TaC coated epitaxial wafer nqafeem ntau yog siv nyob rau hauv kev npaj ntawm high-kev ua tau zoo optoelectronic li, hwj chim pab kiag li lawm, sensors thiab lwm yam teb. Qhov noepitaxial wafer cab kujhais txog lub deposition ntawmTaCnyias zaj duab xis ntawm lub substrate thaum lub sij hawm siv lead ua kev loj hlob txheej txheem los tsim wafer nrog cov qauv tshwj xeeb thiab kev ua tau zoo rau kev npaj cov cuab yeej tom ntej.
Chemical vapor deposition (CVD) technology feem ntau yog siv los npajTaC coated epitaxial wafer nqa. Los ntawm reacting hlau organic precursors thiab carbon qhov chaw gases ntawm qhov kub thiab txias, ib tug TaC zaj duab xis yuav muab tso rau saum npoo ntawm lub crystal substrate. Cov yeeb yaj kiab no tuaj yeem muaj cov khoom siv hluav taws xob zoo, kho qhov muag thiab kho qhov muag thiab tsim nyog rau kev npaj ntau yam khoom siv ua haujlwm siab.
Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev. Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
