Nyob rau hauv lub semiconductor kev lag luam saw, tshwj xeeb tshaj yog nyob rau hauv lub thib peb tiam semiconductor (wide bandgap semiconductor) kev lag luam saw, muaj substrates thiabepitaxialtxheej. Dab tsi yog qhov tseem ceeb ntawm covepitaxialtxheej? Dab tsi yog qhov txawv ntawm substrate thiab substrate?
Lub substrate yog awaferua los ntawm semiconductor ib leeg siv lead ua cov ntaub ntawv. Lub substrate tuaj yeem nkag ncaj qha rau hauvwaferraug txuas los tsim cov khoom siv semiconductor, lossis nws tuaj yeem ua tiav los ntawmepitaxialtxheej txheem los tsim epitaxial wafers. Lub substrate yog lub hauv qab ntawm lubwafer(txiav lub wafer, koj tuaj yeem tau txais ib qho tuag tom qab lwm qhov, thiab tom qab ntawd ntim nws los ua cov lus dab neeg nti) (qhov tseeb, hauv qab ntawm cov nti feem ntau yog plated nrog ib txheej ntawm rov qab kub, siv los ua "hauv av" kev sib txuas, tab sis nws yog ua nyob rau hauv cov txheej txheem rov qab), thiab lub hauv paus uas nqa tag nrho cov kev txhawb nqa muaj nuj nqi (lub skyscraper nyob rau hauv lub nti yog ua nyob rau hauv lub substrate).
Epitaxy yog hais txog cov txheej txheem ntawm kev loj hlob ib leeg siv lead ua tshiab rau ntawm ib lub pob zeb siv lead ua uas tau ua tib zoo ua tiav los ntawm kev txiav, sib tsoo, polishing, thiab lwm yam. Cov siv lead ua tshiab tuaj yeem yog cov khoom siv tib yam li cov substrate, lossis nws tuaj yeem ua cov khoom sib txawv. (homoepitaxial lossis heteroepitaxial).
Txij li cov txheej txheem tshiab tsim ib qho siv lead ua loj hlob raws li cov txheej txheem siv lead ua substrate, nws yog hu ua txheej txheej epitaxial (feem ntau yog ob peb microns tuab. Siv silicon ua piv txwv: lub ntsiab lus ntawm silicon epitaxial kev loj hlob yog loj hlob ib txheej ntawm siv lead ua nrog zoo lattice qauv kev ncaj ncees. Nyob rau hauv ib tug silicon ib tug crystal substrate nrog ib tug tej yam siv lead ua orientation thiab txawv resistivity thiab thickness raws li lub substrate), thiab lub substrate nrog lub epitaxial txheej yog hu ua ib tug epitaxial wafer (epitaxial wafer = epitaxial txheej + substrate). Cov cuab yeej tsim khoom yog nqa tawm ntawm txheej epitaxial.
Epitaxiality muab faib ua homoepitaxiality thiab heteroepitaxiality. Homoepitaxiality yog kom loj hlob ib txheej epitaxial ntawm tib yam khoom raws li lub substrate ntawm lub substrate. Dab tsi yog qhov tseem ceeb ntawm homoepitaxiality? - Txhim kho cov khoom ruaj khov thiab kev ntseeg tau. Txawm hais tias homoepitaxiality yog kom loj hlob ib txheej epitaxial ntawm tib yam khoom raws li lub substrate, txawm hais tias cov khoom yog tib yam, nws muaj peev xwm txhim kho cov khoom purity thiab uniformity ntawm wafer nto. Muab piv nrog cov polished wafers ua tiav los ntawm kev siv tshuab polishing, lub substrate ua tiav los ntawm epitaxiality muaj qhov chaw tiaj tus, siab huv, tsawg dua micro defects, thiab tsawg dua impurities. Yog li ntawd, qhov kev tiv thaiv zoo dua qub, thiab nws yooj yim dua los tswj qhov tsis xws luag xws li cov khoom nto, stacking faults, thiab dislocations. Epitaxy tsis tsuas yog txhim kho cov khoom ua tau zoo, tab sis kuj ua kom cov khoom ruaj khov thiab kev ntseeg tau.
Dab tsi yog cov txiaj ntsig ntawm kev ua lwm txheej ntawm silicon atoms epitaxial ntawm silicon wafer substrate? Hauv cov txheej txheem CMOS silicon, kev loj hlob ntawm epitaxial (EPI, epitaxial) ntawm wafer substrate yog cov txheej txheem tseem ceeb heev.
1. Txhim kho crystal zoo
Thawj qhov tsis xws luag hauv substrate thiab impurities: Lub wafer substrate yuav muaj qee yam tsis xws luag thiab impurities thaum lub sijhawm tsim khoom. Kev loj hlob ntawm epitaxial txheej tuaj yeem tsim kom muaj qhov zoo, tsis muaj qhov tsis zoo thiab impurity-concentration ib leeg-crystalline silicon txheej ntawm substrate, uas yog ib qho tseem ceeb heev rau kev tsim khoom tom ntej. Uniform siv lead ua qauv: Epitaxial kev loj hlob tuaj yeem ua kom muaj cov qauv siv lead ua ntau dua, txo qhov cuam tshuam ntawm cov ciam teb thiab qhov tsis xws luag hauv cov khoom siv substrate, thiab yog li txhim kho cov siv lead ua zoo ntawm tag nrho wafer.
2. Txhim kho hluav taws xob ua haujlwm
Txhim kho cov yam ntxwv ntawm cov cuab yeej zoo: Los ntawm kev loj hlob ib txheej epitaxial ntawm lub substrate, doping concentration thiab hom silicon tuaj yeem raug tswj kom ua tau raws li qhov ua tau zoo ntawm cov khoom siv hluav taws xob. Piv txwv li, doping ntawm epitaxial txheej tuaj yeem kho qhov pib voltage thiab lwm yam hluav taws xob tsis zoo ntawm MOSFET. Txo cov dej xau tam sim no: Cov txheej txheem zoo epitaxial muaj qhov tsis xws luag, uas yuav pab txo cov dej ntws tawm hauv lub cuab yeej, yog li txhim kho kev ua haujlwm thiab kev ntseeg siab ntawm lub cuab yeej.
3. Txhawb cov txheej txheem txheej txheem siab
Txo qhov loj me: Hauv cov txheej txheem me me (xws li 7nm, 5nm), cov cuab yeej feature loj txuas ntxiv mus, yuav tsum tau ua kom zoo dua thiab cov khoom zoo. Epitaxial kev loj hlob thev naus laus zis tuaj yeem ua tau raws li cov kev xav tau no thiab txhawb nqa kev ua haujlwm siab thiab kev ua haujlwm siab sib xyaw ua ke. Txhim kho qhov hluav taws xob tawg: Cov txheej txheej epitaxial tuaj yeem tsim kom muaj qhov sib zog tawg ntau dua, uas yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob thiab cov khoom siv hluav taws xob siab. Piv txwv li, hauv cov khoom siv hluav taws xob, cov txheej txheem epitaxial tuaj yeem ua rau kom muaj zog tawg ntawm cov cuab yeej thiab ua kom muaj kev nyab xeeb ntawm kev ua haujlwm.
4. txheej txheem compatibility thiab ntau txheej txheej
Cov txheej txheem ntau txheej: Epitaxial kev loj hlob thev naus laus zis tso cai rau cov txheej txheem ntau txheej kom loj hlob ntawm lub substrate, thiab cov txheej txheem sib txawv tuaj yeem muaj qhov sib txawv doping ntau thiab ntau hom. Qhov no muaj txiaj ntsig zoo rau kev tsim cov khoom siv CMOS nyuaj thiab ua tiav kev sib koom ua ke ntawm peb sab. Compatibility: Cov txheej txheem kev loj hlob ntawm epitaxial yog qhov sib xws nrog cov txheej txheem tsim khoom CMOS uas twb muaj lawm thiab tuaj yeem yooj yim ua ke rau hauv cov txheej txheem tsim khoom uas twb muaj lawm yam tsis tau hloov kho cov txheej txheem.
Post lub sij hawm: Lub Xya hli ntuj-16-2024