Peb lub tuam txhab muabSiC txheejtxheej txheem kev pab cuam nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv los ntawm CVD txoj kev, kom tshwj xeeb gases uas muaj cov pa roj carbon thiab silicon react ntawm kub kom tau high-purity Sic molecules, uas yuav muab tso rau saum npoo ntawm cov ntaub ntawv coated los tsim ib tugSiC tiv thaiv txheejrau epitaxy chim hom hy pnotic.
Cov yam ntxwv tseem ceeb:
1.High purity SiC coated graphite
2. Superior tshav kub tsis kam & thermal uniformity
3. ZooSiC siv lead ua coatedrau ib tug du nto
4. High durability tiv thaiv tshuaj ntxuav
Main Specifications ntawmCVD-SIC txheej
| SiC-CVD Properties | ||
| Crystal Structure | FCC β theem | |
| Qhov ntom | g / cm³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Loj Loj | ib m | 2 ~ 10 |
| Tshuaj Purity | % | 99.999 5 |
| Thaum tshav kub kub muaj peev xwm | J·kg-1 · K-1 | 640 |
| Sublimation kub | ℃ | 2700 ib |
| Felexural zog | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt khoov, 1300 ℃) | 430 |
| Thermal Expansion (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W / mK) | 300 |
