Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Semicera 'qhov chaw rau ib qho kev loj hlob siv lead ua
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Tsis tas li ntawd, lub neej kev pab cuam ntawm Semicera's TaC txheej cov khoom yog ntev dua thiab tiv taus kub ntau dua li ntawm SiC txheej. Tom qab lub sijhawm ntev ntawm cov ntaub ntawv ntsuas ntsuas, peb TaC tuaj yeem ua haujlwm ntev ntev ntawm qhov siab tshaj plaws ntawm 2300 degrees Celsius. Cov hauv qab no yog qee qhov ntawm peb cov qauv:
(a) Schematic daim duab ntawm SiC ib leeg siv lead ua ingot loj hlob los ntawm PVT txoj kev (b) Sab saum toj TaC coated noob bracket (xws li SiC noob) (c) TAC-coated graphite qhia nplhaib
