Tantalum carbide coated susceptor phajyog ib tug susceptor los yog kev txhawb nqa qauv uas yog them nrog ib tug nyias txheej ntawmtantalum carbide. Cov txheej no tuaj yeem tsim rau ntawm qhov chaw susceptor los ntawm cov tswv yim xws li lub cev vapor deposition (PVD) los yog tshuaj vapor deposition (CVD), muab cov susceptor lub superior zog ntawmtantalum carbide.
Semicera muab tshwj xeeb tantalum carbide (TaC) txheej rau ntau yam khoom thiab cov khoom nqa.Semicera ua txheej txheem txheej txheej ua rau tantalum carbide (TaC) txheej kom ua tiav siab purity, kub ruaj khov thiab siab tshuaj lom neeg, txhim kho cov khoom zoo ntawm SIC / GAN muaju thiab EPI txheej (Graphite coated TaC susceptor), thiab txuas ntxiv lub neej ntawm cov khoom tseem ceeb reactor. Kev siv tantalum carbide TaC txheej yog los daws qhov teeb meem ntawm ntug thiab txhim kho qhov zoo ntawm cov siv lead ua kev loj hlob, thiab Semicera tau tawg los daws cov tantalum carbide txheej tshuab (CVD), mus txog qib siab thoob ntiaj teb.
Tom qab xyoo ntawm txoj kev loj hlob, Semicera tau kov yeej cov thev naus laus zis ntawmCVD TSInrog rau kev sib koom tes ntawm R & D department. Cov kev tsis zoo no yooj yim tshwm sim hauv cov txheej txheem kev loj hlob ntawm SiC wafers, tab sis tom qab sivTaC, qhov txawv yog qhov tseem ceeb. Hauv qab no yog kev sib piv ntawm wafers nrog thiab tsis muaj TaC, nrog rau Simicera 'qhov chaw rau ib qho kev loj hlob siv lead ua.
Cov yam ntxwv tseem ceeb ntawm tantalum carbide coated puag txhawb daim hlau muaj xws li:
1. Kev ruaj ntseg kub kub: Tantalum carbide muaj kev ruaj ntseg kub zoo heev, ua rau lub hauv paus txheej txheem phaj haum rau kev txhawb nqa kev xav tau hauv qhov chaw ua haujlwm kub.
2. Corrosion kuj: Tantalum carbide txheej muaj corrosion kuj zoo, muaj peev xwm tiv taus tshuaj lom neeg corrosion thiab oxidation, thiab ntev kev pab cuam lub neej ntawm lub hauv paus.
3. High hardness thiab hnav tsis kam: Lub siab hardness ntawm tantalum carbide txheej muab lub hauv paus kev txhawb nqa phaj zoo hnav tsis kam, uas yog tsim rau lub sijhawm uas yuav tsum tau hnav tsis kam.
4. Chemical stability: Tantalum carbide muaj kev ruaj ntseg siab rau ntau yam tshuaj lom neeg, ua rau cov coated base support phaj ua tau zoo hauv qee qhov chaw corrosive.
nrog thiab tsis muaj TaC
Tom qab siv TaC (txoj cai)
Ntxiv mus, Semicera'sTaC-coated cov khoomnthuav tawm lub neej ua haujlwm ntev dua thiab muaj kev kub ntxhov ntau dua piv rauSiC coatings.Kev ntsuas ntsuas tau pom tias pebTAC coatingstuaj yeem ua haujlwm tsis tu ncua ntawm qhov kub txog li 2300 degrees Celsius rau lub sijhawm ntev. Hauv qab no yog qee qhov piv txwv ntawm peb cov qauv:
