Wafer tuav caj npabyog cov khoom siv tseem ceeb siv hauv cov txheej txheem tsim khoom semiconductor los tuav, hloov thiab txoj haujlwmwafers. Nws feem ntau muaj lub caj npab robotic, gripper thiab kev tswj hwm, nrog rau kev txav mus los thiab qhov chaw muaj peev xwm.Wafer tuav caj npabyog dav siv nyob rau hauv ntau yam kev sib txuas hauv semiconductor manufacturing, nrog rau cov txheej txheem cov kauj ruam xws li wafer loading, tu, nyias zaj duab xis deposition, etching, lithography thiab soj ntsuam. Nws cov precision, kev cia siab rau thiab automation muaj peev xwm yog qhov tseem ceeb los xyuas kom meej qhov zoo, efficiency thiab sib xws ntawm cov txheej txheem ntau lawm.
Lub luag haujlwm tseem ceeb ntawm wafer tuav caj npab muaj xws li:
1. Kev hloov pauv wafer: Lub caj npab tuav wafer muaj peev xwm hloov cov wafers ntawm ib qho chaw mus rau lwm qhov, xws li nqa cov wafers los ntawm cov khib nyiab thiab muab tso rau hauv cov khoom siv ua haujlwm.
2. Qhov chaw thiab kev taw qhia: Lub wafer tuav caj npab muaj peev xwm ua kom raug txoj hauj lwm thiab taw qhia lub wafer kom ntseeg tau tias kev sib raug zoo thiab txoj hauj lwm rau kev ua haujlwm tom ntej lossis kev ntsuas kev ua haujlwm.
3. Clamping thiab tso tawm: wafer tuav caj npab feem ntau yog nruab nrog grippers uas tuaj yeem ruaj ntseg clamp wafers thiab tso tawm thaum xav tau los xyuas kom muaj kev nyab xeeb ntawm kev hloov pauv thiab tuav cov wafers.
4. Kev tswj tsis siv neeg: Lub wafer tuav caj npab yog nruab nrog kev tswj hwm qib siab uas tuaj yeem ua tiav qhov kev txiav txim siab ua ntej, txhim kho kev tsim khoom thiab txo cov neeg ua yuam kev.
Cov yam ntxwv thiab qhov zoo
1.Precise qhov ntev thiab thermal stability.
2.High tshwj xeeb nruj thiab zoo heev thermal uniformity, ntev siv tsis yooj yim rau khoov deformation.
3.It muaj ib tug du nto thiab zoo hnav tsis kam, yog li kev nyab xeeb tuav lub nti yam tsis muaj kab mob.
4.Silicon carbide resistivity nyob rau hauv 106-108Ω, tsis-sib nqus, nyob rau hauv txoj kab nrog anti-ESD specification yuav tsum tau; Nws tuaj yeem tiv thaiv qhov sib txuam ntawm cov hluav taws xob zoo li qub ntawm cov nti.
5.Good thermal conductivity, tsawg expansion coefficient.
