Silicon ntawm Insulator Wafers

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Semicera's Silicon-on-Insulator wafers muab cov kev daws teeb meem zoo rau kev siv semiconductor siab heev. Qhov zoo tshaj plaws haum rau MEMS, sensors, thiab microelectronics, cov wafers muab cov hluav taws xob sib cais zoo heev thiab tsis tshua muaj kab mob parasitic capacitance. Semicera xyuas kom meej kev tsim khoom, xa cov khoom zoo ib yam rau ntau yam ntawm cov thev naus laus zis tshiab. Peb tos ntsoov yuav ua koj tus khub mus sij hawm ntev hauv Suav teb.


Product Detail

Khoom cim npe

Silicon ntawm Insulator Waferslos ntawm Semicera yog tsim los ua kom tau raws li qhov kev thov loj hlob rau kev ua tau zoo ntawm cov khoom siv semiconductor. Peb SOI wafers muaj kev ua tau zoo ntawm hluav taws xob thiab txo cov kab mob parasitic capacitance, ua rau lawv zoo tagnrho rau cov ntawv thov siab heev xws li MEMS li, sensors, thiab kev sib xyaw ua ke. Semicera qhov kev txawj ntse hauv wafer ntau lawm ua kom txhua tusSIB wafermuab kev ntseeg siab, ua tau zoo rau koj cov kev xav tau ntawm kev siv technology tshiab.

PebSilicon ntawm Insulator Wafersmuab qhov zoo sib npaug ntawm cov nqi-zoo thiab kev ua haujlwm. Nrog rau soi wafer tus nqi dhau los ua kev sib tw, cov wafers no tau siv dav hauv ntau qhov kev lag luam, suav nrog microelectronics thiab optoelectronics. Semicera cov txheej txheem kev tsim khoom siab tau lees paub zoo tshaj wafer bonding thiab uniformity, ua rau lawv haum rau ntau yam kev siv, los ntawm kab noj hniav SOI wafers rau standard silicon wafers.

Cov yam ntxwv tseem ceeb:

High-quality SOI wafers optimized rau kev ua tau zoo hauv MEMS thiab lwm yam kev siv.

Kev sib tw soi wafer nqi rau cov lag luam nrhiav kev daws teeb meem zoo yam tsis muaj kev cuam tshuam zoo.

Qhov zoo tshaj plaws rau cov thev naus laus zis thev naus laus zis, muab cov hluav taws xob sib cais thiab kev ua haujlwm zoo hauv silicon ntawm cov tshuab hluav taws xob.

PebSilicon ntawm Insulator Wafersyog engineered los muab cov kev daws teeb meem siab, txhawb cov nthwv dej tom ntej ntawm innovation hauv semiconductor technology. Seb koj tab tom ua haujlwm ntawm kab noj hniavSOI wafers, MEMS li, los yog silicon ntawm cov khoom siv insulator, Semicera muab cov wafers ua tau raws li cov qauv siab tshaj plaws hauv kev lag luam.

Cov khoom

Ntau lawm

Kev tshawb fawb

Dummy

Crystal Parameters

Polytype

4H

Deg orientation yuam kev

11-20 > 4 ± 0.15 °

Hluav taws xob Parameters

Dopant

n-hom Nitrogen

Kev tiv thaiv

0.015-0.025ohm · cm

Mechanical Parameters

Txoj kab uas hla

150.0 ± 0.2 hli

Thickness

350 ± 25 hli

Thawj qhov chaw tiaj tiaj

[1-100] ± 5°

Thawj lub tiaj tiaj ntev

47.5 ± 1.5 hli

Secondary flat

Tsis muaj

TTV

≤ 5 hli

≤10 hli

≤ 15 hli

LTV

≤ 3 μm (5mm * 5mm)

≤ 5 μm (5mm * 5mm)

≤ 10 μm (5mm * 5mm)

Hneev

-15μm ~ 15μm

-35μm ~ 35μm

-45μm ~ 45μm

Warp

≤ 35 hli

≤ 45 hli

≤ 55 hli

Pem hauv ntej (Si-face) roughness (AFM)

Ra≤0.2nm (5μm * 5μm)

Qauv

Micropipe ceev

<1 ea/cm2

<10 ea/cm2

<15 ea/cm2

Hlau impurities

≤5E10 atoms/cm2

NA

BPD

≤1500 ea/cm2

≤3000 ea/cm2

NA

TSD

≤500 ea/cm2

≤1000 ea/cm2

NA

Pem hauv ntej zoo

Pem hauv ntej

Si

Nto tiav

Lub ntsej muag CMP

Cov khoom

≤60ea / wafer (qhov loj ≥0.3μm)

NA

Kos

≤5ea / hli Kev sib sau ntev ≤ Diameter

Qhov ntev ≤2 * Txoj kab uas hla

NA

Txiv kab ntxwv tev / pits / stains / striations / tawg / paug

Tsis muaj

NA

Ntug chips / indents / tawg / hex daim hlau

Tsis muaj

Polytype cheeb tsam

Tsis muaj

Thaj tsam ≤ 20%

Thaj tsam ≤ 30%

Pem hauv ntej laser npav

Tsis muaj

Back Quality

Rov qab ua tiav

C-ntsej muag CMP

Kos

≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla

NA

Back defects (ntug chips / indents)

Tsis muaj

Rov qab roughness

Ra≤0.2nm (5μm * 5μm)

Rov qab laser npav

1mm (los ntawm sab saum toj ntug)

Ntug

Ntug

Chamfer

Ntim

Ntim

Epi-npaj nrog lub tshuab nqus tsev ntim

Multi-wafer cassette ntim

* Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD.

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