Semiceraqhia covSemiconductor Cassette, yog ib qho cuab yeej tseem ceeb rau kev ruaj ntseg thiab ua haujlwm zoo ntawm wafers thoob plaws hauv cov txheej txheem tsim khoom semiconductor. Engineered nrog siab precision, lub cassette no xyuas kom meej tias koj wafers muaj kev nyab xeeb khaws cia thiab thauj, tswj lawv kev ncaj ncees ntawm txhua theem.
Superior Protection thiab DurabilityCovSemiconductor Cassettelos ntawm Semicera yog tsim los muab kev tiv thaiv siab tshaj plaws rau koj cov wafers. Tsim los ntawm cov ntaub ntawv muaj zog, tsis muaj paug-tiv taus, nws tiv thaiv koj cov wafers los ntawm kev puas tsuaj thiab kev sib kis, ua rau nws yog qhov kev xaiv zoo tshaj plaws rau qhov chaw huv huv. Lub cassette tus qauv tsim kom txo qis cov khoom tsim thiab ua kom cov wafers nyob twj ywm tsis txhob kov thiab ruaj ntseg thaum tuav thiab kev thauj mus los.
Txhim khu kev tsim qauv rau kev ua tau zoo tshaj plawsSemicera covSemiconductor Cassettenta ib tug meticulously engineered tsim uas muab meej wafer sib dhos, txo qhov kev pheej hmoo ntawm misalignment thiab mechanical puas. Lub cassette lub slots yog zoo kawg nkaus spaced los tuav txhua wafer kom ruaj ntseg, tiv thaiv tej kev txav uas yuav ua rau khawb los yog lwm yam imperfections.
Versatility thiab CompatibilityCovSemiconductor Cassetteyog ntau yam thiab sib xws nrog ntau qhov ntau thiab tsawg wafer, ua rau nws haum rau ntau theem ntawm semiconductor fabrication. Txawm hais tias koj tab tom ua haujlwm nrog tus qauv lossis kev cai wafer qhov ntev, lub cassette no yoog raws li koj xav tau, muab kev yooj yim hauv koj cov txheej txheem tsim khoom.
Streamlined tuav thiab EfficiencyTsim nrog tus neeg siv hauv siab, lubSemicera Semiconductor Cassetteyog lub teeb yuag thiab yooj yim los tuav, tso cai rau kev thauj khoom sai thiab ua haujlwm tau zoo. Qhov no ergonomic tsim tsis tsuas yog txuag lub sijhawm tab sis kuj txo cov kev pheej hmoo ntawm tib neeg kev ua yuam kev, ua kom muaj kev ua haujlwm zoo hauv koj qhov chaw.
Raws li kev lag luam StandardsSemicera xyuas kom meej tias covSemiconductor Cassetteua tau raws li cov qauv kev lag luam siab tshaj plaws rau kev ua tau zoo thiab kev ntseeg siab. Txhua lub cassette raug kuaj nruj kom lav tias nws ua tau raws li qhov xav tau ntawm kev tsim khoom semiconductor. Qhov kev mob siab rau qhov ua tau zoo ua kom ntseeg tau tias koj cov wafers yeej ib txwm muaj kev tiv thaiv, tswj cov qauv siab uas yuav tsum tau ua hauv kev lag luam.
| Cov khoom | Ntau lawm | Kev tshawb fawb | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Deg orientation yuam kev | 11-20 > 4 ± 0.15 ° | ||
| Hluav taws xob Parameters | |||
| Dopant | n-hom Nitrogen | ||
| Kev tiv thaiv | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Txoj kab uas hla | 150.0 ± 0.2 hli | ||
| Thickness | 350 ± 25 hli | ||
| Lub hauv paus tiaj tus taw qhia | [1-100] ± 5° | ||
| Thawj lub tiaj tiaj ntev | 47.5 ± 1.5 hli | ||
| Secondary flat | Tsis muaj | ||
| TTV | ≤ 5 hli | ≤10 hli | ≤ 15 hli |
| LTV | ≤ 3 μm (5mm * 5mm) | ≤ 5 μm (5mm * 5mm) | ≤ 10 μm (5mm * 5mm) |
| Hneev | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤ 35 hli | ≤ 45 hli | ≤ 55 hli |
| Pem hauv ntej (Si-face) roughness (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Qauv | |||
| Micropipe ceev | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Hlau impurities | ≤5E10 atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Pem hauv ntej zoo | |||
| Pem hauv ntej | Si | ||
| Nto tiav | Lub ntsej muag CMP | ||
| Cov khoom | ≤60ea / wafer (qhov loj ≥0.3μm) | NA | |
| Kos | ≤5ea / hli Kev sib sau ntev ≤ Diameter | Qhov ntev ≤2 * Txoj kab uas hla | NA |
| Txiv kab ntxwv tev / pits / stains / striations / tawg / paug | Tsis muaj | NA | |
| Ntug chips / indents / tawg / hex daim hlau | Tsis muaj | ||
| Polytype cheeb tsam | Tsis muaj | Thaj tsam ≤ 20% | Thaj tsam ≤ 30% |
| Pem hauv ntej laser npav | Tsis muaj | ||
| Back Quality | |||
| Rov qab ua tiav | C-ntsej muag CMP | ||
| Kos | ≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla | NA | |
| Back defects (ntug chips / indents) | Tsis muaj | ||
| Rov qab roughness | Ra≤0.2nm (5μm * 5μm) | ||
| Rov qab laser npav | 1mm (los ntawm sab saum toj ntug) | ||
| Ntug | |||
| Ntug | Chamfer | ||
| Ntim | |||
| Ntim | Epi-npaj nrog lub tshuab nqus tsev ntim Multi-wafer cassette ntim | ||
| * Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD. | |||
