Product Overview
CovSilicon-Impregnated Silicon Carbide (SiC) Paddle thiab Wafer Carrieryog engineered kom tau raws li qhov xav tau ntawm semiconductor thermal ua daim ntaub ntawv. Crafted los ntawm high-purity SiC thiab txhim kho los ntawm silicon impregnation, cov khoom no muaj ib tug tshwj xeeb ua ke ntawm high-kub kev ua tau zoo, zoo heev thermal conductivity, corrosion kuj, thiab zoo heev mechanical zog.
Los ntawm kev sib koom ua ke cov khoom siv qib siab nrog kev tsim khoom, qhov kev daws teeb meem no ua kom muaj kev ua tau zoo, kev ntseeg tau, thiab ua haujlwm ntev rau cov tuam txhab semiconductor.
Ntsiab nta
1.Exceptional High-Temperature Resistance
Nrog lub melting point tshaj 2700 ° C, SiC cov ntaub ntawv yog inherently ruaj khov nyob rau hauv huab cua kub. Silicon impregnation ntxiv txhim kho lawv cov thermal stability, tso cai rau lawv tiv taus qhov ntev ntawm qhov kub thiab txias yam tsis muaj kev ua haujlwm tsis muaj zog lossis kev ua haujlwm tsis zoo.
2.Superior Thermal conductivity
Qhov tshwj xeeb thermal conductivity ntawm silicon-impregnated SiC ua kom cov cua sov tsis sib xws, txo cov kev ntxhov siab thermal thaum lub sijhawm ua haujlwm tseem ceeb. Cov cuab yeej no prolongs cov cuab yeej siv lub neej thiab txo qis qis qis, ua rau nws zoo tagnrho rau kev ua haujlwm siab thermal.
3.Oxidation thiab Corrosion Resistance
Cov txheej txheem silicon oxide zoo ib txwm ua rau ntawm qhov chaw, muab kev ua haujlwm zoo rau oxidation thiab corrosion. Qhov no ua kom muaj kev ntseeg siab ntev hauv qhov chaw ua haujlwm hnyav, tiv thaiv ob qho tib si cov khoom siv thiab cov khoom nyob ib puag ncig.
4.High Mechanical Strength thiab hnav tsis kam
Silicon-impregnated SiC nta zoo heev compressive zog thiab hnav tsis kam, tswj nws cov qauv kev ncaj ncees nyob rau hauv high-load, high-temperature tej yam kev mob. Qhov no txo qhov kev pheej hmoo ntawm kev puas tsuaj los ntawm kev hnav, ua kom muaj kev ua tau zoo ib yam dhau ntawm kev siv txuas ntxiv mus.
Specifications
| Khoom npe | SC-RSiC-Si |
| Khoom siv | Silicon Carbide Compact (siab purity) |
| Daim ntawv thov | Semiconductor Thaum tshav kub kub kho qhov chaw, Semiconductor Manufacturing Equipment Parts |
| Daim ntawv xa tuaj | Moulded lub cev (Sintered lub cev) |
| Kev sib xyaw | Mechanical Property | Young's Modulus (GPa) | Khoov zog (MPa) | ||
| Kev sib xyaw (vol%) | α-SiC | α-SiC | RT | 370 | 250 |
| 82 | 18 | 800 ° C | 360 | 220 | |
| Qhov ceev (kg / m³) | 3.02 x 103 | 1200 ° C | 340 | 220 | |
| Kub tiv thaiv kub ° C | 1350 | Poisson tus ratio | 0.18 (RT) | ||
| Thermal khoom | Thermal conductivity (W / (m· K)) | Tshwj xeeb kub muaj peev xwm (kJ/(kg·K)) | Coefficient ntawm Thermal Expansion (1 / K) | ||
| RT | 220 | 0.7 ua | RT ~ 700 ° C | 3.4x 10-6 | |
| 700 ° C | 60 | 1.23 | 700 ~ 1200 ° C | 4.3 x 10-6 | |
| Cov ntsiab lus impurity (ppm) | |||||||||||||
| Element | Fe | Ni | Na | K | Mg | Ca | Cr | Mn | Zn | Cu | Ti | Va | Ai |
| Cov ntsiab lus tus nqi | 3 | <2 | <0.5 | <0.1 | <1 | 5 | 0.3 | <0.1 | <0.1 | <0.1 | <0.3 | <0.3 | 25 |
Daim ntawv thov
▪Semiconductor Thermal Processing:Qhov zoo tshaj plaws rau cov txheej txheem xws li tshuaj vapor deposition (CVD), epitaxial kev loj hlob, thiab annealing, qhov twg tswj qhov kub thiab txias thiab cov khoom siv ntev yog qhov tseem ceeb.
▪Wafer Carriers & Paddles:Tsim kom muaj kev ruaj ntseg tuav thiab thauj wafers thaum lub sij hawm kev kho cua kub kub.
▪Extreme Operating Environments: Haum rau kev teeb tsa uas yuav tsum tau ua kom tsis muaj cua sov, tshuaj lom neeg, thiab kev ntxhov siab ntawm kev siv tshuab.
Qhov zoo ntawm Silicon-Impregnated SiC
Kev sib xyaw ua ke ntawm high-purity silicon carbide thiab advanced silicon impregnation thev naus laus zis muab cov txiaj ntsig kev ua tau zoo tsis sib xws:
▪Precision:Txhim kho qhov raug thiab tswj kev ua haujlwm ntawm semiconductor.
▪Kev ruaj ntseg:Withstands hnyav ib puag ncig yam tsis muaj kev cuam tshuam kev ua haujlwm.
▪Ntev:Extens lub neej kev pab cuam ntawm semiconductor manufacturing khoom.
▪Kev ua tau zoo:Txhim kho cov khoom tsim tau los ntawm kev ua kom ntseeg tau thiab cov txiaj ntsig zoo ib yam.
Vim li cas thiaj xaiv peb cov kev daws teeb meem Silicon-Impregnated SiC?
At Semicera, peb tshwj xeeb hauv kev muab cov kev daws teeb meem zoo raws li qhov xav tau ntawm cov tuam txhab semiconductor. Peb cov Silicon-Impregnated Silicon Carbide Paddle thiab Wafer Carrier tau txais kev sim nruj thiab kev lees paub zoo kom ua tau raws li cov qauv kev lag luam. Los ntawm kev xaiv Semicera, koj tau txais kev nkag mus rau cov ntaub ntawv txiav-ntug tsim los txhim kho koj cov txheej txheem tsim khoom thiab txhim kho koj lub peev xwm ntau lawm.
Technical Specifications
▪Khoom siv:High-purity silicon carbide nrog silicon impregnation.
▪Kev khiav hauj lwm qhov kub thiab txias:Txog li 2700 ° C.
▪ Thermal conductivity:Exceptionally siab rau uniform cua sov faib.
▪Resistance Properties:Oxidation, corrosion, thiab hnav-resistant.
▪Daim ntawv thov:Tau tshaj ntau yam semiconductor thermal ua tshuab.
Tiv tauj peb
Npaj los txhawb koj cov txheej txheem tsim khoom semiconductor? Hu rauSemiceraniaj hnub no kom paub ntau ntxiv txog peb cov Silicon-Impregnated Silicon Carbide Paddle thiab Wafer Carrier.
▪Email: sales01@semi-cera.com/sales05@semi-cera.com
▪Xov tooj: +86-0574-8650 3783
▪Qhov chaw:No.1958 Jiangnan Road, Ningbo High tech, Zone, Zhejiang Province, 315201, Suav teb
