Nyob rau niaj hnub no ntawm kev siv tshuab hluav taws xob, cov khoom siv semiconductor ua lub luag haujlwm tseem ceeb.Ntawm lawv, silicon carbide (SiC) raws li cov khoom siv dav dav ntawm cov khoom siv semiconductor, nrog nws cov txiaj ntsig zoo, xws li hluav taws xob tawg siab, siab saturation ceev, siab thermal conductivity, thiab lwm yam, maj mam dhau los ua qhov tseem ceeb ntawm cov kws tshawb fawb thiab engineers.Lub silicon carbide epitaxial disk, uas yog ib feem tseem ceeb ntawm nws, tau qhia zoo heev daim ntawv thov.
Ib, epitaxial disk kev ua tau zoo: tag nrho qhov zoo
1. Ultra-siab tawg hluav taws xob teb: piv nrog cov khoom siv silicon tsoos, qhov tawg hluav taws xob ntawm silicon carbide yog ntau tshaj 10 zaug.Qhov no txhais tau hais tias nyob rau hauv tib lub voltage tej yam kev mob, cov khoom siv hluav taws xob siv silicon carbide epitaxial disks tuaj yeem tiv taus cov khoom siv hluav taws xob ntau dua, yog li tsim cov khoom siv hluav taws xob high-voltage, high-frequency, high-power electronic devices.
2. High-speed saturation ceev: lub saturation ceev ntawm silicon carbide yog ntau tshaj 2 npaug ntawm silicon.Kev khiav hauj lwm ntawm qhov kub thiab kub ceev, silicon carbide epitaxial disk ua tau zoo dua, uas ua rau muaj kev ruaj ntseg thiab kev ntseeg siab ntawm cov khoom siv hluav taws xob.
3. High efficiency thermal conductivity: lub thermal conductivity ntawm silicon carbide yog ntau tshaj 3 npaug ntawm silicon.Cov yam ntxwv no tso cai rau cov khoom siv hluav taws xob kom zoo dua cov cua sov thaum lub sijhawm ua haujlwm siab ua haujlwm, yog li tiv thaiv overheating thiab txhim kho cov cuab yeej kev nyab xeeb.
4. Kev ruaj ntseg tshuaj lom neeg zoo: nyob rau hauv qhov chaw huab cua xws li qhov kub thiab txias, kev kub siab thiab hluav taws xob muaj zog, kev ua haujlwm ntawm silicon carbide tseem ruaj khov zoo li ua ntej.Cov yam ntxwv no ua rau cov silicon carbide epitaxial disk kom muaj kev ua tau zoo nyob rau hauv lub ntsej muag ntawm qhov chaw nyuaj.
Cov txheej txheem tsim khoom: ua tib zoo carved
Cov txheej txheem tseem ceeb rau kev tsim SIC epitaxial disk suav nrog lub cev vapor deposition (PVD), tshuaj vapor deposition (CVD) thiab kev loj hlob ntawm epitaxial.Txhua yam ntawm cov txheej txheem no muaj nws tus yam ntxwv thiab yuav tsum muaj kev tswj xyuas meej ntawm ntau yam kev ntsuas kom ua tiav cov txiaj ntsig zoo tshaj plaws.
1. txheej txheem PVD: Los ntawm evaporation los yog sputtering thiab lwm txoj kev, SiC lub hom phiaj yog tso rau ntawm substrate los ua ib zaj duab xis.Cov zaj duab xis npaj los ntawm txoj kev no muaj siab purity thiab zoo crystallinity, tab sis qhov ntau lawm ceev kuj qeeb.
2. CVD txheej txheem: Los ntawm kev tawg ntawm silicon carbide qhov chaw roj ntawm qhov kub thiab txias, nws tau muab tso rau ntawm lub substrate los ua ib zaj duab xis nyias.Lub thickness thiab uniformity ntawm zaj duab xis npaj los ntawm txoj kev no yog tswj tau, tab sis lub purity thiab crystallinity yog pluag.
3. Epitaxial kev loj hlob: kev loj hlob ntawm SiC epitaxial txheej ntawm monocrystalline silicon los yog lwm yam ntaub ntawv monocrystalline los ntawm chemical vapor deposition method.Cov txheej txheem epitaxial npaj los ntawm txoj kev no muaj kev sib txuam zoo thiab kev ua haujlwm zoo nrog cov khoom siv substrate, tab sis tus nqi kuj yog siab heev.
三 、 Daim ntawv thov kev cia siab: Teeb lub neej yav tom ntej
Nrog rau kev txhim kho txuas ntxiv ntawm lub zog hluav taws xob thev naus laus zis thiab kev xav tau ntau ntxiv rau kev ua haujlwm siab thiab kev ntseeg siab ntawm cov khoom siv hluav taws xob, silicon carbide epitaxial disk muaj cov ntawv thov dav dav hauv cov khoom siv hluav taws xob semiconductor.Nws yog dav siv nyob rau hauv kev tsim cov high-frequency high-power semiconductor li, xws li lub hwj chim hluav taws xob keyboards, inverters, rectifiers, thiab lwm yam. Tsis tas li ntawd, nws kuj yog lug siv nyob rau hauv lub hnub ci hlwb, LED thiab lwm yam teb.
Nrog nws cov kev ua tau zoo tshwj xeeb thiab kev txhim kho txuas ntxiv ntawm cov txheej txheem tsim khoom, silicon carbide epitaxial disk maj mam qhia nws lub peev xwm loj hauv cov khoom siv hluav taws xob.Peb muaj laj thawj ntseeg tias yav tom ntej ntawm kev tshawb fawb thiab thev naus laus zis, nws yuav ua lub luag haujlwm tseem ceeb dua.
Post lub sij hawm: Nov-28-2023