Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor.Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Graphite yog cov khoom siv kub zoo heev, tab sis nws oxidizes yooj yim ntawm qhov kub thiab txias.Txawm tias nyob rau hauv lub tshuab nqus tsev vacuum furnaces nrog inert gas, nws tseem tuaj yeem ua rau qeeb oxidation.Siv CVD tantalum carbide (TaC) txheej tuaj yeem tiv thaiv cov graphite substrate zoo, muab tib yam kub-resistant graphite.TaC kuj yog cov khoom siv tsis zoo, txhais tau tias nws yuav tsis hnov mob nrog cov pa roj xws li argon lossis hydrogen ntawm qhov kub thiab txias.Kev nugKev cai CVD TaC txheej txheej tam sim no!
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog kev sib koom tes ntawm R & D department.Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb.Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev.Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
