Pua pua txheej txheem yuav tsum tig ibwafernyob rau hauv ib tug semiconductor. Ib qho ntawm cov txheej txheem tseem ceeb tshaj plaws yogetching- uas yog, carving zoo Circuit Court qauv ntawm lubwafer. Kev vam meej ntawm covetchingtxheej txheem nyob ntawm kev tswj ntau yam sib txawv nyob rau hauv ib qho kev faib tawm ntau yam, thiab txhua yam khoom siv etching yuav tsum tau npaj los ua haujlwm nyob rau hauv kev pom zoo. Peb etching txheej txheem engineers siv superb manufacturing technology los ua kom tiav cov txheej txheem ntxaws.
SK Hynix News Center tau xam phaj cov tswv cuab ntawm Icheon DRAM Front Etch, Middle Etch, thiab End Etch technical teams kom paub ntau ntxiv txog lawv txoj haujlwm.
Etch: Ib Txoj Kev Mus Rau Kev Txhim Kho Kev Txhim Kho
Hauv kev tsim khoom semiconductor, etching yog hais txog carving qauv ntawm nyias zaj duab xis. Cov qauv yog txau siv plasma los ua cov txheej txheem kawg ntawm txhua kauj ruam txheej txheem. Nws lub hom phiaj tseem ceeb yog kom nthuav tawm cov qauv meej raws li cov qauv tsim thiab tswj xyuas cov txiaj ntsig zoo nyob rau hauv txhua yam kev mob.
Yog hais tias muaj teeb meem tshwm sim nyob rau hauv lub deposition los yog photolithography txheej txheem, lawv yuav daws tau los ntawm xaiv etching (Etch) technology. Txawm li cas los xij, yog tias muaj qee yam tsis raug thaum lub sijhawm etching, qhov xwm txheej tsis tuaj yeem thim rov qab. Qhov no yog vim cov khoom qub tsis tuaj yeem sau rau hauv cheeb tsam engraved. Yog li ntawd, nyob rau hauv cov txheej txheem tsim khoom semiconductor, etching yog qhov tseem ceeb los txiav txim siab tag nrho cov txiaj ntsig thiab cov khoom zoo.
Cov txheej txheem etching suav nrog yim kauj ruam: ISO, BG, BLC, GBL, SNC, M0, SN thiab MLM.
Ua ntej, ISO (Isolation) theem etches (Etch) silicon (Si) ntawm lub wafer los tsim lub active cell cheeb tsam. BG (Buried Gate) theem ua kab nyob kab (Lord Kab) 1 thiab lub rooj vag los tsim ib qho hluav taws xob channel. Tom ntej no, BLC (Bit Line Contact) theem tsim kev sib txuas ntawm ISO thiab kab nyob kab (Ntsis Kab) 2 hauv cheeb tsam ntawm tes. Lub GBL (Peri Gate + Cell Bit Kab) theem yuav ib txhij tsim cov kab ke ntawm tes thiab lub rooj vag nyob rau hauv periphery 3.
SNC (Storage Node Contract) theem txuas ntxiv los tsim kev sib txuas ntawm thaj chaw nquag thiab chaw cia khoom 4. Tom qab ntawd, M0 (Metal0) theem tsim cov ntsiab lus txuas ntawm peripheral S/D (Storage Node) 5 thiab cov ntsiab lus txuas. nruab nrab ntawm kab chaw nyob kab thiab qhov chaw cia khoom. SN (Storage Node) theem lees paub lub peev xwm ntawm chav tsev, thiab tom qab MLM (Multi Layer Metal) theem tsim cov khoom siv hluav taws xob sab nraud thiab cov xaim sab hauv, thiab tag nrho cov txheej txheem etching (Etch) engineering tiav.
Muab hais tias etching (Etch) cov kws tshaj lij feem ntau yog lub luag haujlwm rau cov qauv ntawm cov khoom siv semiconductors, DRAM chav haujlwm tau muab faib ua peb pawg: Pem hauv ntej Etch (ISO, BG, BLC); Middle Etch (GBL, SNC, M0); End Etch (SN, MLM). Cov pab pawg no kuj tau muab faib raws li kev tsim khoom thiab cov khoom siv.
Manufacturing txoj haujlwm yog lub luag haujlwm rau kev tswj hwm thiab txhim kho cov txheej txheem tsim khoom. Kev tsim cov haujlwm ua lub luag haujlwm tseem ceeb hauv kev txhim kho cov txiaj ntsig thiab cov khoom lag luam zoo los ntawm kev tswj hwm qhov sib txawv thiab lwm yam kev ntsuas kev tsim khoom.
Cov cuab yeej ua haujlwm yog lub luag haujlwm rau kev tswj hwm thiab ntxiv dag zog cov cuab yeej tsim khoom kom tsis txhob muaj teeb meem uas yuav tshwm sim thaum txheej txheem etching. Lub luag haujlwm tseem ceeb ntawm cov khoom siv ua haujlwm yog los xyuas kom meej qhov ua tau zoo ntawm cov khoom siv.
Txawm hais tias lub luag haujlwm yog qhov tseeb, txhua pab pawg ua haujlwm rau lub hom phiaj sib koom - uas yog, tswj hwm thiab txhim kho cov txheej txheem tsim khoom thiab cov khoom siv cuam tshuam los txhim kho kev tsim khoom. Txog qhov kawg no, txhua pab pawg tau koom tes nrog lawv cov kev ua tiav thiab thaj chaw rau kev txhim kho, thiab koom tes los txhim kho kev ua lag luam.
Yuav ua li cas tiv nrog cov teeb meem ntawm miniaturization technology
SK Hynix pib ntau lawm ntawm 8Gb LPDDR4 DRAM cov khoom rau 10nm (1a) cov txheej txheem hauv lub Xya Hli 2021.
Semiconductor nco Circuit Court qauv tau nkag mus rau 10nm era, thiab tom qab kev txhim kho, ib qho DRAM tuaj yeem ua tau li 10,000 lub hlwb. Yog li ntawd, txawm nyob rau hauv cov txheej txheem etching, cov txheej txheem margin tsis txaus.
Yog tias lub qhov tsim (Qhov) 6 me dhau, nws yuav tshwm sim "tsis qhib" thiab thaiv qhov qis ntawm cov nti. Tsis tas li ntawd, yog tias lub qhov tsim loj dhau lawm, "bridging" yuav tshwm sim. Thaum qhov sib txawv ntawm ob lub qhov tsis txaus, "bridging" tshwm sim, ua rau muaj teeb meem ntawm kev sib nrig sib adhesion hauv cov kauj ruam tom ntej. Raws li cov khoom siv hluav taws xob ua kom zoo dua qub, qhov ntau ntawm qhov loj qhov tseem ceeb yog maj mam txo qis, thiab cov kev pheej hmoo no yuav maj mam tshem tawm.
Txhawm rau daws cov teeb meem saum toj no, etching cov kws tshaj lij thev naus laus zis txuas ntxiv txhim kho cov txheej txheem, suav nrog kev hloov kho cov txheej txheem daim ntawv qhia thiab APC7 algorithm, thiab qhia txog cov thev naus laus zis tshiab xws li ADCC8 thiab LSR9.
Raws li cov neeg siv khoom xav tau dhau los ua ntau haiv neeg, lwm qhov kev sib tw tau tshwm sim - qhov sib txawv ntawm ntau cov khoom lag luam. Txhawm rau ua kom tau raws li cov neeg siv khoom xav tau, cov txheej txheem ua kom zoo rau txhua yam khoom yuav tsum tau teem caij sib cais. Qhov no yog ib qho kev sib tw tshwj xeeb heev rau cov engineers vim tias lawv yuav tsum ua kom cov tshuab ntau lawm ua tau raws li cov kev xav tau ntawm ob qho tib si tsim thiab muaj ntau yam kev mob.
Txog qhov kawg no, Etch engineers tau qhia txog "APC offset" 10 thev naus laus zis los tswj ntau yam khoom siv raws li cov khoom tseem ceeb (Core Products), thiab tsim thiab siv "T-index system" los tswj ntau yam khoom. Los ntawm cov kev siv zog no, lub kaw lus tau raug txhim kho tsis tu ncua kom ua tau raws li qhov xav tau ntawm ntau cov khoom tsim tawm.
Post lub sij hawm: Lub Xya hli ntuj-16-2024