Tantalum carbide coated graphite ntawvyog cov khoom siv graphite nrog ib txheej nyias ntawmtantalum carbidenyob rau saum npoo ntawm substrate. Cov txheej nyias nyias ntawm tantalum carbide feem ntau yog tsim rau saum npoo ntawm graphite substrate los ntawm cov txheej txheem xws li lub cev vapor deposition (PVD) lossis tshuaj vapor deposition (CVD). Cov txheej no muaj cov khoom zoo xws li siab hardness, zoo heev hnav tsis kam, corrosion kuj thiab kub stability.
Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua.
Lub ntsiab zoo ntawm tantalum carbide coated graphite ntawv muaj xws li:
1. Qhov kub thiab txias tsis kam: Tantalum carbide muaj lub siab melting point thiab zoo heev kub stability, ua rau coated graphite ntawv haum rau siv nyob rau hauv kub kub ib puag ncig.
2. Corrosion tsis kam: Tantalum carbide txheej tuaj yeem tiv thaiv kev yaig ntawm ntau cov tshuaj corrosive thiab txuas ntxiv lub neej kev pab cuam ntawm cov khoom.
3. High hardness: Lub siab hardness ntawm tantalum carbide nyias txheej muab zoo hnav tsis kam thiab yog haum rau daim ntaub ntawv uas yuav tsum tau siab hnav tsis kam.
4. Chemical stability: Tantalum carbide txheej muaj kev ruaj ntseg zoo heev rau cov tshuaj corrosion thiab yog tsim rau siv nyob rau hauv ib co corrosive media.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev. Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
