Taw qhia ntawm wafer cab kuj
KHOOM PLIG
▶Wafer Carrier System rau PECVD & TALOX txheej txheem
• PECVD & TALOX Graphite Nkoj (M4 ~ M12)
• Nkoj SM-Nkoj (M4, M6)
• Implant & da dej Graphite Part (M4 ~ M6)
• C/C tais & Ceramic txheej
• Hlau RIE-Tray & Ceramic Txheej
• Nqus Sealing: O-Ring & SQ-Ring
▶Texturing & ntub Etching Transfer txheej txheem
• LSC H-Carrier lossis cassette (M4 ~ M12)
• LSC V-Carrier lossis cassette (M4 ~ M12)
• ASC Carrier lossis cassette (M4, M6)
• W/F Carrier & Storage Box (M4 ~ M12)
• Tsheb thauj mus los (Roller) Series
▶Solar Cell Carrier & Hlau Carrier
• TRC Carrier lossis cassette (M4 ~ M12)
• Magazine (nrog BELT)
GRAPHITE BOAT (H-hom)
19P6-216CT (WF M4-M12)
GRAPHITE BOAT (H-hom)
21P6-240CT WF M4-M12)
GRAPHITE BOAT (H-hom)
23P7-308CT (W/F M4 ~ M12)
GRAPHITE BOAT (H-hom)
22P / 7-294TP (W / F M4 ~ M12)
GRAPHITE BOAT (H-hom)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & STORAGE BOX (~M12)
C/C TRAY lossis CARRIER (M4 ~ M10)
C/C TRAY lossis CARRIER (M4 ~ M10)
VERTICAL BOAT (SM) M6
LSC-H-CARRIER (~M12)
LSC-V-CARRIER (~M12)
ASC CARRIER (~M6)
TRC CARRIER (~M12)
TRC CARRIER (~M12)
GRAPHITE-BOAT (M12)
Wafer Carrier System rau PECVD txheej txheem
▶ GRAPHITE BOAT (CT-Designed) M10/M12 txheej txheem
• TSEEM CEEB TSHAJ PLAWS
▶ GRAPHITE BOAT (CT-Designed) txheej txheem M4/M6
▶ BOAT Accessory Parts
▶ VERTICAL BOAT-161.7mm WAFER
▶ VERTICAL BOAT-166mm WAFER
▶ VERTICAL BOAT-161.7mm, 166mm WAFER
Solar Cell Carrier & Hlau TRC Carrier
HOM: Automation
Qhov Loj: ① 156 × 156MM ② 156.75 × 156.75MM
③161.7x161.7MM ④166x166MM
⑤ 180 × 180mm ⑥ 210 × 210mm
SIV: Nqa (Casette)
CAPACITY: 100 daim
PIB: 4.76mm / 5.953mm / 6.35mm
DIMENSION: 559 × 220 × 220mm
712 × 260 × 260 hli
ADVANTAGE: Atmosphere
Khoom siv: Nplaim, Sab Bar-Aluminium (anodizing)
SIDE PLATE-POM (Antistatic)
Npog hauv qab bar-EPDM / PU / VITON (ASE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
TRC-METAL CARRIER (U'SER LINE)
SHOWER Plate & IMPLANT, CARRIER
