Silicon Film

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Silicon Film los ntawm Semicera yog cov khoom siv ua haujlwm siab tsim los rau ntau yam kev siv qib siab hauv kev lag luam semiconductor thiab electronics. Ua los ntawm cov khoom siv zoo silicon, cov yeeb yaj kiab no muaj qhov tshwj xeeb zoo ib yam, thermal stability, thiab hluav taws xob, ua rau nws zoo tagnrho rau cov yeeb yaj kiab tso tawm, MEMS (Micro-Electro-Mechanical Systems), thiab semiconductor device fabrication.


Product Detail

Khoom cim npe

Silicon Film los ntawm Semicera yog cov khoom zoo, precision-engineered khoom tsim los ua kom tau raws li cov kev cai nruj ntawm kev lag luam semiconductor. Ua los ntawm cov ntshiab silicon, cov tshuaj nyias nyias no muab cov khoom zoo sib xws, siab purity, thiab tshwj xeeb hluav taws xob thiab thermal zog. Nws yog qhov zoo tagnrho rau kev siv ntau yam khoom siv semiconductor, suav nrog kev tsim cov Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, thiab Epi-Wafer. Semicera's Silicon Film ua kom ntseeg tau thiab ua haujlwm zoo ib yam, ua rau nws yog ib qho tseem ceeb ntawm cov khoom siv microelectronics.

Superior Quality thiab Performance for Semiconductor Manufacturing

Semicera's Silicon Film paub txog nws lub zog zoo heev, thermal stability siab, thiab cov nqi qis, tag nrho cov no yog qhov tseem ceeb hauv kev tsim cov khoom siv hluav taws xob zoo. Txawm hais tias siv hauv kev tsim khoom ntawm Gallium Oxide (Ga2O3), AlN Wafer, lossis Epi-Wafers, zaj duab xis muab lub hauv paus muaj zog rau cov yeeb yaj kiab nyias nyias thiab kev loj hlob ntawm epitaxial. Nws compatibility nrog rau lwm yam semiconductor substrates xws li SiC Substrate thiab SOI Wafers ua kom seamless kev koom ua ke rau cov txheej txheem tsim khoom uas twb muaj lawm, pab tswj kom muaj txiaj ntsig zoo thiab cov khoom zoo ib yam.

Cov ntawv thov hauv Kev Lag Luam Semiconductor

Hauv kev lag luam semiconductor, Semicera's Silicon Film tau siv ntau yam kev siv, los ntawm kev tsim cov Si Wafer thiab SOI Wafer mus rau kev siv tshwj xeeb tshaj plaws xws li SiN Substrate thiab Epi-Wafer creation. Lub siab purity thiab precision ntawm zaj duab xis no ua rau nws tseem ceeb nyob rau hauv zus tau tej cov advanced Cheebtsam siv nyob rau hauv txhua yam ntawm microprocessors thiab integrated circuits rau optoelectronic li.

Silicon Film plays lub luag haujlwm tseem ceeb hauv cov txheej txheem semiconductor xws li kev loj hlob ntawm epitaxial, wafer bonding, thiab nyias-film deposition. Nws cov khoom txhim khu kev qha yog tshwj xeeb tshaj yog muaj txiaj ntsig rau kev lag luam uas yuav tsum tau muaj kev tswj hwm ib puag ncig, xws li chav huv hauv semiconductor fabs. Tsis tas li ntawd, Silicon Film tuaj yeem muab tso ua ke rau hauv cov tshuab cassette kom ua tau zoo wafer tuav thiab thauj thaum lub sijhawm tsim khoom.

Ntev-ntev kev ntseeg siab thiab kev sib raug zoo

Ib qho txiaj ntsig tseem ceeb ntawm kev siv Semicera's Silicon Film yog nws txoj kev ntseeg tau ntev. Nrog nws zoo heev durability thiab zoo ib yam, cov zaj duab xis no muab ib tug dependable kev daws teeb meem rau high-volume ntau lawm puag ncig. Txawm hais tias nws tau siv nyob rau hauv high-precision semiconductor li lossis cov ntawv siv hluav taws xob siab heev, Semicera's Silicon Film ua kom cov tuam txhab tuaj yeem ua tiav kev ua haujlwm siab thiab kev ntseeg siab thoob plaws ntau yam khoom.

Vim li cas thiaj xaiv Semicera's Silicon Film?

Silicon Film los ntawm Semicera yog cov khoom siv tseem ceeb rau kev siv cov khoom siv hauv kev lag luam semiconductor. Nws cov khoom ua tau zoo, suav nrog kev ua kom zoo thermal stability, siab purity, thiab txhua yam muaj zog, ua rau nws yog qhov kev xaiv zoo tshaj plaws rau cov tuam txhab nrhiav kom ua tiav cov qauv siab tshaj plaws hauv kev tsim khoom semiconductor. Los ntawm Si Wafer thiab SiC Substrate rau zus tau tej cov Gallium Oxide Ga2O3 li, zaj duab xis no muab unmatched zoo thiab kev ua tau zoo.

Nrog Semicera's Silicon Film, koj tuaj yeem tso siab rau cov khoom lag luam uas ua tau raws li cov kev xav tau ntawm kev tsim khoom niaj hnub semiconductor, muab lub hauv paus txhim khu kev qha rau tiam tom ntej ntawm cov khoom siv hluav taws xob.

Cov khoom

Ntau lawm

Kev tshawb fawb

Dummy

Crystal Parameters

Polytype

4H

Deg orientation yuam kev

11-20 > 4 ± 0.15 °

Hluav taws xob Parameters

Dopant

n-hom Nitrogen

Kev tiv thaiv

0.015-0.025ohm · cm

Mechanical Parameters

Txoj kab uas hla

150.0 ± 0.2 hli

Thickness

350 ± 25 hli

Thawj qhov chaw tiaj tiaj

[1-100] ± 5°

Thawj lub tiaj tiaj ntev

47.5 ± 1.5 hli

Secondary flat

Tsis muaj

TTV

≤ 5 hli

≤10 hli

≤ 15 hli

LTV

≤ 3 μm (5mm * 5mm)

≤ 5 μm (5mm * 5mm)

≤ 10 μm (5mm * 5mm)

Hneev

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤ 35 hli

≤ 45 hli

≤ 55 hli

Pem hauv ntej (Si-face) roughness (AFM)

Ra≤0.2nm (5μm * 5μm)

Qauv

Micropipe ceev

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Hlau impurities

≤5E10 atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Pem hauv ntej zoo

Pem hauv ntej

Si

Nto tiav

Lub ntsej muag CMP

Cov khoom

≤60ea / wafer (qhov loj ≥0.3μm)

NA

Kos

≤5ea / hli Kev sib sau ntev ≤ Diameter

Qhov ntev ≤2 * Txoj kab uas hla

NA

Txiv kab ntxwv tev / pits / stains / striations / tawg / paug

Tsis muaj

NA

Ntug chips / indents / tawg / hex daim hlau

Tsis muaj

Polytype cheeb tsam

Tsis muaj

Thaj tsam ≤ 20%

Thaj tsam ≤ 30%

Pem hauv ntej laser npav

Tsis muaj

Back Quality

Rov qab ua tiav

C-ntsej muag CMP

Kos

≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla

NA

Back defects (ntug chips / indents)

Tsis muaj

Rov qab roughness

Ra≤0.2nm (5μm * 5μm)

Rov qab laser npav

1mm (los ntawm sab saum toj ntug)

Ntug

Ntug

Chamfer

Ntim

Ntim

Epi-npaj nrog lub tshuab nqus tsev ntim

Multi-wafer cassette ntim

* Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD.

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SiC wafers

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