Dab tsi yog epitaxy?

Feem ntau cov engineers tsis paub txogepitaxy, uas plays lub luag haujlwm tseem ceeb hauv kev tsim khoom siv hluav taws xob semiconductor.Epitaxytuaj yeem siv rau hauv cov khoom sib txawv nti, thiab cov khoom sib txawv muaj ntau hom epitaxy, suav nrogYog epitaxy, SiC epitaxy, GaN epitaxy, lwm.

Dab tsi yog epitaxy?
Epitaxy feem ntau hu ua "Epitaxy" hauv lus Askiv. Lo lus los ntawm Greek lo lus "epi" (lub ntsiab lus "saum toj") thiab "taxis" (lub ntsiab lus "kev npaj"). Raws li lub npe qhia, nws txhais tau hais tias npaj kom zoo zoo rau saum ib qho khoom. Cov txheej txheem epitaxy yog tso ib txheej nyias nyias txheej rau ntawm ib qho siv lead ua substrate. Cov txheej txheem tshiab no tso rau ib leeg siv lead ua hu ua epitaxial txheej.

Muaj ob hom epitaxy: homoepitaxial thiab heteroepitaxial. Homoepitaxial hais txog kev loj hlob tib yam khoom ntawm tib hom substrate. Lub epitaxial txheej thiab substrate muaj raws nraim tib lub lattice qauv. Heteroepitaxy yog kev loj hlob ntawm lwm yam khoom ntawm ib qho substrate ntawm ib yam khoom. Nyob rau hauv cov ntaub ntawv no, lub lattice qauv ntawm epitaxially zus crystal txheej thiab lub substrate tej zaum yuav txawv. Dab tsi yog ib qho crystals thiab polycrystalline?
Hauv semiconductors, peb feem ntau hnov ​​​​cov lus ib leeg siv lead ua silicon thiab polycrystalline silicon. Vim li cas qee cov silicon hu ua ib qho crystals thiab qee qhov silicon hu ua polycrystalline?

Ib leeg siv lead ua: Lub lattice kev npaj yog tas mus li thiab tsis hloov, tsis muaj ib thaj tsam ntawm grain, uas yog, tag nrho cov siv lead ua yog tsim los ntawm ib tug tib lattice nrog zoo ib yam siv lead ua orientation. Polycrystalline: Polycrystalline yog tsim los ntawm ntau cov nplej me me, txhua tus yog ib qho siv lead ua, thiab lawv cov kev taw qhia yog random nrog kev hwm rau ib leeg. Cov nplej no yog cais los ntawm cov ciam teb. Tus nqi tsim khoom ntawm cov ntaub ntawv polycrystalline yog qis dua li ntawm ib qho siv lead ua, yog li lawv tseem muaj txiaj ntsig zoo hauv qee daim ntawv thov. Cov txheej txheem epitaxial yuav koom nrog qhov twg?
Hauv kev tsim cov silicon-based integrated circuits, cov txheej txheem epitaxial yog dav siv. Piv txwv li, silicon epitaxy yog siv los loj hlob ib tug ntshiab thiab finely tswj silicon txheej ntawm silicon substrate, uas yog ib qho tseem ceeb heev rau kev tsim khoom ntawm advanced integrated circuits. Tsis tas li ntawd, hauv cov khoom siv hluav taws xob, SiC thiab GaN yog ob feem ntau siv cov khoom siv bandgap semiconductor uas muaj peev xwm tuav tau zoo heev. Cov ntaub ntawv no feem ntau yog cog rau ntawm silicon lossis lwm cov substrates los ntawm epitaxy. Hauv kev sib txuas lus quantum, semiconductor-based quantum khoom feem ntau siv silicon germanium epitaxial qauv. Lwm yam

Txoj kev loj hlob epitaxial?

Peb feem ntau siv semiconductor epitaxy txoj kev:

Molecular beam epitaxy (MBE): Molecular beam epitaxy) yog ib qho semiconductor epitaxial kev loj hlob technology ua nyob rau hauv ultra-high lub tshuab nqus tsev. Hauv cov thev naus laus zis no, cov khoom siv yog evaporated nyob rau hauv daim ntawv ntawm atoms lossis molecular beams thiab tom qab ntawd tso rau ntawm crystalline substrate. MBE yog ib qho yooj yim heev thiab tswj tau semiconductor nyias zaj duab xis loj hlob tshuab uas tuaj yeem tswj cov tuab ntawm cov khoom tso rau ntawm qib atomic.

Hlau organic CVD (MOCVD): Nyob rau hauv cov txheej txheem MOCVD, cov organic hlau thiab hydride gases uas muaj cov ntsiab lus yuav tsum tau muab nkag rau hauv lub substrate ntawm qhov kub thiab txias, thiab cov khoom siv semiconductor yuav tsum tau tsim los ntawm cov tshuaj tiv thaiv thiab tso rau ntawm lub substrate, thaum seem cov khoom sib xyaw thiab cov khoom siv tshuaj tiv thaiv raug tso tawm.

Vapor Phase Epitaxy (VPE): Vapor Phase Epitaxy yog cov cuab yeej tseem ceeb uas feem ntau siv los tsim cov khoom siv semiconductor. Nws lub hauv paus ntsiab lus tseem ceeb yog thauj cov vapor ntawm ib yam khoom lossis cov khoom sib txuas hauv cov pa roj carbon monoxide thiab tso cov crystals rau ntawm lub substrate los ntawm cov tshuaj tiv thaiv.