Silicon carbide ceramic chucks

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WeiTai Energy Technology Co., Ltd. yog ib tug ua lag luam ntawm advanced semiconductor ceramics thiab tsuas yog cov chaw tsim tshuaj paus nyob rau hauv Suav teb uas muaj peev xwm ib txhij muab high-purity silicon carbide ceramics (tshwj xeeb tshaj yog covRecrystalized SiC) thiab CVD SiC txheej.Tsis tas li ntawd, peb lub tuam txhab kuj tau cog lus rau cov teb ceramic xws li alumina, aluminium nitride, zirconia, thiab silicon nitride, thiab lwm yam.

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SiC phaj yog ib hom 0 porosity ntom lub cev ceramics, uas yog raws li SiC thiab sintered ntawm 2250 ℃.SiC cov ntsiab lus yog ntau tshaj 99.6%, dabtsi yog khoov lub zog yog ntau tshaj 410mpa thiab thermal conductivity yog 140W / MK nws yog tib yam ceramics resistant HF, H2SO4 thiab lwm yam muaj zog acid corrosion.

Qhov zoo ntawm silicon carbide ceramics:

1, lub coefficient ntawm thermal expansion yog me me, ze heev rau silicon;

2, zoo heev hnav tsis kam, hardness thib ob tsuas yog pob zeb diamond;

3, zoo heev thermal conductivity, kub tsis kam thiab ceev kub dissipation;