Semicera's 6 Inch Semi-Insulating HPSI SiC Wafers yog tsim los ua kom tau raws li qhov xav tau ntawm cov tshuab semiconductor niaj hnub. Nrog tshwj xeeb purity thiab sib xws, cov wafers ua lub hauv paus txhim khu kev qha rau kev tsim cov khoom siv hluav taws xob zoo.
Cov HPSI SiC wafers paub txog lawv cov thermal conductivity thiab hluav taws xob rwb thaiv tsev, uas yog qhov tseem ceeb rau kev ua kom zoo ntawm cov khoom siv hluav taws xob thiab cov hluav taws xob ntau zaus. Cov khoom siv hluav taws xob semi-insulating pab txo qis kev cuam tshuam hluav taws xob thiab ua kom cov cuab yeej ua tau zoo.
Cov txheej txheem tsim khoom zoo ua haujlwm los ntawm Semicera kom ntseeg tau tias txhua lub wafer muaj cov tuab tuab thiab qhov tsis xws luag. Qhov kev txiav txim siab no yog qhov tseem ceeb rau kev siv qib siab xws li cov khoom siv xov tooj cua zaus, lub zog hluav taws xob, thiab cov tshuab LED, qhov ua tau zoo thiab kav ntev yog qhov tseem ceeb.
Los ntawm kev siv cov txheej txheem tsim khoom hauv lub xeev, Semicera muab cov wafers uas tsis tsuas yog ua tau raws li tab sis tshaj cov qauv kev lag luam. Qhov loj 6-nti muaj qhov yooj yim hauv kev tsim cov khoom lag luam, ua rau kev tshawb fawb thiab kev lag luam hauv kev lag luam semiconductor.
Xaiv Semicera's 6 Nti Semi-Insulating HPSI SiC Wafers txhais tau tias kev nqis peev hauv cov khoom lag luam uas muab cov khoom zoo sib xws thiab kev ua haujlwm zoo. Cov wafers no yog ib feem ntawm Semicera qhov kev cog lus los txhawb kev muaj peev xwm ntawm semiconductor thev naus laus zis los ntawm cov ntaub ntawv tshiab thiab kev ua haujlwm zoo.
| Cov khoom | Ntau lawm | Kev tshawb fawb | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Deg orientation yuam kev | 11-20 > 4 ± 0.15 ° | ||
| Hluav taws xob Parameters | |||
| Dopant | n-hom Nitrogen | ||
| Kev tiv thaiv | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Txoj kab uas hla | 150.0 ± 0.2 hli | ||
| Thickness | 350 ± 25 hli | ||
| Thawj qhov chaw tiaj tiaj | [1-100] ± 5° | ||
| Thawj lub tiaj tiaj ntev | 47.5 ± 1.5 hli | ||
| Secondary flat | Tsis muaj | ||
| TTV | ≤ 5 hli | ≤10 hli | ≤ 15 hli |
| LTV | ≤ 3 μm (5mm * 5mm) | ≤ 5 μm (5mm * 5mm) | ≤ 10 μm (5mm * 5mm) |
| Hneev | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤ 35 hli | ≤ 45 hli | ≤ 55 hli |
| Pem hauv ntej (Si-face) roughness (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Qauv | |||
| Micropipe ceev | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Hlau impurities | ≤5E10 atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Pem hauv ntej zoo | |||
| Pem hauv ntej | Si | ||
| Nto tiav | Lub ntsej muag CMP | ||
| Cov khoom | ≤60ea / wafer (qhov loj ≥0.3μm) | NA | |
| Kos | ≤5ea / hli Kev sib sau ntev ≤ Diameter | Qhov ntev ≤2 * Txoj kab uas hla | NA |
| Txiv kab ntxwv tev / pits / stains / striations / tawg / paug | Tsis muaj | NA | |
| Ntug chips / indents / tawg / hex daim hlau | Tsis muaj | ||
| Polytype cheeb tsam | Tsis muaj | Thaj tsam ≤ 20% | Thaj tsam ≤ 30% |
| Pem hauv ntej laser npav | Tsis muaj | ||
| Back Quality | |||
| Rov qab ua tiav | C-ntsej muag CMP | ||
| Kos | ≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla | NA | |
| Back defects (ntug chips / indents) | Tsis muaj | ||
| Rov qab roughness | Ra≤0.2nm (5μm * 5μm) | ||
| Rov qab laser npav | 1mm (los ntawm sab saum toj ntug) | ||
| Ntug | |||
| Ntug | Chamfer | ||
| Ntim | |||
| Ntim | Epi-npaj nrog lub tshuab nqus tsev ntim Multi-wafer cassette ntim | ||
| * Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD. | |||
