Taw qhia rau Silicon Carbide Txheej
Peb Chemical Vapor Deposition (CVD) Silicon Carbide (SiC) txheej yog cov txheej txheem ruaj khov thiab hnav-tiv taus, zoo tagnrho rau ib puag ncig xav tau siab corrosion thiab thermal kuj.Silicon Carbide txheejyog siv nyob rau hauv nyias txheej ntawm ntau yam substrates los ntawm cov txheej txheem CVD, muab cov yam ntxwv zoo tshaj plaws.
Ntsiab nta
● -Exceptional Purity: Boasting ib qho ultra-ntshiab muaj pes tsawg leeg ntawm99.99995%, pebSiC txheejtxo qhov kev pheej hmoo ntawm kev kis kab mob hauv kev ua haujlwm rhiab semiconductor.
● -Kev ua haujlwm siab tshaj: Muab pov thawj zoo heev rau ob qho tib si hnav thiab corrosion, ua rau nws zoo meej rau kev sib tw tshuaj lom neeg thiab plasma chaw.
● -High Thermal Conductivity: Ua kom ntseeg tau qhov kev ua tau zoo nyob rau hauv qhov kub thiab txias vim nws cov thermal zoo heev.
● -Dimensional Stability: Ua kom muaj kev ntseeg ruaj khov thoob plaws ntau qhov kub thiab txias, ua tsaug rau nws cov thermal expansion coefficient tsawg.
● - Txhim kho Hardness: Nrog ib tug hardness ntsuam xyuas ntawm40 GPa, peb cov SiC txheej tiv thaiv qhov cuam tshuam loj thiab puas.
● -Smooth nto tiav: Muab cov iav zoo li qhov ua tiav, txo cov khoom tsim thiab txhim kho kev ua haujlwm zoo.
Daim ntawv thov
Semicera SiC coatingsyog siv nyob rau hauv ntau theem ntawm semiconductor manufacturing, xws li:
● -LED Chip Fabrication
● -Polysilicon ntau lawm
● -Semiconductor Crystal Loj hlob
● -Silicon thiab SiC Epitaxy
● -Thermal Oxidation thiab Diffusion (TO&D)
Peb muab SiC-coated Cheebtsam crafted los ntawm high-strength isostatic graphite, carbon fiber-reinforced carbon thiab 4N recrystallized silicon carbide, tailored rau fluidized-txaj reactors,STC-TCS converters, CZ unit reflectors, SiC wafer nkoj, SiCwafer paddle, SiC wafer raj, thiab wafer nqa siv nyob rau hauv PECVD, silicon epitaxy, MOCVD txheej txheem.
Cov txiaj ntsig
● -Extended Lifespan: Qhov tseem ceeb txo cov khoom siv downtime thiab cov nqi kho mob, txhim kho tag nrho cov khoom siv.
● -Qhov Zoo Zoo: Ua tiav high-purity nto tsim nyog rau kev ua semiconductor, yog li boosting khoom zoo.
● -Kev Ua Tau Zoo: Optimizes thermal thiab CVD txheej txheem, ua rau lub sij hawm luv luv thiab yields ntau dua.
Technical Specifications
● -Cov qauv: FCC β theem polycrystalline, feem ntau (111) taw qhia
● - CeevQhov hnyav: 3.21 g / cm³
● - Hardness: 2500 Vickes hardness (500g load)
● -Fracture ToughnessQhov siab: 3.0MPa1/2
● -Thermal Expansion Coefficient (100–600 ° C)4.3 x 10-6k-1
● -Elastic Modulus(1300 ℃):4 35 GPa
● -Cov yeeb yaj kiab Thickness:100 µm
● -Nto Roughness:2-10 µm
Purity Data (Tshuaj los ntawm Glow Discharge Mass Spectroscopy)
| Element | ppm ua | Element | ppm ua |
| Li | <0.001 | Cu | <0.01 Nws |
| Be | <0.001 | Zn | <0.05 Nws |
| Al | <0.04 Nws | Ga | <0.01 Nws |
| P | <0.01 Nws | Ge | <0.05 Nws |
| S | <0.04 Nws | As | <0.005 |
| K | <0.05 Nws | In | <0.01 Nws |
| Ca | <0.05 Nws | Sn | <0.01 Nws |
| Ti | <0.005 | Sb | <0.01 Nws |
| V | <0.001 | W | <0.05 Nws |
| Cr | <0.05 Nws | Te | <0.01 Nws |
| Mn | <0.005 | Pb | <0.01 Nws |
| Fe | <0.05 Nws | Bi | <0.05 Nws |
| Ni | <0.01 Nws |
|
