Cov txheej txheem kev loj hlob siv lead ua nyob hauv plawv ntawm semiconductor fabrication, qhov chaw tsim khoom ntawm cov wafers zoo yog qhov tseem ceeb. Ib qho tseem ceeb ntawm cov txheej txheem no yog qhovsilicon carbide (SiC) wafer nkoj. SiC wafer nkoj tau txais kev lees paub tseem ceeb hauv kev lag luam vim lawv qhov kev ua tau zoo tshwj xeeb thiab kev ntseeg tau. Hauv tsab xov xwm no, peb yuav tshawb txog cov cwj pwm zoo kawg nkaus ntawmSiC wafer nkojthiab lawv lub luag haujlwm hauv kev txhawb nqa kev loj hlob siv lead ua hauv kev tsim khoom semiconductor.
SiC wafer nkojyog tsim tshwj xeeb los tuav thiab thauj khoom semiconductor wafers thaum muaj ntau theem ntawm kev loj hlob siv lead ua. Raws li cov khoom siv, silicon carbide muaj kev sib xyaw tshwj xeeb ntawm cov khoom tsim nyog uas ua rau nws yog qhov kev xaiv zoo tshaj plaws rau cov nkoj wafer. Ua ntej thiab foremost yog nws zoo heev mechanical zog thiab high-temperature stability. SiC boasts zoo heev hardness thiab rigidity, tso cai rau nws tiv taus cov huab cua puag thaum lub sij hawm siv lead ua kev loj hlob txheej txheem.
Ib qho txiaj ntsig tseem ceeb ntawmSiC wafer nkojyog lawv qhov tshwj xeeb thermal conductivity. Thaum tshav kub kub dissipation yog ib qho tseem ceeb hauv kev loj hlob siv lead ua, vim nws cuam tshuam qhov kub thiab txias sib xws thiab tiv thaiv thermal stress ntawm wafers. SiC's high thermal conductivity ua kom yooj yim hloov hluav taws xob zoo, ua kom muaj qhov kub thiab txias sib xws thoob plaws lub wafers. Cov yam ntxwv no tshwj xeeb tshaj yog muaj txiaj ntsig zoo hauv cov txheej txheem xws li kev loj hlob ntawm epitaxial, qhov kev tswj qhov kub thiab txias yog qhov tseem ceeb rau kev ua tiav cov yeeb yaj kiab zoo ib yam.
Tsis tas li ntawd,SiC wafer nkojpom zoo heev chemical inertness. Lawv tiv taus ntau yam tshuaj corrosive thiab gases feem ntau siv hauv kev tsim khoom semiconductor. Qhov tshuaj lom neeg ruaj khov no ua kom ntseeg tau tiasSiC wafer nkojtswj lawv txoj kev ncaj ncees thiab kev ua tau zoo tshaj qhov kev raug mob ntev rau cov txheej txheem hnyav. tiv thaiv tshuaj tua kab mob tiv thaiv kev sib kis thiab cov khoom siv degradation, tiv thaiv qhov zoo ntawm cov wafers loj hlob.
Qhov kev ruaj ntseg ntawm SiC wafer nkoj yog lwm qhov tseem ceeb. Lawv tau tsim los tswj lawv cov duab thiab daim ntawv txawm tias nyob rau hauv qhov kub thiab txias, kom ntseeg tau qhov tseeb ntawm qhov wafers thaum lub sij hawm siv lead ua loj hlob. Qhov kev ruaj ntseg ntawm qhov seem yuav txo qis qhov deformation lossis warping ntawm lub nkoj, uas tuaj yeem ua rau misalignment lossis kev loj hlob tsis zoo nyob thoob plaws lub wafers. Qhov kev qhia meej no yog qhov tseem ceeb rau kev ua tiav qhov xav tau crystallographic orientation thiab uniformity hauv cov khoom siv semiconductor.
SiC wafer nkoj kuj muaj cov khoom hluav taws xob zoo heev. Silicon carbide yog cov khoom siv hluav taws xob semiconductor nws tus kheej, tus cwj pwm los ntawm nws qhov dav bandgap thiab siab tawg voltage. Cov khoom siv hluav taws xob hauv lub cev ntawm SiC ua kom muaj hluav taws xob tsawg tsawg thiab cuam tshuam thaum lub sij hawm siv lead ua kev loj hlob. Qhov no yog qhov tseem ceeb tshwj xeeb tshaj yog thaum loj hlob cov khoom siv hluav taws xob loj lossis ua haujlwm nrog cov khoom siv hluav taws xob rhiab heev, vim nws pab tswj kev ncaj ncees ntawm cov khoom siv semiconductor raug tsim.
Tsis tas li ntawd, SiC wafer nkoj tau paub txog lawv lub neej ntev thiab rov siv tau dua. Lawv muaj lub neej ua haujlwm ntev, nrog rau kev muaj peev xwm tiv taus ntau yam kev loj hlob siv lead ua yam tsis muaj kev puas tsuaj loj. Qhov no durability txhais mus rau hauv tus nqi-zoo thiab txo qhov kev xav tau ntawm kev hloov ntau zaus. Kev rov siv dua ntawm SiC wafer nkoj tsis yog tsuas yog pab txhawb kev tsim khoom lag luam, tab sis kuj ua kom muaj kev ua tau zoo thiab kev ntseeg siab hauv cov txheej txheem siv lead ua.
Hauv kev xaus, SiC wafer nkoj tau dhau los ua ib qho tseem ceeb hauv kev loj hlob siv lead ua rau kev tsim khoom semiconductor. Lawv lub zog tshwj xeeb ntawm kev siv tshuab, kev kub siab ruaj khov, thermal conductivity, tshuaj inertness, qhov ruaj khov, thiab cov khoom hluav taws xob ua rau lawv xav tau zoo hauv kev txhim kho cov txheej txheem siv lead ua. SiC wafer tej nkoj nquam xyuas kom muaj qhov sib txawv ntawm qhov kub thiab txias, tiv thaiv kev sib kis, thiab ua kom muaj qhov tseeb ntawm wafers, thaum kawg ua rau kev tsim cov khoom siv hluav taws xob zoo. Raws li qhov kev thov rau cov khoom siv semiconductor tau nce ntxiv, qhov tseem ceeb ntawm SiC wafer nkoj hauv kev ua tiav kev pom kev loj hlob siv lead ua tsis tuaj yeem overstated.
Post lub sij hawm: Apr-08-2024