuab ntawm cov ntaub ntawv epitaxial thiab cov khoom siv tom qab qhov siab. Yog li ntawd, silicon carbide epitaxial technology plays lub luag hauj lwm txiav txim siab nyob rau hauv tag nrho siv cov kev ua tau zoo ntawm silicon carbide li. Kev npaj ntawm yuav luag tag nrho SiC cov khoom siv hluav taws xob yog ua raws li cov khoom zoo SiC epitaxial wafers. Kev tsim cov txheej txheem epitaxial yog ib feem tseem ceeb ntawm kev lag luam dav bandgap semiconductor.
Post lub sij hawm: May-06-2024