Semicera covSilicon Carbide Epitaxyyog engineered kom tau raws li cov kev xav tau ntawm niaj hnub semiconductor daim ntaub ntawv. Los ntawm kev siv cov txheej txheem kev loj hlob ntawm epitaxial siab, peb xyuas kom meej tias txhua txheej silicon carbide nthuav tawm tshwj xeeb crystalline zoo, sib xws, thiab qhov tsis xws luag tsawg. Cov yam ntxwv no yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob ua haujlwm siab, qhov kev ua tau zoo thiab kev tswj xyuas thermal yog qhov tseem ceeb.
CovSilicon Carbide Epitaxytxheej txheem ntawm Semicera yog optimized los tsim epitaxial khaubncaws sab nraud povtseg nrog meej thickness thiab doping tswj, kom ntseeg tau zoo ib yam ntawm cov khoom siv. Qib no ntawm qhov tseeb yog qhov tseem ceeb rau kev siv hauv tsheb hluav taws xob, kev siv hluav taws xob txuas ntxiv mus, thiab kev sib txuas lus siab, qhov kev ntseeg siab thiab kev ua haujlwm tseem ceeb.
Ntxiv mus, Semicera'sSilicon Carbide Epitaxymuab kev txhim kho thermal conductivity thiab siab dua qhov hluav taws xob tawg, ua rau nws qhov kev xaiv zoo tshaj plaws rau cov khoom siv uas ua haujlwm nyob rau hauv huab cua txias. Cov khoom no ua rau cov cuab yeej siv tau ntev dua thiab txhim kho kev ua haujlwm tag nrho, tshwj xeeb tshaj yog nyob rau hauv high-power thiab high-temperature ib puag ncig.
Semicera kuj tseem muab cov kev xaiv customization rauSilicon Carbide Epitaxy, tso cai rau cov kev daws teeb meem uas ua tau raws li cov khoom siv tshwj xeeb. Txawm hais tias kev tshawb fawb lossis kev tsim khoom loj, peb cov txheej txheem epitaxial yog tsim los txhawb cov tiam tom ntej ntawm cov khoom siv hluav taws xob semiconductor, ua kom muaj kev loj hlob ntawm cov khoom siv hluav taws xob muaj zog, muaj txiaj ntsig, thiab txhim khu kev qha.
Los ntawm kev sib koom ua ke cov cuab yeej siv thev naus laus zis thiab cov txheej txheem tswj hwm nruj, Semicera xyuas kom meej tias pebSilicon Carbide Epitaxycov khoom tsis yog tsuas yog ua tau raws li tab sis tshaj cov qauv kev lag luam. Qhov kev cog lus rau kev ua tau zoo no ua rau peb cov txheej txheem epitaxial yog lub hauv paus zoo tshaj plaws rau kev siv semiconductor siab heev, paving txoj hauv kev rau kev tawg hauv hluav taws xob hluav taws xob thiab optoelectronics.
| Cov khoom | Ntau lawm | Kev tshawb fawb | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Deg orientation yuam kev | 11-20 > 4 ± 0.15 ° | ||
| Hluav taws xob Parameters | |||
| Dopant | n-hom Nitrogen | ||
| Kev tiv thaiv | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Txoj kab uas hla | 150.0 ± 0.2 hli | ||
| Thickness | 350 ± 25 hli | ||
| Thawj qhov chaw tiaj tiaj | [1-100] ± 5° | ||
| Thawj lub tiaj tiaj ntev | 47.5 ± 1.5 hli | ||
| Secondary flat | Tsis muaj | ||
| TTV | ≤ 5 hli | ≤10 hli | ≤ 15 hli |
| LTV | ≤ 3 μm (5mm * 5mm) | ≤ 5 μm (5mm * 5mm) | ≤ 10 μm (5mm * 5mm) |
| Hneev | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤ 35 hli | ≤ 45 hli | ≤ 55 hli |
| Pem hauv ntej (Si-face) roughness (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Qauv | |||
| Micropipe ceev | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Hlau impurities | ≤5E10 atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Pem hauv ntej zoo | |||
| Pem hauv ntej | Si | ||
| Nto tiav | Lub ntsej muag CMP | ||
| Cov khoom | ≤60ea / wafer (qhov loj ≥0.3μm) | NA | |
| Kos | ≤5ea / hli Kev sib sau ntev ≤ Diameter | Qhov ntev ≤2 * Txoj kab uas hla | NA |
| Txiv kab ntxwv tev / pits / stains / striations / tawg / paug | Tsis muaj | NA | |
| Ntug chips / indents / tawg / hex daim hlau | Tsis muaj | ||
| Polytype cheeb tsam | Tsis muaj | Thaj tsam ≤ 20% | Thaj tsam ≤ 30% |
| Pem hauv ntej laser npav | Tsis muaj | ||
| Back Quality | |||
| Rov qab ua tiav | C-ntsej muag CMP | ||
| Kos | ≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla | NA | |
| Back defects (ntug chips / indents) | Tsis muaj | ||
| Rov qab roughness | Ra≤0.2nm (5μm * 5μm) | ||
| Rov qab laser npav | 1mm (los ntawm sab saum toj ntug) | ||
| Ntug | |||
| Ntug | Chamfer | ||
| Ntim | |||
| Ntim | Epi-npaj nrog lub tshuab nqus tsev ntim Multi-wafer cassette ntim | ||
| * Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD. | |||
