TAC txheejyog ib qho tseem ceeb txheej txheej, uas feem ntau yog npaj rau ntawm graphite puag los ntawm hlau organic chemical vapor deposition (MOCVD) technology. Cov txheej no muaj cov khoom zoo heev, xws li siab tawv, hnav zoo heev, kub tsis kam thiab tshuaj lom neeg ruaj khov, thiab tsim nyog rau ntau yam kev thov engineering.
MOCVD thev naus laus zis yog ib qho kev siv tshuab ua yeeb yaj kiab loj loj uas tso cov yeeb yaj kiab uas xav tau rau ntawm qhov chaw substrate los ntawm kev ua cov hlau organic precursors nrog reactive gases ntawm qhov kub thiab txias. Thaum npajTAC txheej, xaiv cov khoom tsim nyog hlau organic precursors thiab cov pa roj carbon monoxide, tswj cov kev mob tshwm sim thiab kev tso tawm tsis zoo, cov yeeb yaj kiab tsis zoo thiab tuab TaC tuaj yeem tso rau ntawm graphite puag.
Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev. Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
