High purity SiC Carrier / Susceptor

Lus piav qhia luv luv:

Silicon carbide bearing disc tseem hu ua SIC tais, silicon carbide etching disc, ICP etching disc. Silicon carbide tais rau LED etching (SiC tais) φ600mm yog ib qho tshwj xeeb accessory rau sib sib zog nqus silicon etching (ICP etching tshuab).

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Kev piav qhia

Silicon carbide ceramics muaj cov cuab yeej zoo heev ntawm chav tsev kub, xws li lub zog siab, siab hardness, siab elastic modulus, thiab lwm yam, nws kuj muaj qhov kub thiab txias stability zoo li thermal conductivity, thermal expansion coefficient, thiab zoo tshwj xeeb nruj thiab kho qhov muag. kev ua tau zoo.
Lawv tshwj xeeb tshaj yog tsim rau kev tsim cov khoom siv hluav taws xob zoo rau cov khoom siv hluav taws xob sib xyaw xws li cov tshuab lithography, feem ntau yog siv los tsim cov khoom siv SiC / susceptor, SiC wafer nkoj, nqus disc, dej txias phaj, ntsuas ntsuas ntsuas qhov ntsuas, grating thiab lwm yam khoom siv ceramic.

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Qhov zoo

Kev kub siab ua haujlwm: siv ib txwm siv ntawm 1800 ℃
High thermal conductivity: sib npaug rau cov khoom siv graphite
High hardness: hardness thib ob tsuas yog pob zeb diamond, boron nitride
Corrosion kuj: muaj zog acid thiab alkali tsis muaj corrosion rau nws, corrosion kuj zoo dua tungsten carbide thiab alumina
Lub teeb yuag: tsawg ntom, ze rau aluminium
Tsis muaj deformation: tsawg coefficient ntawm thermal expansion
Thermal shock resistance: Nws tuaj yeem tiv taus qhov kub hloov pauv, tiv thaiv thermal shock, thiab muaj kev ua haujlwm ruaj khov
Silicon carbide cab kuj xws li sic etching carrier, ICP etching susceptor, yog dav siv nyob rau hauv semiconductor CVD, nqus sputtering thiab lwm yam.

Qhov zoo

Khoom	Tus nqi	Txoj kev
Qhov ntom	3.21 g / cc	Sink-float thiab dimension
Tshwj xeeb kub	0.66 J / g ° K	Pulsed laser flash
Flexural zog	450 MPa 560 MPa	4 taw tes khoov, RT4 taw tes khoov, 1300 °
Fracture toughness	2.94 MPa m1/2	Microindentation
Hardness	2800	Vicker's, 500g load
Elastic ModulusYoung's Modulus	450 GPa 430 GPa	4 pt khoov, RT4 pt khoov, 1300 ° C
Cov qoob loo loj	2-10 µm	SEM

Tuam txhab Profile

WeiTai Energy Technology Co., Ltd. yog ib tug ua lag luam ntawm advanced semiconductor ceramics thiab tsuas yog cov chaw tsim tshuaj paus nyob rau hauv Suav teb uas muaj peev xwm ib txhij muab high-purity silicon carbide ceramic (tshwj xeeb tshaj yog cov Recrystallized SiC) thiab CVD SiC txheej. Tsis tas li ntawd, peb lub tuam txhab kuj tau cog lus rau cov teb ceramic xws li alumina, aluminium nitride, zirconia, thiab silicon nitride, thiab lwm yam.

Peb cov khoom tseem ceeb suav nrog: silicon carbide etching disc, silicon carbide nkoj cab, silicon carbide wafer nkoj (Photovoltaic & Semiconductor), silicon carbide furnace tube, silicon carbide cantilever paddle, silicon carbide chucks, silicon carbide beam, Silicon carbide beam, CVDC thiab coatings txheej. Cov khoom siv tsuas yog siv hauv kev lag luam semiconductor thiab photovoltaic, xws li cov khoom siv rau kev loj hlob siv lead ua, epitaxy, etching, ntim, txheej thiab diffusion furnaces, thiab lwm yam.
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