Tantalum Carbide (TaC) Coated Wafer Susceptor

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TANTALUM carbide txheej yog ib qho kev siv tshuab ntau dua yog siv Tantalum Carbide cov khoom los ua ib qho nyuaj, hnav-resistant thiab corrosion-resistant tivthaiv txheej ntawm ib sab ntawm substrate. Cov txheej no muaj cov khoom zoo heev uas ua rau kom cov khoom muaj zog, siab kub tsis kam thiab tshuaj tiv thaiv, thaum txo kev sib txhuam thiab hnav. Tantalum carbide coatings yog dav siv nyob rau hauv ntau yam kev lag luam, nrog rau kev tsim khoom, aerospace, automotive engineering thiab cov khoom siv kho mob, kom ntev cov khoom siv lub neej, txhim kho kev tsim khoom thiab txo cov nqi tu. Txawm hais tias tiv thaiv cov hlau los ntawm corrosion los yog txhim kho qhov hnav tsis kam thiab oxidation tsis kam ntawm cov khoom siv kho tshuab, tantalum carbide coatings muab cov tshuaj txhim khu kev qha rau ntau yam kev siv.


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Khoom cim npe

Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.

 

Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua

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nrog thiab tsis muaj TaC

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Tom qab siv TaC (txoj cai)

Tsis tas li ntawd, lub neej kev pab cuam ntawm Semicera's TaC txheej cov khoom yog ntev dua thiab tiv taus kub ntau dua li ntawm SiC txheej. Tom qab lub sijhawm ntev ntawm cov ntaub ntawv ntsuas ntsuas, peb TaC tuaj yeem ua haujlwm ntev ntev ntawm qhov siab tshaj plaws ntawm 2300 degrees Celsius. Cov hauv qab no yog qee qhov ntawm peb cov qauv:

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(a) Schematic daim duab ntawm SiC ib leeg siv lead ua ingot loj hlob los ntawm PVT txoj kev (b) Sab saum toj TaC coated noob bracket (xws li SiC noob) (c) TAC-coated graphite qhia nplhaib

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Main feature
Semicera Chaw Ua Haujlwm
Semicera chaw ua haujlwm 2
Cov cuab yeej siv tshuab
CNN ua, tshuaj ntxuav, CVD txheej
Peb qhov kev pabcuam

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