SiC Txheej Graphite Wafer Susceptor

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Semicera Semiconductor's SiC Txheej Graphite Wafer Susceptor muab kev ua haujlwm zoo dua thermal thiab ua haujlwm ntev rau kev ua wafer. Cia siab rau Semicera rau qib siab SiC-coated susceptors tsim los txhim kho kev ua tau zoo thiab kev ntseeg siab hauv kev siv semiconductor.

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Semicorex's SiC Wafer Susceptors rau MOCVD (Metal-Organic Chemical Vapor Deposition) yog tsim los ua kom tau raws li qhov xav tau ntawm cov txheej txheem epitaxial deposition. Siv cov khoom zoo Silicon Carbide (SiC), cov susceptors no muaj qhov tsis sib xws ntawm kev ua haujlwm ntev thiab kev ua haujlwm hauv qhov kub thiab txias, ua kom muaj kev loj hlob ntawm cov khoom siv semiconductor.

Cov yam ntxwv tseem ceeb:

1. Cov khoom siv zoo tshaj plawsTsim los ntawm qib siab SiC, peb cov wafer susceptors muaj qhov tshwj xeeb thermal conductivity thiab tshuaj tiv thaiv. Cov khoom no ua rau lawv tuaj yeem tiv taus cov xwm txheej huab cua ntawm MOCVD cov txheej txheem, suav nrog qhov kub thiab txias thiab cov roj corrosive, ua kom lub neej ntev thiab txhim khu kev qha.

2. Precision hauv Epitaxial DepositionQhov tseeb engineering ntawm peb SiC Wafer Susceptors xyuas kom meej qhov kub thiab txias faib thoob plaws wafer nto, ua kom zoo ib yam thiab zoo epitaxial txheej loj hlob. Qhov no precision yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob nrog cov khoom siv hluav taws xob zoo.

3. Txhim khu kev ruaj ntsegCov khoom siv SiC muaj zog muab kev tiv thaiv zoo heev rau hnav thiab degradation, txawm tias nyob rau hauv kev cuam tshuam tsis tu ncua rau cov txheej txheem hnyav. Qhov kev ua haujlwm ntev no txo qhov zaus ntawm kev hloov pauv susceptor, txo qis qis qis thiab cov nqi ua haujlwm.