Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tantalum carbide coated wafer nqa tau dav siv hauv wafer ua thiab tuav cov txheej txheem hauv cov txheej txheem tsim khoom semiconductor. Lawv muab kev txhawb nqa ruaj khov thiab kev tiv thaiv kom muaj kev nyab xeeb, raug thiab sib xws ntawm wafers thaum lub sijhawm tsim khoom. Tantalum carbide coatings tuaj yeem txuas lub neej kev pab cuam ntawm cov cab kuj, txo cov nqi, thiab txhim kho qhov zoo thiab kev ntseeg siab ntawm cov khoom semiconductor.
Kev piav qhia ntawm tantalum carbide coated wafer cab kuj yog raws li nram no:
1. Kev xaiv cov khoom siv: Tantalum carbide yog cov khoom siv nrog kev ua tau zoo, siab hardness, siab melting point, corrosion kuj thiab zoo heev mechanical zog, yog li nws yog dav siv nyob rau hauv semiconductor manufacturing txheej txheem.
2. Txheej txheej: Tantalum carbide txheej yog siv rau saum npoo ntawm wafer cab kuj los ntawm txheej txheej txheej tshwj xeeb los tsim cov txheej txheem sib xws thiab tuab tantalum carbide txheej. Cov txheej no tuaj yeem muab kev tiv thaiv ntxiv thiab hnav tsis kam, thaum muaj thermal conductivity zoo.
3. Flatness thiab precision: Tantalum carbide coated wafer carrier muaj qib siab ntawm flatness thiab precision, ua kom ruaj khov thiab raug ntawm wafers thaum lub sij hawm tsim khoom. Lub flatness thiab tiav ntawm cov cab kuj yog ib qho tseem ceeb los xyuas kom meej qhov zoo thiab kev ua tau zoo ntawm lub wafer.
4. Temperature stability: Tantalum carbide coated wafer carriers tuaj yeem tswj kev ruaj ntseg nyob rau hauv qhov kub thiab txias ib puag ncig yam tsis muaj deformation los yog loosening, ua kom ruaj khov thiab sib xws ntawm wafers hauv cov txheej txheem kub.
5. Corrosion kuj: Tantalum carbide coatings muaj corrosion kuj zoo heev, muaj peev xwm tiv taus qhov yaig ntawm cov tshuaj thiab cov kuab tshuaj, thiab tiv thaiv cov cab kuj los ntawm cov kua thiab roj corrosion.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev. Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
