Silicon Film los ntawm Semicera yog cov khoom zoo, precision-engineered khoom tsim los ua kom tau raws li cov kev cai nruj ntawm kev lag luam semiconductor. Ua los ntawm cov ntshiab silicon, cov tshuaj nyias nyias no muab cov khoom zoo sib xws, siab purity, thiab tshwj xeeb hluav taws xob thiab thermal zog. Nws yog qhov zoo tagnrho rau kev siv ntau yam khoom siv semiconductor, suav nrog kev tsim cov Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, thiab Epi-Wafer. Semicera's Silicon Film ua kom ntseeg tau thiab ua haujlwm zoo ib yam, ua rau nws yog ib qho tseem ceeb ntawm cov khoom siv microelectronics.
Superior Quality thiab Performance for Semiconductor Manufacturing
Semicera's Silicon Film paub txog nws lub zog zoo heev, thermal stability siab, thiab cov nqi qis, tag nrho cov no yog qhov tseem ceeb hauv kev tsim cov khoom siv hluav taws xob zoo. Txawm hais tias siv hauv kev tsim khoom ntawm Gallium Oxide (Ga2O3), AlN Wafer, lossis Epi-Wafers, zaj duab xis muab lub hauv paus muaj zog rau cov yeeb yaj kiab nyias nyias thiab kev loj hlob ntawm epitaxial. Nws compatibility nrog rau lwm yam semiconductor substrates xws li SiC Substrate thiab SOI Wafers ua kom seamless kev koom ua ke rau cov txheej txheem tsim khoom uas twb muaj lawm, pab tswj kom muaj txiaj ntsig zoo thiab cov khoom zoo ib yam.
Cov ntawv thov hauv Kev Lag Luam Semiconductor
Hauv kev lag luam semiconductor, Semicera's Silicon Film tau siv ntau yam kev siv, los ntawm kev tsim cov Si Wafer thiab SOI Wafer mus rau kev siv tshwj xeeb tshaj plaws xws li SiN Substrate thiab Epi-Wafer creation. Lub siab purity thiab precision ntawm zaj duab xis no ua rau nws tseem ceeb nyob rau hauv zus tau tej cov advanced Cheebtsam siv nyob rau hauv txhua yam ntawm microprocessors thiab integrated circuits rau optoelectronic li.
Silicon Film plays lub luag haujlwm tseem ceeb hauv cov txheej txheem semiconductor xws li kev loj hlob ntawm epitaxial, wafer bonding, thiab nyias-film deposition. Nws cov khoom txhim khu kev qha yog tshwj xeeb tshaj yog muaj txiaj ntsig rau kev lag luam uas yuav tsum tau muaj kev tswj hwm ib puag ncig, xws li chav huv hauv semiconductor fabs. Tsis tas li ntawd, Silicon Film tuaj yeem muab tso ua ke rau hauv cov tshuab cassette kom ua tau zoo wafer tuav thiab thauj thaum lub sijhawm tsim khoom.
Ntev-ntev kev ntseeg siab thiab kev sib raug zoo
Ib qho txiaj ntsig tseem ceeb ntawm kev siv Semicera's Silicon Film yog nws txoj kev ntseeg tau ntev. Nrog nws zoo heev durability thiab zoo ib yam, cov zaj duab xis no muab ib tug dependable kev daws teeb meem rau high-volume ntau lawm puag ncig. Txawm hais tias nws tau siv nyob rau hauv high-precision semiconductor li lossis cov ntawv siv hluav taws xob siab heev, Semicera's Silicon Film ua kom cov tuam txhab tuaj yeem ua tiav kev ua haujlwm siab thiab kev ntseeg siab thoob plaws ntau yam khoom.
Vim li cas thiaj xaiv Semicera's Silicon Film?
Silicon Film los ntawm Semicera yog cov khoom siv tseem ceeb rau kev siv cov khoom siv hauv kev lag luam semiconductor. Nws cov khoom ua tau zoo, suav nrog kev ua kom zoo thermal stability, siab purity, thiab txhua yam muaj zog, ua rau nws yog qhov kev xaiv zoo tshaj plaws rau cov tuam txhab nrhiav kom ua tiav cov qauv siab tshaj plaws hauv kev tsim khoom semiconductor. Los ntawm Si Wafer thiab SiC Substrate rau zus tau tej cov Gallium Oxide Ga2O3 li, zaj duab xis no muab unmatched zoo thiab kev ua tau zoo.
Nrog Semicera's Silicon Film, koj tuaj yeem tso siab rau cov khoom lag luam uas ua tau raws li cov kev xav tau ntawm kev tsim khoom niaj hnub semiconductor, muab lub hauv paus txhim khu kev qha rau tiam tom ntej ntawm cov khoom siv hluav taws xob.
Cov khoom | Ntau lawm | Kev tshawb fawb | Dummy |
Crystal Parameters | |||
Polytype | 4H | ||
Deg orientation yuam kev | 11-20 > 4 ± 0.15 ° | ||
Hluav taws xob Parameters | |||
Dopant | n-hom Nitrogen | ||
Kev tiv thaiv | 0.015-0.025ohm · cm | ||
Mechanical Parameters | |||
Txoj kab uas hla | 150.0 ± 0.2 hli | ||
Thickness | 350 ± 25 hli | ||
Thawj qhov chaw tiaj tiaj | [1-100] ± 5° | ||
Thawj lub tiaj tiaj ntev | 47.5 ± 1.5 hli | ||
Secondary flat | Tsis muaj | ||
TTV | ≤ 5 hli | ≤10 hli | ≤ 15 hli |
LTV | ≤ 3 μm (5mm * 5mm) | ≤ 5 μm (5mm * 5mm) | ≤ 10 μm (5mm * 5mm) |
Hneev | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
Warp | ≤ 35 hli | ≤ 45 hli | ≤ 55 hli |
Pem hauv ntej (Si-face) roughness (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
Qauv | |||
Micropipe ceev | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
Hlau impurities | ≤5E10 atoms/cm2 | NA | |
BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
Pem hauv ntej zoo | |||
Pem hauv ntej | Si | ||
Nto tiav | Lub ntsej muag CMP | ||
Cov khoom | ≤60ea / wafer (qhov loj ≥0.3μm) | NA | |
Kos | ≤5ea / hli Kev sib sau ntev ≤ Diameter | Qhov ntev ≤2 * Txoj kab uas hla | NA |
Txiv kab ntxwv tev / pits / stains / striations / tawg / paug | Tsis muaj | NA | |
Ntug chips / indents / tawg / hex daim hlau | Tsis muaj | ||
Polytype cheeb tsam | Tsis muaj | Thaj tsam ≤ 20% | Thaj tsam ≤ 30% |
Pem hauv ntej laser npav | Tsis muaj | ||
Back Quality | |||
Rov qab ua tiav | C-ntsej muag CMP | ||
Kos | ≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla | NA | |
Back defects (ntug chips / indents) | Tsis muaj | ||
Rov qab roughness | Ra≤0.2nm (5μm * 5μm) | ||
Rov qab laser npav | 1mm (los ntawm sab saum toj ntug) | ||
Ntug | |||
Ntug | Chamfer | ||
Ntim | |||
Ntim | Epi-npaj nrog lub tshuab nqus tsev ntim Multi-wafer cassette ntim | ||
* Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD. |