Semicera Silicon Substrates yog tsim los ua kom tau raws li qhov xav tau nruj ntawm kev lag luam semiconductor, muab qhov tsis sib xws thiab qhov tseeb. Cov substrates no muab lub hauv paus txhim khu kev qha rau ntau yam kev siv, los ntawm kev sib xyaw ua ke mus rau cov cell photovoltaic, kom ntseeg tau tias kev ua haujlwm zoo thiab kev ua haujlwm ntev.
Lub siab purity ntawm Semicera Silicon Substrates ua kom muaj qhov tsis xws luag thiab cov yam ntxwv zoo tshaj plaws, uas yog qhov tseem ceeb rau kev tsim cov khoom siv hluav taws xob zoo. Qhov no theem ntawm purity pab txo lub zog poob thiab txhim kho tag nrho cov efficiency ntawm semiconductor li.
Semicera siv cov txheej txheem tsim khoom hauv lub xeev los tsim cov khoom siv silicon nrog qhov tshwj xeeb sib xws thiab flatness. Qhov kev txiav txim siab no yog qhov tseem ceeb rau kev ua tiav cov txiaj ntsig zoo ib yam hauv cov khoom siv hluav taws xob semiconductor, qhov twg txawm tias qhov sib txawv me ntsis tuaj yeem cuam tshuam cov cuab yeej ua haujlwm thiab tawm los.
Muaj nyob rau hauv ntau qhov ntau thiab tsawg thiab qhov tshwj xeeb, Semicera Silicon Substrates ua raws li ntau yam kev xav tau ntawm kev lag luam. Txawm hais tias koj tab tom tsim cov microprocessors los yog cov hnub ci vaj huam sib luag, cov substrates no muab qhov yooj yim thiab kev ntseeg siab xav tau rau koj daim ntawv thov tshwj xeeb.
Semicera tau mob siab rau kev txhawb nqa kev tsim kho tshiab thiab kev ua haujlwm zoo hauv kev lag luam semiconductor. Los ntawm kev muab cov khoom siv zoo silicon substrates, peb pab cov tuam txhab lag luam thawb cov ciam teb ntawm kev siv tshuab, xa cov khoom uas ua tau raws li cov kev xav tau ntawm lub khw. Cia siab rau Semicera rau koj cov khoom siv hluav taws xob thiab photovoltaic tiam tom ntej.
| Cov khoom | Ntau lawm | Kev tshawb fawb | Dummy |
| Crystal Parameters | |||
| Polytype | 4H | ||
| Deg orientation yuam kev | 11-20 > 4 ± 0.15 ° | ||
| Hluav taws xob Parameters | |||
| Dopant | n-hom Nitrogen | ||
| Kev tiv thaiv | 0.015-0.025ohm · cm | ||
| Mechanical Parameters | |||
| Txoj kab uas hla | 150.0 ± 0.2 hli | ||
| Thickness | 350 ± 25 hli | ||
| Thawj qhov chaw tiaj tiaj | [1-100] ± 5° | ||
| Thawj lub tiaj tiaj ntev | 47.5 ± 1.5 hli | ||
| Secondary flat | Tsis muaj | ||
| TTV | ≤ 5 hli | ≤10 hli | ≤ 15 hli |
| LTV | ≤ 3 μm (5mm * 5mm) | ≤ 5 μm (5mm * 5mm) | ≤ 10 μm (5mm * 5mm) |
| Hneev | -15μm ~ 15μm | -35μm ~ 35μm | -45μm ~ 45μm |
| Warp | ≤ 35 hli | ≤ 45 hli | ≤ 55 hli |
| Pem hauv ntej (Si-face) roughness (AFM) | Ra≤0.2nm (5μm * 5μm) | ||
| Qauv | |||
| Micropipe ceev | <1 ea/cm2 | <10 ea/cm2 | <15 ea/cm2 |
| Hlau impurities | ≤5E10 atoms/cm2 | NA | |
| BPD | ≤1500 ea/cm2 | ≤3000 ea/cm2 | NA |
| TSD | ≤500 ea/cm2 | ≤1000 ea/cm2 | NA |
| Pem hauv ntej zoo | |||
| Pem hauv ntej | Si | ||
| Nto tiav | Lub ntsej muag CMP | ||
| Cov khoom | ≤60ea / wafer (qhov loj ≥0.3μm) | NA | |
| Kos | ≤5ea / hli Kev sib sau ntev ≤ Diameter | Qhov ntev ≤2 * Txoj kab uas hla | NA |
| Txiv kab ntxwv tev / pits / stains / striations / tawg / paug | Tsis muaj | NA | |
| Ntug chips / indents / tawg / hex daim hlau | Tsis muaj | ||
| Polytype cheeb tsam | Tsis muaj | Thaj tsam ≤ 20% | Thaj tsam ≤ 30% |
| Pem hauv ntej laser npav | Tsis muaj | ||
| Back Quality | |||
| Rov qab ua tiav | C-ntsej muag CMP | ||
| Kos | ≤5ea/mm, Qhov ntev ≤2 * Txoj kab uas hla | NA | |
| Back defects (ntug chips / indents) | Tsis muaj | ||
| Rov qab roughness | Ra≤0.2nm (5μm * 5μm) | ||
| Rov qab laser npav | 1mm (los ntawm sab saum toj ntug) | ||
| Ntug | |||
| Ntug | Chamfer | ||
| Ntim | |||
| Ntim | Epi-npaj nrog lub tshuab nqus tsev ntim Multi-wafer cassette ntim | ||
| * Lus Cim: "NA" txhais tau tias tsis muaj kev thov Cov khoom tsis tau hais txog yuav xa mus rau SEMI-STD. | |||
