Semicera qhia cov khoom siv hluav taws xob zoosilicon carbide cantilever paddles, tsim los ua kom tau raws li qhov xav tau nruj ntawm kev tsim khoom niaj hnub semiconductor.
Covsilicon carbide paddlenta ib qho kev tsim kho siab heev uas txo qis thermal expansion thiab warping, ua rau nws txhim khu kev qha hauv huab cua. Nws txoj kev tsim kho muaj zog muaj kev txhim kho durability, txo qhov kev pheej hmoo ntawm kev tawg lossis hnav, uas yog qhov tseem ceeb hauv kev tswj hwm cov txiaj ntsig siab thiab ua kom zoo ib yam. Covnkoj wafertsim kuj integrates seamlessly nrog cov txheej txheem semiconductor ua khoom, kom ntseeg tau compatibility thiab yooj yim ntawm kev siv.
Ib qho ntawm cov yam ntxwv tseem ceeb ntawm SemiceraSiC paddleyog nws cov tshuaj tiv thaiv, uas tso cai rau nws ua tau zoo heev nyob rau hauv ib puag ncig raug corrosive gases thiab tshuaj. Semicera tsom rau kev kho kom haum rau cov kev daws teeb meem.
| Lub cev muaj zog ntawm Recrystalized Silicon Carbide | |
| Khoom | Tus nqi |
| Ua haujlwm kub (°C) | 1600 ° C (nrog oxygen), 1700 ° C (txo ib puag ncig) |
| SiC cov ntsiab lus | > 99.96% |
| Dawb Si cov ntsiab lus | <0.1% |
| Qhov ntom ntom | 2.60-2.70 g / cm33 |
| Pom tseeb porosity | <16% |
| Compression zog | > 600 MPa |
| Txias dabtsi yog khoov zog | 80-90 MPa (20 ° C) |
| Kub dabtsi yog khoov zog | 90-100 MPa (1400 ° C) |
| Thermal expansion @ 1500 ° C | 4.70 10-6/°C |
| Thermal conductivity @ 1200 ° C | 23 W/m•K |
| Elastic modulus | 240 GPa |
| Thermal shock tsis kam | Zoo heev |
