Khoom CVD SILICON CARBIDE qhov chaw raug lees paub tias yog thawj qhov kev xaiv rau RTP / EPI rings thiab cov hauv paus thiab plasm aetch kab noj hniav qhov chaw uas ua haujlwm ntawm qhov system siab yuav tsum tau ua haujlwm kub (> 1500 ℃), cov kev xav tau rau purity yog qhov tshwj xeeb siab (> 99.9995%) thiab qhov kev ua tau zoo tshwj xeeb tshaj yog thaum muaj cov tshuaj tiv thaiv tshwj xeeb. Cov ntaub ntawv no tsis muaj cov theem nrab ntawm cov ntug ntawm cov nplej, yog li lawv cov khoom tsim cov khoom tsawg dua li lwm cov ntaub ntawv. Tsis tas li ntawd, cov khoom siv no tuaj yeem ntxuav tau los ntawm kev siv cov kub HF / HCl nrog me ntsis degradation, ua rau cov khoom tsawg dua thiab ua haujlwm ntev dua.
