TaC coated graphite qhia ringsxa mus rau lub deposition ntawm ib tug nyias txheej ntawmtantalum carbidenyob rau saum npoo ntawm graphite qhia nplhaib los txhim kho nws cov hnav tsis kam, kub tsis kam thiab tshuaj lom neeg ruaj khov. Cov txheej no feem ntau yog tsim rau saum npoo ntawm graphite qhia nplhaib los ntawm cov tswv yim xws li lub cev vapor deposition (PVD) lossis tshuaj vapor deposition (CVD).
Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua.
Cov yam ntxwv tseem ceeb ntawm TaC coated graphite qhia rings suav nrog:
1. Kev kub siab ua haujlwm: TaC txheej muaj qhov kub thiab txias zoo heev thiab tuaj yeem tswj kev ruaj ntseg hauv qhov kub thiab txias.
2. Hnav tsis kam: Lub siab hardness ntawm tantalum carbide nyias txheej muab lub nplhaib coj zoo coj los tiv thaiv thiab ncua nws lub neej kev pab.
3. Chemical stability: TaC txheej muaj kev ruaj ntseg tiv thaiv cov tshuaj corrosion, ua rau nws haum rau cov ntawv thov nyob rau hauv ib co corrosive media.
4. Txo kev sib txhuam: TaC txheej tuaj yeem txo qhov kev sib txhuam ntawm lub nplhaib graphite thiab lwm yam khoom thiab txhim kho kev ua haujlwm ntawm cov khoom siv foob.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev. Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
